{"id":1989,"date":"2025-12-19T08:58:19","date_gmt":"2025-12-19T08:58:19","guid":{"rendered":"https:\/\/regenerative-thermal-oxidation.com\/?p=1989"},"modified":"2025-12-19T08:58:19","modified_gmt":"2025-12-19T08:58:19","slug":"%d8%a7%d9%84%d8%ad%d8%af-%d9%85%d9%86-%d8%a7%d9%86%d8%a8%d8%b9%d8%a7%d8%ab%d8%a7%d8%aa-%d8%a7%d9%84%d8%b7%d8%a8%d8%a7%d8%b9%d8%a9-%d8%a7%d9%84%d8%b6%d9%88%d8%a6%d9%8a%d8%a9-%d9%81%d9%8a-%d8%a3%d8%b4","status":"publish","type":"post","link":"https:\/\/regenerative-thermal-oxidation.com\/ar\/%d8%b7%d9%84%d8%a8\/%d8%a7%d9%84%d8%ad%d8%af-%d9%85%d9%86-%d8%a7%d9%86%d8%a8%d8%b9%d8%a7%d8%ab%d8%a7%d8%aa-%d8%a7%d9%84%d8%b7%d8%a8%d8%a7%d8%b9%d8%a9-%d8%a7%d9%84%d8%b6%d9%88%d8%a6%d9%8a%d8%a9-%d9%81%d9%8a-%d8%a3%d8%b4\/","title":{"rendered":"\u0627\u0644\u062d\u062f \u0645\u0646 \u0627\u0646\u0628\u0639\u0627\u062b\u0627\u062a \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u0636\u0648\u0626\u064a\u0629 \u0641\u064a \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a: \u0627\u0644\u0645\u0648\u0627\u0632\u0646\u0629 \u0628\u064a\u0646 \u0627\u0644\u0627\u0645\u062a\u062b\u0627\u0644 \u0648\u0625\u0646\u062a\u0627\u062c\u064a\u0629 \u0627\u0644\u0631\u0642\u0627\u0642\u0629"},"content":{"rendered":"<p>\u0645\u0639 \u062f\u062e\u0648\u0644 \u0635\u0646\u0627\u0639\u0629 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \"\u0639\u0635\u0631 \u0627\u0644\u0623\u0646\u062c\u0633\u062a\u0631\u0648\u0645\" \u0628\u062a\u0642\u0646\u064a\u0627\u062a 3 \u0646\u0627\u0646\u0648\u0645\u062a\u0631 \u06482 \u0646\u0627\u0646\u0648\u0645\u062a\u0631\u060c \u064a\u0648\u0627\u062c\u0647 \u0643\u0644 \u0646\u0638\u0627\u0645 \u062f\u0639\u0645 \u0644\u0644\u0645\u0646\u0634\u0623\u0629 \u062a\u062d\u062f\u064a\u0627\u062a \u063a\u064a\u0631 \u0645\u0633\u0628\u0648\u0642\u0629. \u0648\u062a\u0645\u062b\u0644 \u0648\u062d\u062f\u0627\u062a \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u0636\u0648\u0626\u064a\u0629 \u0648\u0627\u0644\u062a\u0637\u0648\u064a\u0631 \u0641\u064a \u062e\u0637 \u0627\u0644\u0625\u0646\u062a\u0627\u062c \u0627\u0644\u0623\u0645\u0627\u0645\u064a (FEOL) \u0623\u0643\u062b\u0631 \u0627\u0644\u0645\u0646\u0627\u0637\u0642 \u0643\u062b\u0627\u0641\u0629\u064b \u0641\u064a \u0631\u0623\u0633 \u0627\u0644\u0645\u0627\u0644 \u0648\u062d\u0633\u0627\u0633\u064a\u0629\u064b \u0644\u0644\u0628\u064a\u0626\u0629 \u0641\u064a \u0627\u0644\u0645\u0635\u0646\u0639.<\/p>\n<p>\u0641\u064a \u0647\u0630\u0647 \u0627\u0644\u0628\u064a\u0626\u0629 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0645\u062e\u0627\u0637\u0631\u060c \u062a\u064f\u0639\u062f \u0625\u062f\u0627\u0631\u0629 \u0627\u0644\u0645\u0631\u0643\u0628\u0627\u062a \u0627\u0644\u0639\u0636\u0648\u064a\u0629 \u0627\u0644\u0645\u062a\u0637\u0627\u064a\u0631\u0629 (VOCs) \u0645\u062b\u0644 <strong>\u0631\u0627\u0628\u0637\u0629 \u0645\u062f\u064a\u0631\u064a \u0648\u0645\u0635\u062f\u0631\u064a \u0645\u0646\u062a\u062c\u0627\u062a \u0627\u0644\u0628\u062a\u0631\u0648\u0644 (PGMEA)<\/strong> \u0648 <strong>\u0646\u0638\u0627\u0645 \u0625\u062f\u0627\u0631\u0629 \u0628\u064a\u0627\u0646\u0627\u062a \u0627\u0644\u0647\u0627\u062a\u0641 \u0627\u0644\u0645\u062d\u0645\u0648\u0644<\/strong> \u0625\u0646\u0647\u0627 \u0623\u0643\u062b\u0631 \u0645\u0646 \u0645\u062c\u0631\u062f \u0627\u0644\u062a\u0632\u0627\u0645 \u0628\u064a\u0626\u064a. \u0625\u0630\u0627 \u0643\u0627\u0646 \u0646\u0638\u0627\u0645 \u0627\u0644\u0645\u0624\u0643\u0633\u062f \u0627\u0644\u062d\u0631\u0627\u0631\u064a \u0627\u0644\u062a\u062c\u062f\u064a\u062f\u064a (RTO) \u064a\u064f\u0646\u062a\u062c \u062d\u062a\u0649 \u0643\u0645\u064a\u0629 \u0636\u0626\u064a\u0644\u0629 \u0645\u0646 \u0627\u0644\u0627\u0646\u0628\u0639\u0627\u062b\u0627\u062a <strong>\u062a\u0642\u0644\u0628\u0627\u062a \u0627\u0644\u0636\u063a\u0637<\/strong> \u0623\u0648 <strong>\u0627\u0644\u0627\u0647\u062a\u0632\u0627\u0632\u0627\u062a<\/strong>\u0642\u062f \u064a\u062a\u0633\u0628\u0628 \u0630\u0644\u0643 \u0641\u064a \u0639\u062f\u0645 \u0648\u0636\u0648\u062d \u0627\u0644\u0635\u0648\u0631\u0629 \u0641\u064a \u0627\u0644\u0645\u0627\u0633\u062d \u0627\u0644\u0636\u0648\u0626\u064a\u060c \u0645\u0645\u0627 \u064a\u0624\u062f\u064a \u0625\u0644\u0649 \u062e\u0633\u0627\u0626\u0631 \u0641\u0627\u062f\u062d\u0629 \u0641\u064a \u0625\u0646\u062a\u0627\u062c\u064a\u0629 \u062f\u0641\u0639\u0627\u062a \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0628\u0623\u0643\u0645\u0644\u0647\u0627. \u0643\u064a\u0641 \u0646\u062d\u0642\u0642 \u0627\u0646\u0628\u0639\u0627\u062b\u0627\u062a \"\u062e\u0627\u0644\u064a\u0629 \u0645\u0646 \u0627\u0644\u062a\u062f\u0627\u062e\u0644\" \u0645\u0639 \u0627\u0644\u0627\u0644\u062a\u0632\u0627\u0645 \u0628\u0645\u0639\u0627\u064a\u064a\u0631 \u0627\u0644\u062d\u0648\u0643\u0645\u0629 \u0627\u0644\u0628\u064a\u0626\u064a\u0629 \u0648\u0627\u0644\u0627\u062c\u062a\u0645\u0627\u0639\u064a\u0629 \u0648\u0627\u0644\u0645\u0624\u0633\u0633\u064a\u0629 \u0627\u0644\u0639\u0627\u0644\u0645\u064a\u0629\u061f<\/p>\n<h2><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-1754\" src=\"https:\/\/regenerative-thermal-oxidation.com\/wp-content\/uploads\/2025\/12\/screenshot_2025-12-10_11-12-25.webp\" alt=\"\u0635\u0646\u0627\u0639\u0629 \u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a\u0627\u062a\" width=\"497\" height=\"327\" srcset=\"https:\/\/regenerative-thermal-oxidation.com\/wp-content\/uploads\/2025\/12\/screenshot_2025-12-10_11-12-25.webp 497w, https:\/\/regenerative-thermal-oxidation.com\/wp-content\/uploads\/2025\/12\/screenshot_2025-12-10_11-12-25-480x316.webp 480w\" sizes=\"(min-width: 0px) and (max-width: 480px) 480px, (min-width: 481px) 497px, 100vw\" \/><\/h2>\n<h2>\u0627\u0644\u062a\u062d\u062f\u064a\u0627\u062a \u0627\u0644\u0623\u0633\u0627\u0633\u064a\u0629: \u0644\u0645\u0627\u0630\u0627 \u062a\u0648\u0627\u062c\u0647 \u0634\u0631\u0643\u0627\u062a \u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0623\u0635\u0644\u064a\u0629 \u0627\u0644\u062a\u0642\u0644\u064a\u062f\u064a\u0629 \u0635\u0639\u0648\u0628\u0629 \u0641\u064a \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629 (\u0623\u0633\u0626\u0644\u0629 \u0648\u0623\u062c\u0648\u0628\u0629)<\/h2>\n<h3>1. \u0645\u0627 \u0647\u064a \"\u0646\u0628\u0636\u0629 \u0627\u0644\u0636\u063a\u0637\" \u0627\u0644\u0646\u0627\u062a\u062c\u0629 \u0639\u0646 \u0639\u0645\u0644\u064a\u0629 RTO\u061f<\/h3>\n<p>\u062a\u0633\u062a\u062e\u062f\u0645 \u0623\u0646\u0638\u0645\u0629 RTO \u0627\u0644\u062a\u0642\u0644\u064a\u062f\u064a\u0629 \u0630\u0627\u062a \u0627\u0644\u0628\u0631\u062c\u064a\u0646 \u0623\u0648 \u0627\u0644\u062b\u0644\u0627\u062b\u0629 \u0623\u0628\u0631\u0627\u062c \u0635\u0645\u0627\u0645\u0627\u062a \u0647\u0648\u0627\u0626\u064a\u0629 \u0644\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0639\u0645\u0644\u064a\u0629 \u0627\u0644\u062a\u062d\u0648\u064a\u0644. \u0639\u0646\u062f \u0644\u062d\u0638\u0629 \u0627\u0644\u062a\u062d\u0648\u064a\u0644\u060c \u064a\u062d\u062f\u062b \u0627\u0631\u062a\u0641\u0627\u0639 \u0645\u0641\u0627\u062c\u0626 \u0641\u064a \u0627\u0644\u0636\u063a\u0637 (\u0639\u0627\u062f\u0629\u064b \u0645\u0627 \u0628\u064a\u0646 \u00b150 \u0628\u0627\u0633\u0643\u0627\u0644 \u0648\u00b1200 \u0628\u0627\u0633\u0643\u0627\u0644) \u0641\u064a \u0642\u0646\u0627\u0629 \u0627\u0644\u0639\u0627\u062f\u0645. \u0628\u0627\u0644\u0646\u0633\u0628\u0629 \u0644\u0644\u0645\u0627\u0633\u062d \u0627\u0644\u0636\u0648\u0626\u064a \u0627\u0644\u062f\u0642\u064a\u0642\u060c \u064a\u064f\u062e\u0644\u0651 \u0647\u0630\u0627 \u0627\u0644\u0627\u0631\u062a\u0641\u0627\u0639 \u0627\u0644\u0645\u0641\u0627\u062c\u0626 \u0628\u0627\u0644\u062a\u0648\u0627\u0632\u0646 \u0627\u0644\u0628\u064a\u0626\u064a \u0627\u0644\u062f\u0642\u064a\u0642 \u062f\u0627\u062e\u0644 \u0627\u0644\u0645\u0633\u0627\u0631 (\u0627\u0644\u0637\u0644\u0627\u0621\/\u0627\u0644\u062a\u0638\u0647\u064a\u0631)\u060c \u0645\u0645\u0627 \u064a\u0624\u062f\u064a \u0625\u0644\u0649 \u0625\u0637\u0644\u0627\u0642 \u0625\u0646\u0630\u0627\u0631\u0627\u062a \u0627\u0644\u062a\u0639\u0634\u064a\u0642 \u0648\u062a\u0648\u0642\u0641 \u0627\u0644\u0646\u0638\u0627\u0645 \u0639\u0646 \u0627\u0644\u0639\u0645\u0644.<\/p>\n<h3>2. \u0644\u0645\u0627\u0630\u0627 \u064a\u0639\u062a\u0628\u0631 \u0646\u0638\u0627\u0645 RTO \u0627\u0644\u062f\u0648\u0627\u0631 \u0627\u0644\u062e\u064a\u0627\u0631 \u0627\u0644\u0645\u0641\u0636\u0644 \u0644\u0645\u0635\u0627\u0646\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a\u061f<\/h3>\n<p><strong>\u0645\u0646\u0638\u0645\u0627\u062a \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u062f\u0648\u0627\u0631\u0629<\/strong> \u064a\u064f\u0633\u062a\u062e\u062f\u0645 \u0635\u0645\u0627\u0645 \u062a\u0648\u0632\u064a\u0639 \u062f\u0648\u0627\u0631 \u0628\u0627\u0633\u062a\u0645\u0631\u0627\u0631 \u0628\u062f\u0644\u0627\u064b \u0645\u0646 \u0635\u0645\u0627\u0645\u0627\u062a \u0627\u0644\u0628\u0648\u0628\u064a\u062a \u0627\u0644\u062a\u0631\u062f\u062f\u064a\u0629. \u064a\u0648\u0641\u0631 \u0647\u0630\u0627 \u062a\u062f\u0641\u0642 \u0647\u0648\u0627\u0621 \u0633\u0644\u0633\u064b\u0627 \u0648\u0645\u0633\u062a\u0645\u0631\u064b\u0627 \u0644\u0644\u063a\u0627\u064a\u0629\u060c \u0645\u0645\u0627 \u064a\u0644\u063a\u064a \u0646\u0628\u0636\u0627\u062a \u0627\u0644\u0636\u063a\u0637. \u0648\u064a\u0636\u0645\u0646 \u0628\u0642\u0627\u0621 \u062a\u0642\u0644\u0628\u0627\u062a \u0627\u0644\u0636\u063a\u0637 \u0627\u0644\u0633\u0627\u0643\u0646 \u0641\u064a \u0646\u0638\u0627\u0645 \u0627\u0644\u0639\u0627\u062f\u0645 \u0636\u0645\u0646 \u0627\u0644\u062d\u062f\u0648\u062f \u0627\u0644\u0645\u0633\u0645\u0648\u062d \u0628\u0647\u0627. <strong>\u00b110 \u0628\u0627\u0633\u0643\u0627\u0644<\/strong>\u062a\u062d\u0642\u064a\u0642 \u062d\u0642\u064a\u0642\u064a <strong>Zero-Pulse\u2122<\/strong> \u0623\u062f\u0627\u0621.<\/p>\n<h3>3. \u0643\u064a\u0641 \u064a\u0645\u0643\u0646 \u0645\u0646\u0639 \"\u0627\u0644\u062a\u0644\u0648\u062b \u0627\u0644\u062b\u0627\u0646\u0648\u064a\" \u0641\u064a \u0639\u0627\u062f\u0645 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a\u061f<\/h3>\n<p>\u063a\u0627\u0644\u0628\u0627\u064b \u0645\u0627 \u062a\u062d\u062a\u0648\u064a \u0645\u062e\u0644\u0641\u0627\u062a \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629 \u0639\u0644\u0649 \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646\u0627\u062a (\u0627\u0644\u0646\u0627\u062a\u062c\u0629 \u0639\u0646 \u062a\u062d\u0644\u0644 HMDS)\u060c \u0648\u0627\u0644\u062a\u064a \u062a\u0634\u0643\u0644 \u0645\u0648\u0627\u062f \u0635\u0644\u0628\u0629 <strong>\u062b\u0627\u0646\u064a \u0623\u0643\u0633\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 (<\/strong>$SiO_2$<strong>)<\/strong> \u0627\u0644\u063a\u0628\u0627\u0631 \u062f\u0627\u062e\u0644 \u0648\u062d\u062f\u0629 \u0627\u0644\u0623\u0643\u0633\u062f\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u064a\u0629 \u0627\u0644\u0645\u062a\u062c\u062f\u062f\u0629. \u0628\u062f\u0648\u0646 \u062a\u0631\u0634\u064a\u062d \u0645\u0646\u0627\u0633\u0628 \u0648\u062a\u062d\u0643\u0645 \u0641\u064a \u0627\u0644\u062a\u062f\u0641\u0642\u060c \u064a\u0645\u0643\u0646 \u0623\u0646 \u064a\u0646\u062a\u0642\u0644 \u0647\u0630\u0627 \u0627\u0644\u063a\u0628\u0627\u0631 \u0645\u0631\u0629 \u0623\u062e\u0631\u0649 \u0625\u0644\u0649 \u0627\u0644\u0645\u0646\u0634\u0623\u0629 \u0623\u0648 \u064a\u062e\u0631\u062c \u0645\u0646 \u0627\u0644\u0645\u062f\u062e\u0646\u0629\u060c \u0645\u0645\u0627 \u064a\u0624\u062b\u0631 \u0639\u0644\u0649 \u062a\u0635\u0646\u064a\u0641\u0627\u062a \u0641\u0626\u0629 \u0627\u0644\u063a\u0631\u0641 \u0627\u0644\u0646\u0638\u064a\u0641\u0629.<\/p>\n<h2><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-1749\" src=\"https:\/\/regenerative-thermal-oxidation.com\/wp-content\/uploads\/2025\/12\/screenshot_2025-12-10_10-19-41.webp\" alt=\"\u0647\u064a\u0626\u0629 \u0627\u0644\u0646\u0642\u0644 \u0627\u0644\u0625\u0642\u0644\u064a\u0645\u064a\u0629\" width=\"717\" height=\"473\" srcset=\"https:\/\/regenerative-thermal-oxidation.com\/wp-content\/uploads\/2025\/12\/screenshot_2025-12-10_10-19-41.webp 717w, https:\/\/regenerative-thermal-oxidation.com\/wp-content\/uploads\/2025\/12\/screenshot_2025-12-10_10-19-41-480x317.webp 480w\" sizes=\"(min-width: 0px) and (max-width: 480px) 480px, (min-width: 481px) 717px, 100vw\" \/><\/h2>\n<h2>\u00a0\u0627\u0644\u0645\u0648\u0627\u0635\u0641\u0627\u062a \u0627\u0644\u0641\u0646\u064a\u0629: \u0645\u0639\u064a\u0627\u0631 \u0642\u064a\u0627\u0633 \u0645\u0648\u062c\u0647 \u0646\u062d\u0648 \u0627\u0644\u0625\u0646\u062a\u0627\u062c\u064a\u0629<\/h2>\n<p>\u0628\u0627\u0644\u0646\u0633\u0628\u0629 \u0644\u0639\u0645\u0644\u064a\u0627\u062a \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0641\u064a \u0627\u0644\u0637\u0628\u0642\u0629 \u0627\u0644\u0623\u0645\u0627\u0645\u064a\u0629\u060c \u062a\u062d\u0648\u0644\u062a \u0645\u0642\u0627\u064a\u064a\u0633 \u0623\u062f\u0627\u0621 RTO \u0645\u0646 \"\u0643\u0641\u0627\u0621\u0629 \u0627\u0644\u062a\u062f\u0645\u064a\u0631\" \u0625\u0644\u0649 \"\u0645\u0639\u0644\u0645\u0627\u062a \u0627\u0644\u0627\u0633\u062a\u0642\u0631\u0627\u0631\":<\/p>\n<h3>\u062c\u062f\u0648\u0644 \u0627\u0644\u0645\u0639\u0627\u064a\u064a\u0631 \u0627\u0644\u0641\u0646\u064a\u0629 \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629<\/h3>\n<table>\n<tbody>\n<tr>\n<th>\u0627\u0644\u0645\u0642\u0627\u064a\u064a\u0633 \u0627\u0644\u0641\u0646\u064a\u0629<\/th>\n<th>\u0646\u0637\u0627\u0642 \u0627\u0644\u0645\u0639\u0644\u0645\u0627\u062a<\/th>\n<th>\u062a\u0623\u062b\u064a\u0631 \u0630\u0644\u0643 \u0639\u0644\u0649 \u0625\u0646\u062a\u0627\u062c\u064a\u0629 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a<\/th>\n<th>\u0645\u0631\u062c\u0639 \u0635\u0646\u0627\u0639\u064a<\/th>\n<\/tr>\n<tr>\n<td><strong>\u062a\u0642\u0644\u0628\u0627\u062a \u0627\u0644\u0636\u063a\u0637<\/strong><\/td>\n<td><strong>\u2264 \u00b110 \u0628\u0627\u0633\u0643\u0627\u0644<\/strong><\/td>\n<td>\u0627\u0644\u0645\u0642\u064a\u0627\u0633 \u0627\u0644\u0623\u0633\u0627\u0633\u064a\u061b \u064a\u0645\u0646\u0639 \u0639\u062f\u0645 \u0627\u0633\u062a\u0642\u0631\u0627\u0631 \u0628\u064a\u0626\u0629 \u0627\u0644\u0645\u0627\u0633\u062d \u0627\u0644\u0636\u0648\u0626\u064a.<\/td>\n<td>F15 \u0634\u0628\u0647 \u0642\u064a\u0627\u0633\u064a<\/td>\n<\/tr>\n<tr>\n<td><strong>\u0645\u0633\u062a\u0648\u0649 \u0627\u0644\u0627\u0647\u062a\u0632\u0627\u0632 (VC)<\/strong><\/td>\n<td>VC-A \/ VC-B<\/td>\n<td>\u064a\u0645\u0646\u0639 \u0627\u0644\u0631\u0646\u064a\u0646 \u0627\u0644\u0645\u064a\u0643\u0627\u0646\u064a\u0643\u064a \u0641\u064a \u0627\u0644\u0645\u0643\u0648\u0646\u0627\u062a \u0627\u0644\u0628\u0635\u0631\u064a\u0629.<\/td>\n<td>\u0645\u0639\u0627\u064a\u064a\u0631 \u063a\u0631\u0641 \u0627\u0644\u062a\u0646\u0638\u064a\u0641 IEST<\/td>\n<\/tr>\n<tr>\n<td><strong>\u062a\u062f\u0645\u064a\u0631 \u0627\u0644\u0645\u0631\u0643\u0628\u0627\u062a \u0627\u0644\u0639\u0636\u0648\u064a\u0629 \u0627\u0644\u0645\u062a\u0637\u0627\u064a\u0631\u0629 (DRE)<\/strong><\/td>\n<td><strong>\u2265 99.5%<\/strong><\/td>\n<td>\u064a\u0636\u0645\u0646 \u062a\u062c\u0627\u0648\u0632 \u0627\u0646\u0628\u0639\u0627\u062b\u0627\u062a PGMEA\/\u0627\u0644\u0645\u0630\u064a\u0628\u0627\u062a \u0644\u0644\u0648\u0627\u0626\u062d \u0627\u0644\u0639\u0627\u0644\u0645\u064a\u0629.<\/td>\n<td>\u0627\u0644\u0642\u0648\u0627\u0646\u064a\u0646 \u0627\u0644\u0628\u064a\u0626\u064a\u0629<\/td>\n<\/tr>\n<tr>\n<td><strong>\u0627\u0644\u0643\u0641\u0627\u0621\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u064a\u0629 (TER)<\/strong><\/td>\n<td>95% &#8211; 97%<\/td>\n<td>\u064a\u0642\u0644\u0644 \u0645\u0646 \u0627\u0644\u0646\u0641\u0642\u0627\u062a \u0627\u0644\u062a\u0634\u063a\u064a\u0644\u064a\u0629 \u0644\u0645\u0635\u0627\u0646\u0639 \u062c\u064a\u062c\u0627 \u0641\u0627\u0628\u061b \u0648\u064a\u062a\u0645\u0627\u0634\u0649 \u0645\u0639 \u0623\u0647\u062f\u0627\u0641 \u0627\u0644\u062d\u0648\u0643\u0645\u0629 \u0627\u0644\u0628\u064a\u0626\u064a\u0629 \u0648\u0627\u0644\u0627\u062c\u062a\u0645\u0627\u0639\u064a\u0629 \u0648\u0627\u0644\u0645\u0624\u0633\u0633\u064a\u0629.<\/td>\n<td>\u0645\u0639\u0627\u064a\u064a\u0631 \u0627\u0644\u0645\u0635\u0627\u0646\u0639 \u0627\u0644\u062e\u0636\u0631\u0627\u0621<\/td>\n<\/tr>\n<tr>\n<td><strong>\u062a\u0631\u0643\u064a\u0632 \u0627\u0644\u062c\u0633\u064a\u0645\u0627\u062a<\/strong><\/td>\n<td>&lt; 1 \u0645\u0644\u063a\u0645\/\u0645\u00b3<\/td>\n<td>\u064a\u0645\u0646\u0639 \u0627\u0644\u062a\u0644\u0648\u062b \u0627\u0644\u062b\u0627\u0646\u0648\u064a \u0628\u0627\u0644\u063a\u0628\u0627\u0631 \u0641\u064a \u0627\u0644\u063a\u0631\u0641 \u0627\u0644\u0646\u0638\u064a\u0641\u0629.<\/td>\n<td>\u0627\u0644\u0641\u0626\u0629 ISO 1-5<\/td>\n<\/tr>\n<tr>\n<td><strong>\u0648\u0642\u062a \u062a\u0628\u062f\u064a\u0644 \u0627\u0644\u0635\u0645\u0627\u0645<\/strong><\/td>\n<td>\u062f\u0648\u0631\u0627\u0646 \u0645\u0633\u062a\u0645\u0631<\/td>\n<td>\u064a\u0632\u064a\u0644 \u062a\u0623\u062b\u064a\u0631 \"\u0627\u0644\u0645\u0637\u0631\u0642\u0629 \u0627\u0644\u0645\u0627\u0626\u064a\u0629\" \u0641\u064a \u062a\u064a\u0627\u0631 \u0627\u0644\u0647\u0648\u0627\u0621.<\/td>\n<td>\u062d\u0633\u0627\u0628\u0627\u062a \u062f\u064a\u0646\u0627\u0645\u064a\u0643\u0627 \u0627\u0644\u0645\u0648\u0627\u0626\u0639<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>\u062a\u062d\u0644\u064a\u0644 \u0641\u0646\u064a \u0645\u0639\u0645\u0642:<\/h3>\n<ul>\n<li><strong>\u0647\u0646\u062f\u0633\u0629 \u0627\u0644\u0635\u0645\u0627\u0645\u0627\u062a \u0627\u0644\u062f\u0648\u0627\u0631\u0629<\/strong>\u062a\u0633\u062a\u062e\u062f\u0645 \u0648\u062d\u062f\u0629 RTO \u0627\u0644\u062f\u0648\u0627\u0631\u0629 \u0635\u0645\u0627\u0645 \u062a\u0648\u0632\u064a\u0639 \u0648\u0627\u062d\u062f \u0645\u0635\u0646\u0651\u0639 \u0628\u062f\u0642\u0629 \u0639\u0627\u0644\u064a\u0629. \u0648\u0647\u0630\u0627 \u064a\u0644\u063a\u064a \u0627\u0644\u0641\u0631\u0627\u063a \u0627\u0644\u0646\u0627\u062a\u062c \u0639\u0646 \"\u0648\u0642\u062a \u0627\u0644\u062a\u0648\u0642\u0641\" \u0623\u062b\u0646\u0627\u0621 \u062a\u0628\u062f\u064a\u0644 \u0627\u0644\u0623\u0628\u0631\u0627\u062c \u0641\u064a \u0627\u0644\u0648\u062d\u062f\u0627\u062a \u0630\u0627\u062a \u0627\u0644\u0635\u0645\u0627\u0645\u0627\u062a\u060c \u0645\u0645\u0627 \u064a\u062d\u0645\u064a \u0646\u0642\u0627\u0637 \u0636\u0628\u0637 \u0627\u0644\u0636\u063a\u0637 \u0627\u0644\u062d\u0633\u0627\u0633\u0629 \u0644\u0644\u0645\u0627\u0633\u062d \u0627\u0644\u0636\u0648\u0626\u064a.<\/li>\n<li><strong>\u062a\u0635\u0645\u064a\u0645 \u0645\u0646\u062e\u0641\u0636 \u0627\u0644\u0627\u0647\u062a\u0632\u0627\u0632<\/strong>: \u0646\u0638\u0631\u064b\u0627 \u0644\u0639\u062f\u0645 \u0648\u062c\u0648\u062f \u0635\u0645\u0627\u0645\u0627\u062a \u062b\u0642\u064a\u0644\u0629 \u062a\u0635\u0637\u062f\u0645 \u0628\u0627\u0644\u0645\u0642\u0627\u0639\u062f\u060c \u064a\u062a\u0645 \u0627\u0644\u0642\u0636\u0627\u0621 \u0639\u0644\u0649 \u0627\u0644\u0627\u0647\u062a\u0632\u0627\u0632 \u0627\u0644\u0645\u064a\u0643\u0627\u0646\u064a\u0643\u064a \u0628\u0634\u0643\u0644 \u0634\u0628\u0647 \u0643\u0627\u0645\u0644 - \u0648\u0647\u0648 \u0639\u0627\u0645\u0644 \u062d\u0627\u0633\u0645 \u0628\u0627\u0644\u0646\u0633\u0628\u0629 \u0644\u0644\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0645\u0648\u062c\u0648\u062f\u0629 \u0628\u0627\u0644\u0642\u0631\u0628 \u0645\u0646 \"\u063a\u0631\u0641\u0629 \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629 \u0627\u0644\u0646\u0638\u064a\u0641\u0629\" \u0627\u0644\u062d\u0633\u0627\u0633\u0629 \u0644\u0644\u0627\u0647\u062a\u0632\u0627\u0632.<\/li>\n<\/ul>\n<h2>\u0633\u064a\u0646\u0627\u0631\u064a\u0648\u0647\u0627\u062a \u0627\u0644\u062a\u0637\u0628\u064a\u0642: \u0646\u0642\u0627\u0637 \u0627\u0644\u0642\u0648\u0629 \u0648\u0627\u0644\u0642\u064a\u0648\u062f<\/h2>\n<h3>\u062a\u062d\u0644\u064a\u0644 \u0627\u0644\u0633\u064a\u0646\u0627\u0631\u064a\u0648: \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629 \u0648\u0627\u0644\u0645\u0633\u0627\u0631\u0627\u062a (\u062d\u062c\u0645 \u0643\u0628\u064a\u0631\u060c \u0627\u0633\u062a\u0642\u0631\u0627\u0631 \u0639\u0627\u0644\u064d)<\/h3>\n<ul>\n<li><strong>\u0635\u0641\u0627\u062a<\/strong>: \u062a\u0631\u0643\u064a\u0628\u0629 \u0645\u0631\u0643\u0628\u0627\u062a \u0639\u0636\u0648\u064a\u0629 \u0645\u062a\u0637\u0627\u064a\u0631\u0629 \u0645\u062a\u0633\u0642\u0629 \u0646\u0633\u0628\u064a\u064b\u0627 (\u0628\u0634\u0643\u0644 \u0623\u0633\u0627\u0633\u064a PGMEA\/\u0627\u0644\u0645\u0630\u064a\u0628\u0627\u062a) \u0648\u0644\u0643\u0646\u0647\u0627 \u062a\u062a\u0637\u0644\u0628 \u062a\u0634\u063a\u064a\u0644\u064b\u0627 \u0645\u062a\u0648\u0627\u0635\u0644\u064b\u0627 \u0644\u0645\u062f\u0629 24 \u0633\u0627\u0639\u0629 \u0639\u0644\u0649 \u0645\u062f\u0627\u0631 365 \u064a\u0648\u0645\u064b\u0627.<\/li>\n<li><strong>\u0627\u0644\u0645\u0632\u0627\u064a\u0627<\/strong>:\n<ul>\n<li><strong>\u062d\u0645\u0627\u064a\u0629 \u0627\u0644\u0639\u0627\u0626\u062f<\/strong>\u062a\u0636\u0645\u0646 \u062e\u0635\u0627\u0626\u0635 \u0627\u0644\u0646\u0628\u0636 \u0627\u0644\u0635\u0641\u0631\u064a \u0627\u0633\u062a\u0642\u0631\u0627\u0631 \u0646\u0627\u0641\u0630\u0629 \u0639\u0645\u0644\u064a\u0629 \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629.<\/li>\n<li><strong>\u0645\u0648\u062b\u0648\u0642\u064a\u0629 \u0639\u0627\u0644\u064a\u0629<\/strong>\u064a\u0642\u0644\u0644 \u062a\u0635\u0645\u064a\u0645 \u0627\u0644\u0635\u0645\u0627\u0645 \u0627\u0644\u0648\u0627\u062d\u062f \u0645\u0646 \u0645\u0626\u0627\u062a \u0646\u0642\u0627\u0637 \u0627\u0644\u0641\u0634\u0644 \u0627\u0644\u0645\u062d\u062a\u0645\u0644\u0629 \u0627\u0644\u0645\u0631\u062a\u0628\u0637\u0629 \u0628\u0645\u0634\u063a\u0644\u0627\u062a \u0627\u0644\u0635\u0645\u0627\u0645\u0627\u062a \u0648\u0623\u062c\u0647\u0632\u0629 \u0627\u0644\u0627\u0633\u062a\u0634\u0639\u0627\u0631.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u0627\u0644\u0642\u064a\u0648\u062f<\/strong>:\n<ul>\n<li><strong>\u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0627<\/strong>: \u0641\u064a \u062d\u0627\u0644\u0629 \u0645\u0639\u0627\u0644\u062c\u0629 HMDS\u060c \u064a\u0644\u0632\u0645 \u0625\u062c\u0631\u0627\u0621 \u062f\u0648\u0631\u0627\u062a \"\u0627\u0644\u062e\u0628\u0632\" \u0623\u0648 \u0627\u0644\u0635\u064a\u0627\u0646\u0629 \u0627\u0644\u0645\u0646\u062a\u0638\u0645\u0629 \u0644\u0645\u0646\u0639 \u062a\u0631\u0627\u0643\u0645 $SiO_2$ \u0639\u0644\u0649 \u0627\u0644\u0648\u0633\u0627\u0626\u0637 \u0627\u0644\u062e\u0632\u0641\u064a\u0629.<\/li>\n<li><strong>\u0627\u0644\u0627\u0633\u062a\u062b\u0645\u0627\u0631 \u0627\u0644\u0631\u0623\u0633\u0645\u0627\u0644\u064a<\/strong>\u062a\u062a\u0637\u0644\u0628 \u0627\u0644\u0635\u0645\u0627\u0645\u0627\u062a \u0627\u0644\u062f\u0648\u0627\u0631\u0629 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0623\u062f\u0627\u0621 \u0639\u0645\u0644\u064a\u0627\u062a \u062a\u0635\u0646\u064a\u0639 \u062f\u0642\u064a\u0642\u0629\u060c \u0645\u0645\u0627 \u064a\u0624\u062f\u064a \u0625\u0644\u0649 \u062a\u0643\u0644\u0641\u0629 \u0623\u0648\u0644\u064a\u0629 \u0623\u0639\u0644\u0649 \u0645\u0642\u0627\u0631\u0646\u0629 \u0628\u0627\u0644\u0635\u0645\u0627\u0645\u0627\u062a \u0627\u0644\u062f\u0648\u0627\u0631\u0629 \u0627\u0644\u062a\u062c\u0627\u0631\u064a\u0629.<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<h2>\u0627\u0644\u0645\u0643\u0648\u0646\u0627\u062a \u0627\u0644\u0623\u0633\u0627\u0633\u064a\u0629 \u0648\u062a\u0648\u0635\u064a\u0627\u062a \u0627\u0644\u0646\u0638\u0627\u0645<\/h2>\n<ol>\n<li><strong>\u0635\u0645\u0627\u0645 \u062f\u0648\u0627\u0631 \u0639\u0627\u0644\u064a \u0627\u0644\u062f\u0642\u0629<\/strong>\u0645\u0635\u0646\u0648\u0639 \u0645\u0646 \u0633\u0628\u0627\u0626\u0643 \u0645\u062a\u062e\u0635\u0635\u0629 \u0645\u0639 \u0646\u0638\u0627\u0645 \u0625\u062d\u0643\u0627\u0645 \u0645\u062a\u0637\u0648\u0631 \u0644\u0636\u0645\u0627\u0646 \u0639\u062f\u0645 \u0627\u0644\u062a\u0633\u0631\u0628 \u0648\u0637\u0648\u0644 \u0627\u0644\u0639\u0645\u0631.<\/li>\n<li><strong>\u0627\u0644\u062a\u0631\u0634\u064a\u062d \u0627\u0644\u0645\u0633\u0628\u0642 \u0645\u062a\u0639\u062f\u062f \u0627\u0644\u0645\u0631\u0627\u062d\u0644 (HEPA)<\/strong>\u0628\u0627\u0644\u0646\u0633\u0628\u0629 \u0644\u0639\u0645\u0644\u064a\u0627\u062a FEOL\u060c \u064a\u062c\u0628 \u062a\u0631\u0634\u064a\u062d \u0627\u0644\u0639\u0627\u062f\u0645 \u0628\u062f\u0642\u0629 \u0642\u0628\u0644 \u062f\u062e\u0648\u0644\u0647 \u0625\u0644\u0649 RTO \u0644\u062d\u0645\u0627\u064a\u0629 \u0627\u0644\u0648\u0633\u0627\u0626\u0637 \u0627\u0644\u062e\u0632\u0641\u064a\u0629 \u0645\u0646 \u0627\u0644\u062a\u0632\u062c\u064a\u062c \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646\u064a \u063a\u064a\u0631 \u0627\u0644\u0645\u062a\u0648\u0642\u0639.<\/li>\n<li><strong>\u0646\u0638\u0627\u0645 \u0627\u0644\u062a\u0643\u0631\u0627\u0631 \u0627\u0644\u0645\u0632\u062f\u0648\u062c \u0644\u0644\u0639\u0643\u0633 (VFD)<\/strong>: \u064a\u0633\u0645\u062d \u062a\u0643\u0648\u064a\u0646 VFD \u0627\u0644\u0631\u0626\u064a\u0633\u064a\/\u0627\u0644\u062a\u0627\u0628\u0639 \u0628\u0627\u0644\u062a\u0628\u062f\u064a\u0644 \u0639\u0644\u0649 \u0645\u0633\u062a\u0648\u0649 \u0623\u062c\u0632\u0627\u0621 \u0645\u0646 \u0627\u0644\u062b\u0627\u0646\u064a\u0629 \u0641\u064a \u062d\u0627\u0644\u0629 \u0641\u0634\u0644 \u0627\u0644\u0648\u062d\u062f\u0629\u060c \u0645\u0645\u0627 \u064a\u0636\u0645\u0646 \u0639\u062f\u0645 \u062a\u0648\u0642\u0641 \u0646\u0638\u0627\u0645 \u0627\u0644\u0639\u0627\u062f\u0645.<\/li>\n<li><strong>\u0627\u0633\u062a\u0639\u0627\u062f\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u062b\u0627\u0646\u0648\u064a\u0629<\/strong>: \u0627\u0633\u062a\u0639\u0627\u062f\u0629 \u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u0627\u062d\u062a\u0631\u0627\u0642 \u0644\u0623\u0646\u0638\u0645\u0629 \u0625\u0632\u0627\u0644\u0629 \u0627\u0644\u0631\u0637\u0648\u0628\u0629 \u0623\u0648 \u0625\u0639\u0627\u062f\u0629 \u0627\u0644\u062a\u0633\u062e\u064a\u0646 \u0641\u064a \u0627\u0644\u063a\u0631\u0641\u0629 \u0627\u0644\u0646\u0638\u064a\u0641\u0629 \u0644\u0625\u063a\u0644\u0627\u0642 \u062d\u0644\u0642\u0629 \u0627\u0644\u0637\u0627\u0642\u0629.<\/li>\n<\/ol>\n<h2>\u00a0\u0645\u0642\u0627\u0631\u0646\u0629 \u0627\u0644\u0639\u0644\u0627\u0645\u0627\u062a \u0627\u0644\u062a\u062c\u0627\u0631\u064a\u0629 \u0627\u0644\u0631\u0627\u0626\u062f\u0629 \u0641\u064a \u0645\u062c\u0627\u0644 \u062e\u062f\u0645\u0627\u062a \u0627\u0644\u0646\u0633\u062e \u0627\u0644\u0627\u062d\u062a\u064a\u0627\u0637\u064a (\u0645\u0646 \u0645\u0646\u0638\u0648\u0631 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a)<\/h2>\n<table>\n<tbody>\n<tr>\n<th>\u0645\u0627\u0631\u0643\u0629<\/th>\n<th>\u0642\u0648\u0629 \u0627\u0644\u062c\u0630\u0639<\/th>\n<th>\u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0627\u0644\u0636\u063a\u0637<\/th>\n<th>\u0645\u0646\u0637\u0642 \u0627\u0644\u0642\u0631\u0627\u0631<\/th>\n<\/tr>\n<tr>\n<td><strong>\u062f\u0648\u0631 (\u0625\u064a\u0643\u0648\u0628\u0648\u0631)<\/strong><\/td>\n<td>\u0631\u0627\u0626\u062f \u0641\u064a \u0645\u062c\u0627\u0644 \u062a\u0642\u0646\u064a\u0629 RTO \u0627\u0644\u062f\u0648\u0627\u0631\u0629\u061b \u0642\u0627\u0639\u062f\u0629 \u062a\u062b\u0628\u064a\u062a \u0636\u062e\u0645\u0629 \u0641\u064a \u0645\u0635\u0627\u0646\u0639 \u0627\u0644\u0631\u0642\u0627\u0626\u0642 \u0645\u0646 \u0627\u0644\u0645\u0633\u062a\u0648\u0649 \u0627\u0644\u0623\u0648\u0644 (TSMC\u060c Intel).<\/td>\n<td>\u0623\u0642\u0635\u0649 (\u00b15 \u0628\u0627\u0633\u0643\u0627\u0644)<\/td>\n<td>\u0627\u0644\u0623\u0641\u0636\u0644 \u0644\u0644\u0645\u0635\u0627\u0646\u0639 \u0630\u0627\u062a \u0627\u0644\u0645\u064a\u0632\u0627\u0646\u064a\u0629 \u0627\u0644\u0639\u0627\u0644\u064a\u0629\u060c \u0648\u0627\u0644\u062a\u064a \u062a\u0633\u062a\u062e\u062f\u0645 \u0634\u0627\u0634\u0627\u062a \u0645\u0642\u0627\u0633 12 \u0628\u0648\u0635\u0629 \u0648\u062a\u0633\u0639\u0649 \u0625\u0644\u0649 \u062a\u062d\u0642\u064a\u0642 \"\u0627\u0644\u0645\u0639\u064a\u0627\u0631 \u0627\u0644\u0630\u0647\u0628\u064a\" \u0627\u0644\u0639\u0627\u0644\u0645\u064a.<\/td>\n<\/tr>\n<tr>\n<td><strong>\u0625\u064a\u0641\u0631-\u0628\u0627\u0648\u0631 (\u064a\u0648\u0631\u0633\u0646\u062a)<\/strong><\/td>\n<td><strong>\u062a\u0642\u0646\u064a\u0629 Zero-Pulse\u2122 \u0627\u0644\u062d\u0627\u0635\u0644\u0629 \u0639\u0644\u0649 \u0628\u0631\u0627\u0621\u0629 \u0627\u062e\u062a\u0631\u0627\u0639<\/strong>\u0627\u0633\u062a\u062c\u0627\u0628\u0629 \u0633\u0631\u064a\u0639\u0629 \u0644\u0627\u0631\u062a\u0641\u0627\u0639\u0627\u062a \u0623\u0633\u0639\u0627\u0631 PGMEA.<\/td>\n<td>\u0645\u0645\u062a\u0627\u0632 (\u00b110 \u0628\u0627\u0633\u0643\u0627\u0644)<\/td>\n<td>\u0627\u0644\u0623\u0641\u0636\u0644 \u0644\u0640 <strong>\u0627\u0644\u062a\u0643\u0644\u0641\u0629 \u0645\u0642\u0627\u0628\u0644 \u0627\u0644\u0623\u062f\u0627\u0621<\/strong> \u0648\u062f\u0639\u0645 \u0647\u0646\u062f\u0633\u064a \u0645\u062d\u0644\u064a.<\/td>\n<\/tr>\n<tr>\n<td><strong>\u062a\u0627\u064a\u0643\u064a\u0634\u0627<\/strong><\/td>\n<td>\u062e\u0628\u0631\u0627\u0621 \u0641\u064a \u0645\u062d\u0627\u0643\u0627\u0629 \u062a\u062f\u0641\u0642 \u0627\u0644\u0647\u0648\u0627\u0621\u061b \u0645\u0647\u064a\u0645\u0646\u0648\u0646 \u0641\u064a \u0633\u0644\u0627\u0633\u0644 \u0627\u0644\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u064a\u0627\u0628\u0627\u0646\u064a\u0629.<\/td>\n<td>\u0645\u0645\u062a\u0627\u0632<\/td>\n<td>\u0645\u062b\u0627\u0644\u064a\u0629 \u0644\u0644\u062a\u0643\u0627\u0645\u0644 \u0627\u0644\u0639\u0645\u064a\u0642 \u0645\u0639 \u062e\u0637\u0648\u0637 \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629 \u0627\u0644\u0645\u0635\u0646\u0648\u0639\u0629 \u0641\u064a \u0627\u0644\u064a\u0627\u0628\u0627\u0646.<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h2>\u00a0\u062f\u0645\u062c \u0627\u0644\u0627\u0645\u062a\u062b\u0627\u0644 \u0627\u0644\u0639\u0627\u0644\u0645\u064a \u0645\u0639 \u0625\u062f\u0627\u0631\u0629 \u0627\u0644\u0639\u0627\u0626\u062f\u0627\u062a<\/h2>\n<p>\u064a\u062a\u0639\u064a\u0646 \u0639\u0644\u0649 \u0634\u0631\u0643\u0627\u062a \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u062a\u064a \u062a\u062a\u0648\u0633\u0639 \u0639\u0627\u0644\u0645\u064a\u064b\u0627 \u062a\u0644\u0628\u064a\u0629 \u0643\u0644 \u0645\u0646 \u0627\u0644\u0645\u0639\u0627\u064a\u064a\u0631 \u0627\u0644\u0628\u064a\u0626\u064a\u0629 \u0627\u0644\u0623\u0643\u062b\u0631 \u0635\u0631\u0627\u0645\u0629 \u0648\u0623\u0647\u062f\u0627\u0641 \u0627\u0644\u0625\u0646\u062a\u0627\u062c\u064a\u0629 \u0627\u0644\u0623\u0643\u062b\u0631 \u062a\u0637\u0644\u0628\u064b\u0627.<\/p>\n<ol>\n<li><strong>\u0627\u0644\u0625\u0637\u0627\u0631 \u0627\u0644\u062a\u0646\u0638\u064a\u0645\u064a<\/strong>:\n<ul>\n<li><strong>\u062a\u0627\u064a\u0648\u0627\u0646\/\u0627\u0644\u0635\u064a\u0646 \u0627\u0644\u0642\u0627\u0631\u064a\u0629<\/strong>: \u0645\u0639\u0627\u064a\u064a\u0631 \u0635\u0627\u0631\u0645\u0629 \u062e\u0627\u0635\u0629 \u0628\u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a\u060c \u0648\u063a\u0627\u0644\u0628\u064b\u0627 \u0645\u0627 \u062a\u062a\u0637\u0644\u0628 &gt;95% DRE (\u062a\u0642\u0648\u0645 \u0645\u0635\u0627\u0646\u0639 \u0627\u0644\u0645\u0633\u062a\u0648\u0649 1 \u0628\u062a\u0646\u0638\u064a\u0645 \u0646\u0641\u0633\u0647\u0627 \u0630\u0627\u062a\u064a\u064b\u0627 \u0639\u0646\u062f &gt;99.5%).<\/li>\n<li><strong>\u0627\u0644\u0648\u0644\u0627\u064a\u0627\u062a \u0627\u0644\u0645\u062a\u062d\u062f\u0629 \u0627\u0644\u0623\u0645\u0631\u064a\u0643\u064a\u0629\/\u0627\u0644\u0627\u062a\u062d\u0627\u062f \u0627\u0644\u0623\u0648\u0631\u0648\u0628\u064a<\/strong>\u0645\u0639\u0627\u064a\u064a\u0631 NESHAP \u0644\u0635\u0646\u0627\u0639\u0629 \u0627\u0644\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a\u0627\u062a.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u0627\u0644\u062d\u0648\u0643\u0645\u0629 \u0627\u0644\u0628\u064a\u0626\u064a\u0629 \u0648\u0627\u0644\u0627\u062c\u062a\u0645\u0627\u0639\u064a\u0629 \u0648\u0627\u0644\u0645\u0624\u0633\u0633\u064a\u0629 \u0648\u0627\u0644\u0645\u0631\u0648\u0646\u0629<\/strong>\u064a\u0633\u0627\u0647\u0645 \u0627\u0644\u0627\u0633\u062a\u062b\u0645\u0627\u0631 \u0641\u064a \u0648\u062d\u062f\u0627\u062a RTO \u0627\u0644\u062f\u0648\u0627\u0631\u0629 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0643\u0641\u0627\u0621\u0629 \u0641\u064a \u062a\u062d\u0633\u064a\u0646 \u062a\u0635\u0646\u064a\u0641 \u0627\u0644\u062d\u0648\u0643\u0645\u0629 \u0627\u0644\u0628\u064a\u0626\u064a\u0629 \u0648\u0627\u0644\u0627\u062c\u062a\u0645\u0627\u0639\u064a\u0629 \u0648\u0627\u0644\u0645\u0624\u0633\u0633\u064a\u0629 \u0644\u0644\u0634\u0631\u0643\u0629\u060c \u0628\u064a\u0646\u0645\u0627 \u064a\u0639\u0645\u0644 \u0641\u064a \u0627\u0644\u0648\u0642\u062a \u0646\u0641\u0633\u0647 \u0643\u0625\u062c\u0631\u0627\u0621 \"\u0645\u0631\u0648\u0646\u0629 \u0627\u0644\u0645\u0646\u0634\u0623\u0629\" \u0644\u0645\u0646\u0639 \u062a\u0648\u0642\u0641\u0627\u062a \u0627\u0644\u062e\u0637\u0648\u0637 \u0627\u0644\u0645\u0643\u0644\u0641\u0629.<\/li>\n<\/ol>\n<h2>\u00a0\u0627\u0644\u062e\u0628\u0631\u0629 \u0627\u0644\u0645\u064a\u062f\u0627\u0646\u064a\u0629 \u0648\u062f\u0631\u0627\u0633\u0627\u062a \u0627\u0644\u062d\u0627\u0644\u0629<\/h2>\n<h3>\u0646\u0635\u064a\u062d\u0629 \u0627\u0644\u062e\u0628\u0631\u0627\u0621: \u0644\u0627 \u062a\u062f\u0639 \u0645\u0646\u0638\u0645\u0629 \u0627\u0644\u0646\u0642\u0644 \u0627\u0644\u0625\u0642\u0644\u064a\u0645\u064a\u0629 \u062a\u0635\u0628\u062d \"\u0645\u0635\u062f\u0631\u064b\u0627 \u0644\u0644\u0632\u0644\u0627\u0632\u0644\"<\/h3>\n<p>\u0641\u064a \u0645\u0634\u0631\u0648\u0639 \u0631\u0642\u0627\u0642\u0629 \u0645\u0646\u0637\u0642\u064a\u0629 \u0645\u062a\u0642\u062f\u0645\u0629 \u062d\u062f\u064a\u062b\u060c \u062d\u0627\u0648\u0644 \u0627\u0644\u0639\u0645\u064a\u0644 \u0641\u064a \u0627\u0644\u0628\u062f\u0627\u064a\u0629 \u0627\u0633\u062a\u062e\u062f\u0627\u0645 \u0635\u0645\u0627\u0645 RTO \u0642\u064a\u0627\u0633\u064a.<\/p>\n<ul>\n<li><strong>\u0646\u0642\u0637\u0629 \u0627\u0644\u0623\u0644\u0645<\/strong>\u0641\u064a \u0643\u0644 \u0645\u0631\u0629 \u064a\u0642\u0648\u0645 \u0641\u064a\u0647\u0627 \u062c\u0647\u0627\u0632 RTO \u0628\u062a\u063a\u064a\u064a\u0631 \u0627\u0644\u0635\u0645\u0627\u0645\u0627\u062a\u060c \u062a\u062a\u0630\u0628\u0630\u0628 \u0645\u0642\u0627\u064a\u064a\u0633 \u0627\u0644\u0636\u063a\u0637 \u0627\u0644\u062f\u0642\u064a\u0642\u0629 \u0641\u064a \u062d\u062c\u0631\u0629 \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629 \u0628\u0634\u0643\u0644 \u0643\u0628\u064a\u0631\u060c \u0645\u0645\u0627 \u064a\u062a\u0633\u0628\u0628 \u0641\u064a \u062a\u0639\u0637\u0644 \u0627\u0644\u0645\u0627\u0633\u062d\u0627\u062a \u0627\u0644\u0636\u0648\u0626\u064a\u0629 \u0648\u062f\u062e\u0648\u0644\u0647\u0627 \u0641\u064a \u0648\u0636\u0639 \u0627\u0644\u0623\u0645\u0627\u0646.<\/li>\n<li><strong>\u0627\u0644\u062d\u0644<\/strong>\u0627\u0633\u062a\u0628\u062f\u0644\u0646\u0627 \u0627\u0644\u0648\u062d\u062f\u0629 \u0628\u0640 <strong>\u0625\u064a\u0641\u0631-\u0628\u0627\u0648\u0631 \u0631\u0648\u062a\u0627\u0631\u064a \u0622\u0631 \u062a\u064a \u0623\u0648<\/strong> \u0648\u062a\u0645 \u062a\u0637\u0628\u064a\u0642 \u0646\u0638\u0627\u0645 \u062a\u062e\u0645\u064a\u062f \u0627\u0644\u0627\u0647\u062a\u0632\u0627\u0632 \u0627\u0644\u0646\u0634\u0637 \u0639\u0644\u0649 \u0642\u0648\u0627\u0639\u062f \u0627\u0644\u0645\u0631\u0648\u062d\u0629.<\/li>\n<li><strong>\u0627\u0644\u0646\u062a\u064a\u062c\u0629<\/strong>\u062a\u0645 \u0627\u0644\u0642\u0636\u0627\u0621 \u062a\u0645\u0627\u0645\u0627\u064b \u0639\u0644\u0649 \u0646\u0628\u0636\u0627\u062a \u0627\u0644\u0636\u063a\u0637. \u0648\u0627\u0646\u062e\u0641\u0636\u062a \u0645\u0639\u062f\u0644\u0627\u062a \u0627\u0644\u062e\u0631\u062f\u0629 \u0628\u0633\u0628\u0628 \"\u0639\u064a\u0648\u0628 \u0639\u062f\u0645 \u0627\u0644\u062a\u0631\u0643\u064a\u0632\" \u0628\u0645\u0642\u062f\u0627\u0631 1.5%\u060c \u0645\u0645\u0627 \u0623\u062f\u0649 \u0625\u0644\u0649 \u062a\u062d\u0642\u064a\u0642 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\u0627\u0644\u0636\u0648\u0626\u064a\u060c \u0648\u062a\u062a\u0646\u0628\u0623 \u0628\u0637\u0644\u0628 \u0627\u0644\u0639\u0627\u062f\u0645 \u0648\u062a\u0636\u0628\u0637 \u0633\u0631\u0639\u0627\u062a \u0627\u0644\u0645\u0631\u0648\u062d\u0629 \u0641\u064a \u0627\u0644\u0648\u0642\u062a \u0627\u0644\u0641\u0639\u0644\u064a \u0644\u0644\u062d\u0641\u0627\u0638 \u0639\u0644\u0649 \u0636\u063a\u0637 \u062b\u0627\u0628\u062a.<\/li>\n<li><strong>\u0645\u0631\u0627\u0642\u0628\u0629 \u0627\u0644\u0627\u0646\u0628\u0639\u0627\u062b\u0627\u062a \u0637\u0648\u0627\u0644 \u062f\u0648\u0631\u0629 \u0627\u0644\u062d\u064a\u0627\u0629<\/strong>: \u0633\u062a\u0642\u0648\u0645 \u062a\u0642\u0646\u064a\u0629 \u0642\u064a\u0627\u0633 \u0627\u0644\u0637\u064a\u0641 \u0627\u0644\u0643\u062a\u0644\u064a \u0627\u0644\u0645\u062a\u0643\u0627\u0645\u0644\u0629 \u0639\u0628\u0631 \u0627\u0644\u0625\u0646\u062a\u0631\u0646\u062a \u0628\u0645\u0631\u0627\u0642\u0628\u0629 \u0623\u0643\u0633\u062f\u0629 PGMEA \u0641\u064a \u0627\u0644\u0648\u0642\u062a \u0627\u0644\u0641\u0639\u0644\u064a\u060c \u0645\u0645\u0627 \u064a\u062d\u0642\u0642 \u0634\u0641\u0627\u0641\u064a\u0629 \u062a\u0634\u063a\u064a\u0644\u064a\u0629 \u062d\u0642\u064a\u0642\u064a\u0629 \"\u0635\u0641\u0631\u064a\u0629\".<\/li>\n<\/ul>\n<p><strong>\u062e\u0627\u062a\u0645\u0629<\/strong>\u0641\u064a \u0635\u0646\u0627\u0639\u0629 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a\u060c \u0644\u0645 \u062a\u0639\u062f \u0627\u0644\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0628\u064a\u0626\u064a\u0629 \u0645\u062c\u0631\u062f \"\u0625\u0636\u0627\u0641\u0629 \u062b\u0627\u0646\u0648\u064a\u0629\"\u060c \u0628\u0644 \u0623\u0635\u0628\u062d\u062a \u062d\u0644\u0642\u0629 \u0648\u0635\u0644 \u0623\u0633\u0627\u0633\u064a\u0629 \u0641\u064a \u0645\u0646\u0638\u0648\u0645\u0629 \u0627\u0644\u0625\u0646\u062a\u0627\u062c. <a href=\"https:\/\/regenerative-thermal-oxidation.com\/ar\/\">\u0647\u064a\u0626\u0629 \u0627\u0644\u0646\u0642\u0644 \u0627\u0644\u0625\u0642\u0644\u064a\u0645\u064a\u0629<\/a>\u0625\u0646 \u062a\u0631\u0643\u064a\u0632\u0647\u0627 \u0639\u0644\u0649 \"\u0627\u0644\u0627\u0633\u062a\u0642\u0631\u0627\u0631 \u0623\u0648\u0644\u0627\u064b\" \u064a\u062c\u0639\u0644\u0647\u0627 \u0628\u0645\u062b\u0627\u0628\u0629 \u062c\u0648\u0627\u0632 \u0627\u0644\u0633\u0641\u0631 \u0627\u0644\u0623\u062e\u0636\u0631 \u0644\u0634\u0631\u0643\u0627\u062a \u0627\u0644\u0625\u0646\u062a\u0627\u062c \u0627\u0644\u062a\u064a \u062a\u062a\u0646\u0642\u0644 \u0641\u064a \u0639\u0635\u0631 \u0623\u0646\u063a\u0633\u062a\u0631\u0648\u0645.<\/p>","protected":false},"excerpt":{"rendered":"<p>As the semiconductor industry enters the &#8220;Angstrom Era&#8221; of 3nm and 2nm nodes, every facility support system is facing unprecedented challenges. The photolithography and development modules in the Front-End of Line (FEOL) represent the most capital-intensive and environmentally sensitive areas of the fab. In this high-stakes environment, managing Volatile Organic Compounds (VOCs) like PGMEA and [&hellip;]<\/p>","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_et_pb_use_builder":"","_et_pb_old_content":"","_et_gb_content_width":"","footnotes":""},"categories":[1],"tags":[],"class_list":["post-1989","post","type-post","status-publish","format-standard","hentry","category-uncategorized"],"_links":{"self":[{"href":"https:\/\/regenerative-thermal-oxidation.com\/ar\/wp-json\/wp\/v2\/posts\/1989","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/regenerative-thermal-oxidation.com\/ar\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/regenerative-thermal-oxidation.com\/ar\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/regenerative-thermal-oxidation.com\/ar\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/regenerative-thermal-oxidation.com\/ar\/wp-json\/wp\/v2\/comments?post=1989"}],"version-history":[{"count":1,"href":"https:\/\/regenerative-thermal-oxidation.com\/ar\/wp-json\/wp\/v2\/posts\/1989\/revisions"}],"predecessor-version":[{"id":1990,"href":"https:\/\/regenerative-thermal-oxidation.com\/ar\/wp-json\/wp\/v2\/posts\/1989\/revisions\/1990"}],"wp:attachment":[{"href":"https:\/\/regenerative-thermal-oxidation.com\/ar\/wp-json\/wp\/v2\/media?parent=1989"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/regenerative-thermal-oxidation.com\/ar\/wp-json\/wp\/v2\/categories?post=1989"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/regenerative-thermal-oxidation.com\/ar\/wp-json\/wp\/v2\/tags?post=1989"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}