{"id":1989,"date":"2025-12-19T08:58:19","date_gmt":"2025-12-19T08:58:19","guid":{"rendered":"https:\/\/regenerative-thermal-oxidation.com\/?p=1989"},"modified":"2025-12-19T08:58:19","modified_gmt":"2025-12-19T08:58:19","slug":"%e3%82%b3%e3%83%b3%e3%83%97%e3%83%a9%e3%82%a4%e3%82%a2%e3%83%b3%e3%82%b9%e3%81%a8%e3%82%a6%e3%82%a7%e3%83%bc%e3%83%8f%e6%ad%a9%e7%95%99%e3%81%be%e3%82%8a%e3%81%ae%e3%83%90%e3%83%a9%e3%83%b3%e3%82%b9","status":"publish","type":"post","link":"https:\/\/regenerative-thermal-oxidation.com\/ja\/%e5%bf%9c%e7%94%a8\/%e3%82%b3%e3%83%b3%e3%83%97%e3%83%a9%e3%82%a4%e3%82%a2%e3%83%b3%e3%82%b9%e3%81%a8%e3%82%a6%e3%82%a7%e3%83%bc%e3%83%8f%e6%ad%a9%e7%95%99%e3%81%be%e3%82%8a%e3%81%ae%e3%83%90%e3%83%a9%e3%83%b3%e3%82%b9\/","title":{"rendered":"\u534a\u5c0e\u4f53\u306b\u304a\u3051\u308b\u30d5\u30a9\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\u6392\u6c17\u30ac\u30b9\u524a\u6e1b\uff1a\u30b3\u30f3\u30d7\u30e9\u30a4\u30a2\u30f3\u30b9\u3068\u30a6\u30a7\u30fc\u30cf\u6b69\u7559\u307e\u308a\u306e\u30d0\u30e9\u30f3\u30b9"},"content":{"rendered":"<p>\u534a\u5c0e\u4f53\u696d\u754c\u304c3nm\u304a\u3088\u30732nm\u30ce\u30fc\u30c9\u306e\u300c\u30aa\u30f3\u30b0\u30b9\u30c8\u30ed\u30fc\u30e0\u6642\u4ee3\u300d\u306b\u7a81\u5165\u3059\u308b\u4e2d\u3001\u3042\u3089\u3086\u308b\u30d5\u30a1\u30b7\u30ea\u30c6\u30a3\u30b5\u30dd\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u306f\u304b\u3064\u3066\u306a\u3044\u8ab2\u984c\u306b\u76f4\u9762\u3057\u3066\u3044\u307e\u3059\u3002\u30d5\u30ed\u30f3\u30c8\u30a8\u30f3\u30c9\u30fb\u30aa\u30d6\u30fb\u30e9\u30a4\u30f3\uff08FEOL\uff09\u306b\u304a\u3051\u308b\u30d5\u30a9\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u304a\u3088\u3073\u958b\u767a\u30e2\u30b8\u30e5\u30fc\u30eb\u306f\u3001\u30d5\u30a1\u30d6\u306e\u4e2d\u3067\u6700\u3082\u8cc7\u672c\u96c6\u7d04\u7684\u3067\u3001\u74b0\u5883\u3078\u306e\u914d\u616e\u304c\u6c42\u3081\u3089\u308c\u308b\u9818\u57df\u3067\u3059\u3002<\/p>\n<p>\u3053\u306e\u30ea\u30b9\u30af\u306e\u9ad8\u3044\u74b0\u5883\u306b\u304a\u3044\u3066\u3001\u63ee\u767a\u6027\u6709\u6a5f\u5316\u5408\u7269\uff08VOC\uff09\u306e\u7ba1\u7406\u306f\u3001 <strong>PGMEA<\/strong> \u305d\u3057\u3066 <strong>HMDS<\/strong> \u3053\u308c\u306f\u5358\u306a\u308b\u74b0\u5883\u898f\u5236\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002\u518d\u751f\u71b1\u9178\u5316\u88c5\u7f6e\uff08RTO\uff09\u304c\u305f\u3068\u3048\u308f\u305a\u304b\u306a\u91cf\u3067\u3082 <strong>\u5727\u529b\u5909\u52d5<\/strong> \u307e\u305f\u306f <strong>\u632f\u52d5<\/strong>\u30b9\u30ad\u30e3\u30ca\u30fc\u306e\u7126\u70b9\u305a\u308c\u3092\u5f15\u304d\u8d77\u3053\u3057\u3001\u30a6\u30a7\u30fc\u30cf\u30ed\u30c3\u30c8\u5168\u4f53\u306e\u6b69\u7559\u307e\u308a\u304c\u8457\u3057\u304f\u4f4e\u4e0b\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002\u30b0\u30ed\u30fc\u30d0\u30eb\u306aESG\u57fa\u6e96\u3092\u6e80\u305f\u3057\u306a\u304c\u3089\u3001\u300c\u30bc\u30ed\u5e72\u6e09\u300d\u306e\u6392\u51fa\u3092\u5b9f\u73fe\u3059\u308b\u306b\u306f\u3069\u3046\u3059\u308c\u3070\u3088\u3044\u3067\u3057\u3087\u3046\u304b\uff1f<\/p>\n<h2><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-1754\" src=\"https:\/\/regenerative-thermal-oxidation.com\/wp-content\/uploads\/2025\/12\/screenshot_2025-12-10_11-12-25.webp\" alt=\"\u96fb\u5b50\u6a5f\u5668\u88fd\u9020\u696d\" width=\"497\" height=\"327\" srcset=\"https:\/\/regenerative-thermal-oxidation.com\/wp-content\/uploads\/2025\/12\/screenshot_2025-12-10_11-12-25.webp 497w, https:\/\/regenerative-thermal-oxidation.com\/wp-content\/uploads\/2025\/12\/screenshot_2025-12-10_11-12-25-480x316.webp 480w\" sizes=\"(min-width: 0px) and (max-width: 480px) 480px, (min-width: 481px) 497px, 100vw\" \/><\/h2>\n<h2>\u4e3b\u306a\u8ab2\u984c: \u5f93\u6765\u306e RTO \u304c\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\u3067\u82e6\u6226\u3059\u308b\u7406\u7531 (Q&amp;A)<\/h2>\n<h3>1. RTO \u8a98\u767a\u300c\u5727\u529b\u30d1\u30eb\u30b9\u300d\u3068\u306f\u4f55\u3067\u3059\u304b?<\/h3>\n<p>\u5f93\u6765\u306e2\u30bf\u30ef\u30fc\u578b\u307e\u305f\u306f3\u30bf\u30ef\u30fc\u578bRTO\u306f\u3001\u5207\u308a\u66ff\u3048\u306b\u7a7a\u6c17\u5727\u30dd\u30da\u30c3\u30c8\u30d0\u30eb\u30d6\u3092\u4f7f\u7528\u3057\u3066\u3044\u307e\u3059\u3002\u5207\u308a\u66ff\u3048\u306e\u77ac\u9593\u3001\u6392\u6c17\u30c0\u30af\u30c8\u5185\u3067\u77ac\u9593\u7684\u306a\u5727\u529b\u30b5\u30fc\u30b8\uff08\u901a\u5e38\u00b150Pa\uff5e\u00b1200Pa\uff09\u304c\u767a\u751f\u3057\u307e\u3059\u3002\u9ad8\u7cbe\u5ea6\u30b9\u30ad\u30e3\u30ca\u306e\u5834\u5408\u3001\u3053\u306e\u5727\u529b\u30d1\u30eb\u30b9\u306b\u3088\u308a\u30c8\u30e9\u30c3\u30af\uff08\u30b3\u30fc\u30bf\/\u30c7\u30d9\u30ed\u30c3\u30d1\uff09\u5185\u306e\u30df\u30af\u30ed\u74b0\u5883\u30d0\u30e9\u30f3\u30b9\u304c\u5d29\u308c\u3001\u30a4\u30f3\u30bf\u30fc\u30ed\u30c3\u30af\u30a2\u30e9\u30fc\u30e0\u304c\u4f5c\u52d5\u3057\u3066\u30c0\u30a6\u30f3\u30bf\u30a4\u30e0\u304c\u767a\u751f\u3057\u307e\u3059\u3002<\/p>\n<h3>2. \u30ed\u30fc\u30bf\u30ea\u30fc RTO \u304c\u30d5\u30a1\u30d6\u306b\u3068\u3063\u3066\u6700\u9069\u306a\u9078\u629e\u80a2\u3068\u306a\u308b\u306e\u306f\u306a\u305c\u3067\u3059\u304b?<\/h3>\n<p><strong>\u30ed\u30fc\u30bf\u30ea\u30fcRTO<\/strong> \u5f80\u5fa9\u52d5\u30dd\u30da\u30c3\u30c8\u5f01\u306e\u4ee3\u308f\u308a\u306b\u3001\u9023\u7d9a\u56de\u8ee2\u5f0f\u5206\u914d\u5f01\u3092\u63a1\u7528\u3057\u3066\u3044\u307e\u3059\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u975e\u5e38\u306b\u30b9\u30e0\u30fc\u30ba\u3067\u9023\u7d9a\u7684\u306a\u7a7a\u6c17\u306e\u6d41\u308c\u304c\u5f97\u3089\u308c\u3001\u5727\u529b\u8108\u52d5\u304c\u6392\u9664\u3055\u308c\u307e\u3059\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u6392\u6c17\u30b7\u30b9\u30c6\u30e0\u5185\u306e\u9759\u5727\u5909\u52d5\u304c\u4e00\u5b9a\u7bc4\u56f2\u5185\u306b\u6291\u3048\u3089\u308c\u307e\u3059\u3002 <strong>\u00b110\u30d1\u30b9\u30ab\u30eb<\/strong>\u3001\u771f\u306e\u9054\u6210 <strong>\u30bc\u30ed\u30d1\u30eb\u30b9\u2122<\/strong> \u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u3002<\/p>\n<h3>3. \u534a\u5c0e\u4f53\u6392\u6c17\u30ac\u30b9\u4e2d\u306e\u300c\u4e8c\u6b21\u6c5a\u67d3\u300d\u3092\u9632\u3050\u306b\u306f\uff1f<\/h3>\n<p>\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\u6392\u6c17\u30ac\u30b9\u306b\u306f\u30b7\u30ed\u30ad\u30b5\u30f3\uff08HMDS\u5206\u89e3\u306b\u3088\u308b\uff09\u304c\u542b\u307e\u308c\u308b\u3053\u3068\u304c\u591a\u304f\u3001\u3053\u308c\u304c\u786c\u8cea <strong>\u4e8c\u9178\u5316\u30b1\u30a4\u7d20\uff08<\/strong>$SiO_2$<strong>)<\/strong> RTO\u5185\u90e8\u306e\u7c89\u5875\u3002\u9069\u5207\u306a\u6ffe\u904e\u3068\u6d41\u91cf\u5236\u5fa1\u304c\u306a\u3051\u308c\u3070\u3001\u3053\u306e\u7c89\u5875\u306f\u65bd\u8a2d\u5185\u306b\u623b\u3063\u305f\u308a\u3001\u6392\u6c17\u7ba1\u304b\u3089\u6392\u51fa\u3055\u308c\u305f\u308a\u3057\u3066\u3001\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u306e\u30af\u30e9\u30b9\u8a55\u4fa1\u3092\u640d\u306a\u3046\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n<h2><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-1749\" src=\"https:\/\/regenerative-thermal-oxidation.com\/wp-content\/uploads\/2025\/12\/screenshot_2025-12-10_10-19-41.webp\" alt=\"RTO\" width=\"717\" height=\"473\" srcset=\"https:\/\/regenerative-thermal-oxidation.com\/wp-content\/uploads\/2025\/12\/screenshot_2025-12-10_10-19-41.webp 717w, https:\/\/regenerative-thermal-oxidation.com\/wp-content\/uploads\/2025\/12\/screenshot_2025-12-10_10-19-41-480x317.webp 480w\" sizes=\"(min-width: 0px) and (max-width: 480px) 480px, (min-width: 481px) 717px, 100vw\" \/><\/h2>\n<h2>\u00a0\u6280\u8853\u4ed5\u69d8\uff1a\u5229\u56de\u308a\u91cd\u8996\u306e\u30d9\u30f3\u30c1\u30de\u30fc\u30af<\/h2>\n<p>FEOL\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u3001RTO\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u6307\u6a19\u306f\u300c\u7834\u58ca\u52b9\u7387\u300d\u304b\u3089\u300c\u5b89\u5b9a\u6027\u30d1\u30e9\u30e1\u30fc\u30bf\u300d\u306b\u79fb\u884c\u3057\u307e\u3057\u305f\u3002<\/p>\n<h3>\u4e3b\u8981\u306a\u6280\u8853\u30d1\u30e9\u30e1\u30fc\u30bf\u8868<\/h3>\n<table>\n<tbody>\n<tr>\n<th>\u6280\u8853\u6307\u6a19<\/th>\n<th>\u30d1\u30e9\u30e1\u30fc\u30bf\u7bc4\u56f2<\/th>\n<th>\u30a6\u30a7\u30fc\u30cf\u6b69\u7559\u307e\u308a\u3078\u306e\u5f71\u97ff<\/th>\n<th>\u696d\u754c\u30ea\u30d5\u30a1\u30ec\u30f3\u30b9<\/th>\n<\/tr>\n<tr>\n<td><strong>\u5727\u529b\u5909\u52d5<\/strong><\/td>\n<td><strong>\u2264 \u00b110 Pa<\/strong><\/td>\n<td>\u30b3\u30a2\u30e1\u30c8\u30ea\u30c3\u30af\u3002\u30b9\u30ad\u30e3\u30ca\u30fc\u74b0\u5883\u306e\u4e0d\u5b89\u5b9a\u6027\u3092\u9632\u304e\u307e\u3059\u3002<\/td>\n<td>\u30bb\u30df\u30b9\u30bf\u30f3\u30c0\u30fc\u30c9F15<\/td>\n<\/tr>\n<tr>\n<td><strong>\u632f\u52d5\u30ec\u30d9\u30eb\uff08VC\uff09<\/strong><\/td>\n<td>VC-A \/ VC-B<\/td>\n<td>\u5149\u5b66\u90e8\u54c1\u306e\u6a5f\u68b0\u7684\u5171\u632f\u3092\u9632\u6b62\u3057\u307e\u3059\u3002<\/td>\n<td>IEST\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u6a19\u6e96<\/td>\n<\/tr>\n<tr>\n<td><strong>VOC\u7834\u58ca\uff08DRE\uff09<\/strong><\/td>\n<td><strong>\u2265 99.5%<\/strong><\/td>\n<td>PGMEA\/\u6eb6\u5264\u6392\u51fa\u91cf\u304c\u4e16\u754c\u898f\u5236\u3092\u4e0a\u56de\u308b\u3053\u3068\u3092\u4fdd\u8a3c\u3057\u307e\u3059\u3002<\/td>\n<td>\u74b0\u5883\u6cd5<\/td>\n<\/tr>\n<tr>\n<td><strong>\u71b1\u52b9\u7387\uff08TER\uff09<\/strong><\/td>\n<td>95% &#8211; 97%<\/td>\n<td>\u30ae\u30ac\u30d5\u30a1\u30d6\u306e OpEx \u3092\u524a\u6e1b\u3057\u3001ESG \u76ee\u6a19\u3068\u4e00\u81f4\u3057\u307e\u3059\u3002<\/td>\n<td>\u30b0\u30ea\u30fc\u30f3\u30d5\u30a1\u30af\u30c8\u30ea\u30fc\u6a19\u6e96<\/td>\n<\/tr>\n<tr>\n<td><strong>\u7c92\u5b50\u6fc3\u5ea6<\/strong><\/td>\n<td>1 mg\/m\u00b3\u672a\u6e80<\/td>\n<td>\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u5185\u306e\u4e8c\u6b21\u7684\u306a\u7c89\u5875\u6c5a\u67d3\u3092\u9632\u6b62\u3057\u307e\u3059\u3002<\/td>\n<td>ISO\u30af\u30e9\u30b91-5<\/td>\n<\/tr>\n<tr>\n<td><strong>\u30d0\u30eb\u30d6\u5207\u308a\u66ff\u3048\u6642\u9593<\/strong><\/td>\n<td>\u9023\u7d9a\u56de\u8ee2<\/td>\n<td>\u7a7a\u6c17\u306e\u6d41\u308c\u306b\u304a\u3051\u308b\u300c\u30a6\u30a9\u30fc\u30bf\u30fc\u30cf\u30f3\u30de\u30fc\u300d\u52b9\u679c\u3092\u6392\u9664\u3057\u307e\u3059\u3002<\/td>\n<td>\u6d41\u4f53\u529b\u5b66\u8a08\u7b97<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>\u6280\u8853\u7684\u306a\u8a73\u7d30:<\/h3>\n<ul>\n<li><strong>\u30ed\u30fc\u30bf\u30ea\u30fc\u30d0\u30eb\u30d6\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0<\/strong>\u30ed\u30fc\u30bf\u30ea\u30fcRTO\u306f\u3001\u7cbe\u5bc6\u6a5f\u68b0\u52a0\u5de5\u3055\u308c\u305f\u5358\u4e00\u306e\u5206\u914d\u5f01\u3092\u63a1\u7528\u3057\u3066\u3044\u307e\u3059\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u30dd\u30da\u30c3\u30c8\u578b\u30e6\u30cb\u30c3\u30c8\u3067\u30bf\u30ef\u30fc\u306e\u5207\u308a\u66ff\u3048\u6642\u306b\u767a\u751f\u3059\u308b\u300c\u30c7\u30c3\u30c9\u30bf\u30a4\u30e0\u300d\u306e\u771f\u7a7a\u72b6\u614b\u304c\u6392\u9664\u3055\u308c\u3001\u30b9\u30ad\u30e3\u30ca\u30fc\u306e\u7e4a\u7d30\u306a\u5727\u529b\u8a2d\u5b9a\u5024\u304c\u4fdd\u8b77\u3055\u308c\u307e\u3059\u3002<\/li>\n<li><strong>\u4f4e\u632f\u52d5\u8a2d\u8a08<\/strong>: \u30b7\u30fc\u30c8\u306b\u3076\u3064\u304b\u308b\u91cd\u3044\u30dd\u30da\u30c3\u30c8\u30d0\u30eb\u30d6\u304c\u306a\u3044\u305f\u3081\u3001\u6a5f\u68b0\u7684\u306a\u632f\u52d5\u304c\u4e8b\u5b9f\u4e0a\u6392\u9664\u3055\u308c\u307e\u3059\u3002\u3053\u308c\u306f\u3001\u632f\u52d5\u306b\u654f\u611f\u306a\u300c\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0 \u30ea\u30bd\u30d9\u30a4\u300d\u4ed8\u8fd1\u306b\u8a2d\u7f6e\u3055\u308c\u305f\u6a5f\u5668\u306b\u3068\u3063\u3066\u91cd\u8981\u306a\u8981\u7d20\u3067\u3059\u3002<\/li>\n<\/ul>\n<h2>\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u30b7\u30ca\u30ea\u30aa\uff1a\u9577\u6240\u3068\u9650\u754c<\/h2>\n<h3>\u30b7\u30ca\u30ea\u30aa\u5206\u6790: \u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\u3068\u30c8\u30e9\u30c3\u30af (\u9ad8\u5bb9\u91cf\u3001\u9ad8\u5b89\u5b9a\u6027)<\/h3>\n<ul>\n<li><strong>\u7279\u5fb4<\/strong>: VOC \u7d44\u6210\u306f\u6bd4\u8f03\u7684\u4e00\u5b9a\u3067\u3059\u304c (\u4e3b\u306b PGMEA\/\u6eb6\u5264)\u3001365x24 \u6642\u9593\u306e\u9023\u7d9a\u904b\u8ee2\u304c\u5fc5\u8981\u3067\u3059\u3002<\/li>\n<li><strong>\u5229\u70b9<\/strong>:\n<ul>\n<li><strong>\u964d\u4f0f\u4fdd\u8b77<\/strong>: \u30bc\u30ed\u30d1\u30eb\u30b9\u7279\u6027\u306b\u3088\u308a\u3001\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30d7\u30ed\u30bb\u30b9\u30a6\u30a3\u30f3\u30c9\u30a6\u306e\u5b89\u5b9a\u6027\u304c\u78ba\u4fdd\u3055\u308c\u307e\u3059\u3002<\/li>\n<li><strong>\u9ad8\u3044\u4fe1\u983c\u6027<\/strong>: \u5358\u4e00\u30d0\u30eb\u30d6\u8a2d\u8a08\u306b\u3088\u308a\u3001\u30d0\u30eb\u30d6\u30a2\u30af\u30c1\u30e5\u30a8\u30fc\u30bf\u30fc\u3068\u30bb\u30f3\u30b5\u30fc\u306b\u95a2\u9023\u3059\u308b\u6570\u767e\u306e\u6f5c\u5728\u7684\u306a\u6545\u969c\u30dd\u30a4\u30f3\u30c8\u304c\u524a\u6e1b\u3055\u308c\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u5236\u9650\u4e8b\u9805<\/strong>:\n<ul>\n<li><strong>\u30b7\u30ea\u30ab\u306e\u6c88\u7740<\/strong>: HMDS \u3092\u51e6\u7406\u3059\u308b\u5834\u5408\u3001\u30bb\u30e9\u30df\u30c3\u30af\u5a92\u4f53\u3078\u306e $SiO_2$ \u306e\u84c4\u7a4d\u3092\u9632\u3050\u305f\u3081\u306b\u3001\u5b9a\u671f\u7684\u306a\u300c\u30d9\u30a4\u30af\u30a2\u30a6\u30c8\u300d\u307e\u305f\u306f\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9 \u30b5\u30a4\u30af\u30eb\u304c\u5fc5\u8981\u3067\u3059\u3002<\/li>\n<li><strong>\u8cc7\u672c\u6295\u8cc7<\/strong>\u9ad8\u6027\u80fd\u30ed\u30fc\u30bf\u30ea\u30fc\u30d0\u30eb\u30d6\u306f\u7cbe\u5bc6\u6a5f\u68b0\u52a0\u5de5\u304c\u5fc5\u8981\u306a\u305f\u3081\u3001\u6c4e\u7528 RTO \u306b\u6bd4\u3079\u3066\u521d\u671f\u30b3\u30b9\u30c8\u304c\u9ad8\u304f\u306a\u308a\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<h2>\u91cd\u8981\u306a\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u3068\u30b7\u30b9\u30c6\u30e0\u306e\u63a8\u5968\u4e8b\u9805<\/h2>\n<ol>\n<li><strong>\u9ad8\u7cbe\u5ea6\u30ed\u30fc\u30bf\u30ea\u30fc\u30d0\u30eb\u30d6<\/strong>: \u9ad8\u5ea6\u306a\u30b7\u30fc\u30ea\u30f3\u30b0\u3092\u5099\u3048\u305f\u7279\u6b8a\u5408\u91d1\u3067\u4f5c\u3089\u308c\u3066\u304a\u308a\u3001\u6f0f\u308c\u304c\u306a\u304f\u9577\u5bff\u547d\u3067\u3059\u3002<\/li>\n<li><strong>\u591a\u6bb5\u30d7\u30ec\u30d5\u30a3\u30eb\u30bf\u30fc\uff08HEPA\uff09<\/strong>: FEOL \u30d7\u30ed\u30bb\u30b9\u3067\u306f\u3001\u30bb\u30e9\u30df\u30c3\u30af\u5a92\u4f53\u3092\u4e88\u671f\u3057\u306a\u3044\u30b7\u30ed\u30ad\u30b5\u30f3\u306e\u5149\u6ca2\u304b\u3089\u4fdd\u8b77\u3059\u308b\u305f\u3081\u306b\u3001\u6392\u6c17\u306f RTO \u306b\u5165\u308b\u524d\u306b\u53b3\u5bc6\u306b\u30d5\u30a3\u30eb\u30bf\u30ea\u30f3\u30b0\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\n<li><strong>\u30c7\u30e5\u30a2\u30eb\u30a4\u30f3\u30d0\u30fc\u30bf\u5197\u9577\u6027\uff08VFD\uff09<\/strong>: \u30de\u30b9\u30bf\u30fc\/\u30b9\u30ec\u30fc\u30d6 VFD \u69cb\u6210\u306b\u3088\u308a\u3001\u30e2\u30b8\u30e5\u30fc\u30eb\u969c\u5bb3\u304c\u767a\u751f\u3057\u305f\u5834\u5408\u3067\u3082\u30df\u30ea\u79d2\u30ec\u30d9\u30eb\u306e\u5207\u308a\u66ff\u3048\u304c\u53ef\u80fd\u306b\u306a\u308a\u3001\u6392\u6c17\u30b7\u30b9\u30c6\u30e0\u306e\u30c0\u30a6\u30f3\u30bf\u30a4\u30e0\u304c\u30bc\u30ed\u306b\u306a\u308a\u307e\u3059\u3002<\/li>\n<li><strong>\u4e8c\u6b21\u71b1\u56de\u53ce<\/strong>: \u71c3\u713c\u71b1\u3092\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u306e\u9664\u6e7f\u307e\u305f\u306f\u518d\u52a0\u71b1\u30b7\u30b9\u30c6\u30e0\u306b\u518d\u5229\u7528\u3057\u3001\u30a8\u30cd\u30eb\u30ae\u30fc \u30eb\u30fc\u30d7\u3092\u9589\u3058\u307e\u3059\u3002<\/li>\n<\/ol>\n<h2>\u00a0\u4e3b\u6d41RTO\u30d6\u30e9\u30f3\u30c9\u306e\u6bd4\u8f03\uff08\u534a\u5c0e\u4f53\u306e\u89b3\u70b9\uff09<\/h2>\n<table>\n<tbody>\n<tr>\n<th>\u30d6\u30e9\u30f3\u30c9<\/th>\n<th>\u30b3\u30a2\u306e\u5f37\u3055<\/th>\n<th>\u5727\u529b\u5236\u5fa1<\/th>\n<th>\u610f\u601d\u6c7a\u5b9a\u30ed\u30b8\u30c3\u30af<\/th>\n<\/tr>\n<tr>\n<td><strong>\u30c7\u30e5\u30fc\u30eb\uff08\u30a8\u30b3\u30d4\u30e5\u30a2\uff09<\/strong><\/td>\n<td>\u30ed\u30fc\u30bf\u30ea\u30fc RTO \u306e\u30d1\u30a4\u30aa\u30cb\u30a2\u3002Tier-1 \u30d5\u30a1\u30d6 (TSMC\u3001Intel) \u306b\u5927\u898f\u6a21\u306a\u30a4\u30f3\u30b9\u30c8\u30fc\u30eb \u30d9\u30fc\u30b9\u304c\u3042\u308a\u307e\u3059\u3002<\/td>\n<td>\u6975\u7aef\uff08\u00b15 Pa\uff09<\/td>\n<td>\u4e16\u754c\u7684\u306a\u300c\u30b4\u30fc\u30eb\u30c9 \u30b9\u30bf\u30f3\u30c0\u30fc\u30c9\u300d\u3092\u6c42\u3081\u308b\u9ad8\u4e88\u7b97\u306e 12 \u30a4\u30f3\u30c1 \u30d5\u30a1\u30d6\u306b\u6700\u9069\u3067\u3059\u3002<\/td>\n<\/tr>\n<tr>\n<td><strong>\u30a8\u30d0\u30fc\u30d1\u30ef\u30fc\uff08\u30e6\u30eb\u30bb\u30f3\u30c8\uff09<\/strong><\/td>\n<td><strong>Zero-Pulse\u2122\u7279\u8a31\u6280\u8853<\/strong>; PGMEA \u306e\u6025\u5897\u306b\u5bfe\u3059\u308b\u6a5f\u654f\u306a\u5bfe\u5fdc\u3002<\/td>\n<td>\u826f\u597d\uff08\u00b110 Pa\uff09<\/td>\n<td>\u6700\u9069\u306a\u7528\u9014 <strong>\u30b3\u30b9\u30c8\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9<\/strong> \u30ed\u30fc\u30ab\u30e9\u30a4\u30ba\u3055\u308c\u305f\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0 \u30b5\u30dd\u30fc\u30c8\u3002<\/td>\n<\/tr>\n<tr>\n<td><strong>\u5927\u6c17\u793e<\/strong><\/td>\n<td>\u6c17\u6d41\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u306e\u5c02\u9580\u5bb6\u3002\u65e5\u672c\u306e\u6a5f\u5668\u30c1\u30a7\u30fc\u30f3\u3067\u512a\u4f4d\u306b\u7acb\u3063\u3066\u3044\u307e\u3059\u3002<\/td>\n<td>\u7d20\u6674\u3089\u3057\u3044<\/td>\n<td>\u65e5\u672c\u88fd\u30ea\u30bd\u30e9\u30a4\u30f3\u3068\u306e\u7dca\u5bc6\u306a\u7d71\u5408\u306b\u6700\u9069\u3067\u3059\u3002<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h2>\u00a0\u30b0\u30ed\u30fc\u30d0\u30eb\u30b3\u30f3\u30d7\u30e9\u30a4\u30a2\u30f3\u30b9\u3068\u53ce\u76ca\u7ba1\u7406\u306e\u7d71\u5408<\/h2>\n<p>\u4e16\u754c\u7684\u306b\u62e1\u5927\u3059\u308b\u534a\u5c0e\u4f53\u4f01\u696d\u306f\u3001\u6700\u3082\u53b3\u3057\u3044\u74b0\u5883\u57fa\u6e96\u3068\u6700\u3082\u8981\u6c42\u306e\u53b3\u3057\u3044\u6b69\u7559\u307e\u308a\u76ee\u6a19\u306e\u4e21\u65b9\u3092\u6e80\u305f\u3059\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n<ol>\n<li><strong>\u898f\u5236\u306e\u67a0\u7d44\u307f<\/strong>:\n<ul>\n<li><strong>\u53f0\u6e7e\/\u4e2d\u56fd\u672c\u571f<\/strong>: \u53b3\u683c\u306a\u534a\u5c0e\u4f53\u56fa\u6709\u306e\u898f\u683c\u3067\u3042\u308a\u3001\u591a\u304f\u306e\u5834\u5408\u3001&gt;95% DRE \u304c\u5fc5\u8981\u3067\u3059 (Tier-1 \u30d5\u30a1\u30d6\u306f &gt;99.5% \u3067\u81ea\u5df1\u898f\u5236\u3057\u307e\u3059)\u3002<\/li>\n<li><strong>\u7c73\u56fd\/EU<\/strong>: \u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u696d\u754c\u5411\u3051\u306e NESHAP \u898f\u683c\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>ESG\u3068\u30ec\u30b8\u30ea\u30a8\u30f3\u30b9<\/strong>\u9ad8\u52b9\u7387\u306e\u30ed\u30fc\u30bf\u30ea\u30fc RTO \u3078\u306e\u6295\u8cc7\u306f\u3001\u4f01\u696d\u306e ESG \u30b9\u30b3\u30a2\u306e\u5411\u4e0a\u306b\u8ca2\u732e\u3059\u308b\u3068\u3068\u3082\u306b\u3001\u30b3\u30b9\u30c8\u306e\u304b\u304b\u308b\u30e9\u30a4\u30f3\u505c\u6b62\u3092\u9632\u3050\u300c\u65bd\u8a2d\u306e\u56de\u5fa9\u529b\u300d\u5bfe\u7b56\u3068\u3057\u3066\u3082\u6a5f\u80fd\u3057\u307e\u3059\u3002<\/li>\n<\/ol>\n<h2>\u00a0\u73fe\u5834\u7d4c\u9a13\u3068\u30b1\u30fc\u30b9\u30b9\u30bf\u30c7\u30a3<\/h2>\n<h3>\u5c02\u9580\u5bb6\u306e\u898b\u89e3\uff1aRTO\u3092\u300c\u5730\u9707\u767a\u751f\u6e90\u300d\u306b\u3057\u306a\u3044<\/h3>\n<p>\u6700\u8fd1\u306e\u9ad8\u5ea6\u306a\u30ed\u30b8\u30c3\u30af \u30c1\u30c3\u30d7 \u30d7\u30ed\u30b8\u30a7\u30af\u30c8\u3067\u306f\u3001\u30af\u30e9\u30a4\u30a2\u30f3\u30c8\u306f\u5f53\u521d\u3001\u6a19\u6e96\u306e\u30dd\u30da\u30c3\u30c8 \u30d0\u30eb\u30d6 RTO \u306e\u4f7f\u7528\u3092\u8a66\u307f\u307e\u3057\u305f\u3002<\/p>\n<ul>\n<li><strong>\u554f\u984c\u70b9<\/strong>RTO \u304c\u30d0\u30eb\u30d6\u3092\u5207\u308a\u66ff\u3048\u308b\u305f\u3073\u306b\u3001\u30ea\u30bd\u30d9\u30a4\u306e\u30de\u30a4\u30af\u30ed\u5727\u529b\u30b2\u30fc\u30b8\u304c\u5927\u304d\u304f\u5909\u52d5\u3057\u3001\u30b9\u30ad\u30e3\u30ca\u30fc\u304c\u30c8\u30ea\u30c3\u30d7\u3057\u3066\u30bb\u30fc\u30d5 \u30e2\u30fc\u30c9\u306b\u306a\u308a\u307e\u3057\u305f\u3002<\/li>\n<li><strong>\u89e3\u6c7a\u7b56<\/strong>:\u30e6\u30cb\u30c3\u30c8\u3092\u4ea4\u63db\u3057\u307e\u3057\u305f <strong>\u30a8\u30d0\u30fc\u30d1\u30ef\u30fc\u30ed\u30fc\u30bf\u30ea\u30fcRTO<\/strong> \u30d5\u30a1\u30f3\u30b9\u30ad\u30c3\u30c9\u306b\u30a2\u30af\u30c6\u30a3\u30d6\u632f\u52d5\u6e1b\u8870\u6a5f\u80fd\u3092\u5b9f\u88c5\u3057\u307e\u3057\u305f\u3002<\/li>\n<li><strong>\u7d50\u679c<\/strong>\u5727\u529b\u8108\u52d5\u306f\u5b8c\u5168\u306b\u6392\u9664\u3055\u308c\u307e\u3057\u305f\u3002\u300c\u7126\u70b9\u305a\u308c\u6b20\u9665\u300d\u306b\u3088\u308b\u30b9\u30af\u30e9\u30c3\u30d7\u7387\u306f1.5%\u6e1b\u5c11\u3057\u3001\u5e74\u9593\u6570\u767e\u4e07\u30c9\u30eb\u306e\u7d4c\u6e08\u56de\u5fa9\u3092\u3082\u305f\u3089\u3057\u307e\u3057\u305f\u3002<\/li>\n<\/ul>\n<h2>\u5c06\u6765\u306e\u52d5\u5411\uff1a\u30b9\u30de\u30fc\u30c8\u30d5\u30a1\u30d6\u306b\u304a\u3051\u308bVOC\u7ba1\u7406<\/h2>\n<ul>\n<li><strong>\u30c0\u30a4\u30ca\u30df\u30c3\u30af\u30a8\u30a2\u30d5\u30ed\u30fc\u30d0\u30e9\u30f3\u30b9<\/strong>\u5c06\u6765\u306e RTO \u306f\u30b9\u30ad\u30e3\u30ca\u30fc\u3068\u76f4\u63a5\u901a\u4fe1\u3057\u3001\u6392\u6c17\u9700\u8981\u3092\u4e88\u6e2c\u3057\u3066\u30d5\u30a1\u30f3\u901f\u5ea6\u3092\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u3067\u8abf\u6574\u3057\u3001\u4e00\u5b9a\u306e\u5727\u529b\u3092\u7dad\u6301\u3057\u307e\u3059\u3002<\/li>\n<li><strong>\u30e9\u30a4\u30d5\u30b5\u30a4\u30af\u30eb\u5168\u4f53\u306e\u6392\u51fa\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0<\/strong>\u7d71\u5408\u30aa\u30f3\u30e9\u30a4\u30f3\u8cea\u91cf\u5206\u6790\u8a08\u306b\u3088\u308a\u3001PGMEA \u306e\u9178\u5316\u3092\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u3067\u76e3\u8996\u3057\u3001\u771f\u306e\u300c\u30cd\u30c3\u30c8\u30bc\u30ed\u300d\u904b\u7528\u306e\u900f\u660e\u6027\u3092\u5b9f\u73fe\u3057\u307e\u3059\u3002<\/li>\n<\/ul>\n<p><strong>\u7d50\u8ad6<\/strong>\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3044\u3066\u3001\u74b0\u5883\u8a2d\u5099\u306f\u3082\u306f\u3084\u300c\u6392\u6c17\u7ba1\u306e\u4ed8\u5c5e\u54c1\u300d\u3067\u306f\u306a\u304f\u3001\u6b69\u7559\u307e\u308a\u30a8\u30b3\u30b7\u30b9\u30c6\u30e0\u306b\u304a\u3051\u308b\u91cd\u8981\u306a\u30ea\u30f3\u30af\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002\u30ed\u30fc\u30bf\u30ea\u30fc <a href=\"https:\/\/regenerative-thermal-oxidation.com\/ja\/\">RTO<\/a>\u300c\u5b89\u5b9a\u6027\u7b2c\u4e00\u300d\u306b\u91cd\u70b9\u3092\u7f6e\u3044\u305f 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The photolithography and development modules in the Front-End of Line (FEOL) represent the most capital-intensive and environmentally sensitive areas of the fab. In this high-stakes environment, managing Volatile Organic Compounds (VOCs) like PGMEA and HMDS is more than just an environmental mandate. If a Regenerative Thermal Oxidizer (RTO) system generates even minor pressure fluctuations or vibrations, it can cause defocusing in the Scanner, leading to catastrophic yield loss for entire wafer lots. How do we achieve &#8220;zero-interference&#8221; emissions while meeting global ESG standards? Core Challenges: Why Conventional RTOs Struggle [&hellip;]<\/p>","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_et_pb_use_builder":"","_et_pb_old_content":"","_et_gb_content_width":"","footnotes":""},"categories":[1],"tags":[],"class_list":["post-1989","post","type-post","status-publish","format-standard","hentry","category-uncategorized"],"_links":{"self":[{"href":"https:\/\/regenerative-thermal-oxidation.com\/ja\/wp-json\/wp\/v2\/posts\/1989","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/regenerative-thermal-oxidation.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/regenerative-thermal-oxidation.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/regenerative-thermal-oxidation.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/regenerative-thermal-oxidation.com\/ja\/wp-json\/wp\/v2\/comments?post=1989"}],"version-history":[{"count":1,"href":"https:\/\/regenerative-thermal-oxidation.com\/ja\/wp-json\/wp\/v2\/posts\/1989\/revisions"}],"predecessor-version":[{"id":1990,"href":"https:\/\/regenerative-thermal-oxidation.com\/ja\/wp-json\/wp\/v2\/posts\/1989\/revisions\/1990"}],"wp:attachment":[{"href":"https:\/\/regenerative-thermal-oxidation.com\/ja\/wp-json\/wp\/v2\/media?parent=1989"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/regenerative-thermal-oxidation.com\/ja\/wp-json\/wp\/v2\/categories?post=1989"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/regenerative-thermal-oxidation.com\/ja\/wp-json\/wp\/v2\/tags?post=1989"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}