{"id":2125,"date":"2025-12-24T01:17:30","date_gmt":"2025-12-24T01:17:30","guid":{"rendered":"https:\/\/regenerative-thermal-oxidation.com\/?p=2125"},"modified":"2025-12-25T02:51:36","modified_gmt":"2025-12-25T02:51:36","slug":"%e3%82%aa%e3%83%a9%e3%83%b3%e3%83%80%e3%81%ab%e3%81%8a%e3%81%91%e3%82%8b%e5%8d%8a%e5%b0%8e%e4%bd%93%e3%82%a6%e3%82%a7%e3%83%8f%e6%b4%97%e6%b5%84%e6%8e%92%e6%b0%97%e7%94%a8%e3%81%ae%e7%89%b9%e6%ae%8a","status":"publish","type":"post","link":"https:\/\/regenerative-thermal-oxidation.com\/ja\/%e5%bf%9c%e7%94%a8\/%e3%82%aa%e3%83%a9%e3%83%b3%e3%83%80%e3%81%ab%e3%81%8a%e3%81%91%e3%82%8b%e5%8d%8a%e5%b0%8e%e4%bd%93%e3%82%a6%e3%82%a7%e3%83%8f%e6%b4%97%e6%b5%84%e6%8e%92%e6%b0%97%e7%94%a8%e3%81%ae%e7%89%b9%e6%ae%8a\/","title":{"rendered":"\u30aa\u30e9\u30f3\u30c0\u306b\u304a\u3051\u308b\u534a\u5c0e\u4f53\u30a6\u30a7\u30fc\u30cf\u6d17\u6d44\u6392\u6c17\u306e\u305f\u3081\u306e\u5c02\u9580RTO\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3"},"content":{"rendered":"<style>\n        body { font-family: Arial, sans-serif; line-height: 1.6; margin: 20px; color: #333; }<br \/>        h1, h2, h3 { color: #0056b3; }<br \/>        table { border-collapse: collapse; width: 100%; margin-bottom: 20px; }<br \/>        table, th, td { border: 1px solid #ddd; padding: 8px; }<br \/>        th { background-color: #f2f2f2; }<br \/>        img, video { max-width: 100%; height: auto; display: block; margin: 20px auto; }<br \/>        .section { margin-bottom: 40px; }<br \/>        .param-list { list-style-type: disc; padding-left: 20px; }<br \/>    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class=\"section\">\n<h2>\u30a6\u30a7\u30fc\u30cf\u6d17\u6d44\u5de5\u7a0b\u306b\u304a\u3051\u308b\u6392\u6c17\u554f\u984c\u306e\u89e3\u6c7a<\/h2>\n<p>\u30a6\u30a7\u30fc\u30cf\u6d17\u6d44\u3067\u306f\u3001\u30a4\u30bd\u30d7\u30ed\u30d4\u30eb\u30a2\u30eb\u30b3\u30fc\u30eb\u3084\u786b\u9178\u306a\u3069\u306e\u5316\u5b66\u85ac\u54c1\u3092\u7528\u3044\u3066\u6c5a\u67d3\u7269\u8cea\u3092\u9664\u53bb\u3059\u308b\u305f\u3081\u3001VOC\u3084\u9178\u3092\u591a\u304f\u542b\u3080\u6392\u6c17\u30ac\u30b9\u304c\u767a\u751f\u3057\u307e\u3059\u3002ASML\u304c\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\u3067\u4e16\u754c\u3092\u30ea\u30fc\u30c9\u3059\u308b\u30aa\u30e9\u30f3\u30c0\u3067\u306f\u3001\u4f5c\u696d\u54e1\u3068\u6e05\u6d44\u306a\u74b0\u5883\u3092\u5b88\u308b\u305f\u3081\u306b\u3001\u6e05\u6d44\u306a\u7a7a\u6c17\u3092\u7dad\u6301\u3059\u308b\u3053\u3068\u304c\u6700\u3082\u91cd\u8981\u3067\u3059\u3002\u5f53\u793e\u306eRTO\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u30a8\u30c3\u30c1\u30f3\u30b0\u5f8c\u306e\u6d17\u6d44\u3067\u3088\u304f\u4f7f\u7528\u3055\u308c\u308bHF\u84b8\u6c17\u306b\u3088\u308b\u8150\u98df\u3092\u9632\u3050\u8010\u9178\u6027\u6750\u6599\u3092\u63a1\u7528\u3057\u3066\u304a\u308a\u3001\u30bc\u30fc\u30e9\u30f3\u30c8\u5dde\u306e\u3088\u3046\u306a\u6e7f\u5ea6\u306e\u9ad8\u3044\u6cbf\u5cb8\u5730\u57df\u3067\u3082\u9577\u5bff\u547d\u3092\u5b9f\u73fe\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n<p>\u96a3\u56fd\u30d9\u30eb\u30ae\u30fc\u306e\u30a2\u30f3\u30c8\u30ef\u30fc\u30d7\u534a\u5c0e\u4f53\u30af\u30e9\u30b9\u30bf\u30fc\u3082\u540c\u69d8\u306e\u554f\u984c\u306b\u76f4\u9762\u3057\u3066\u304a\u308a\u3001EU\u306e\u5171\u540c\u30a4\u30cb\u30b7\u30a2\u30c1\u30d6\u306b\u3088\u3063\u3066\u30d9\u30b9\u30c8\u30d7\u30e9\u30af\u30c6\u30a3\u30b9\u306e\u5171\u6709\u304c\u63a8\u9032\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u4e16\u754c\u7684\u306b\u898b\u308b\u3068\u3001\u7c73\u56fd\uff08EPA\u898f\u5236\u4e0b\u306e\u30ab\u30ea\u30d5\u30a9\u30eb\u30cb\u30a2\u5dde\u30b7\u30ea\u30b3\u30f3\u30d0\u30ec\u30fc\uff09\u3084\u97d3\u56fd\uff08K-REACH\u306b\u6e96\u62e0\u3059\u308b\u30b5\u30e0\u30b9\u30f3\u306e\u65bd\u8a2d\uff09\u3068\u3044\u3063\u305f\u4e3b\u8981\u5e02\u5834\u3067\u306f\u3001RTO\u306b\u3088\u3063\u3066VOC\u6fc3\u5ea6\u309220mg\/Nm\u00b3\u672a\u6e80\u306b\u524a\u6e1b\u3059\u308b\u3053\u3068\u304c\u53ef\u80fd\u3067\u3059\u3002\u3053\u308c\u306f\u300199%\u306e\u52b9\u7387\u306750,000Nm\u00b3\/h\u306e\u6d41\u91cf\u3092\u51e6\u7406\u3067\u304d\u305f\u30b7\u30b9\u30c6\u30e0\u306e\u4f8b\u304b\u3089\u3082\u660e\u3089\u304b\u3067\u3059\u3002<\/p>\n<\/div>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"\" src=\"https:\/\/www.kuka.com\/-\/media\/kuka-corporate\/images\/industries\/case-studies\/infineon\/kuka-iiwa-collaborative-cleanroom-robot.jpg?rev=316dc71f3e31422a929ba58850f23867&amp;w=1900&amp;hash=9BC8D5A87D3889F4AB881BD4ED685A2A\" alt=\"\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u74b0\u5883\u3067\u306e\u30a6\u30a7\u30fc\u30cf\u51e6\u7406\u30ed\u30dc\u30c3\u30c8\u3002\u30aa\u30e9\u30f3\u30c0\u306e\u534a\u5c0e\u4f53\u65bd\u8a2d\u306e\u7cbe\u5ea6\u3092\u793a\u3057\u3066\u3044\u307e\u3059\u3002\" width=\"590\" height=\"393\" \/><\/p>\n<div class=\"section\">\n<h2>\u30aa\u30e9\u30f3\u30c0\u306e\u534a\u5c0e\u4f53\u74b0\u5883\u5411\u3051\u306b\u6700\u9069\u5316\u3055\u308c\u305f\u6a5f\u80fd<\/h2>\n<p>\u30aa\u30e9\u30f3\u30c0\u306e\u6301\u7d9a\u53ef\u80fd\u6027\u3078\u306e\u91cd\u70b9\u3092\u53cd\u6620\u3057\u3001\u5f53\u793e\u306e\u8a2d\u8a08\u306f\u9ad8\u3044\u71b1\u56de\u53ce\u7387\u3092\u7279\u5fb4\u3068\u3057\u3066\u304a\u308a\u3001\u5317\u30db\u30e9\u30f3\u30c8\u5dde\u306e\u3088\u3046\u306a\u98a8\u529b\u767a\u96fb\u30b0\u30ea\u30c3\u30c9\u306e\u30a8\u30cd\u30eb\u30ae\u30fc\u30b3\u30b9\u30c8\u3092\u76f8\u6bba\u3057\u307e\u3059\u3002\u30a6\u30a7\u30fc\u30cf\u6d17\u6d44\u306e\u9593\u6b20\u7684\u306a\u6d41\u91cf\u306b\u3064\u3044\u3066\u306f\u3001\u53ef\u5909\u5468\u6ce2\u6570\u30c9\u30e9\u30a4\u30d6\u304c\u30d5\u30a1\u30f3\u901f\u5ea6\u3092\u8abf\u6574\u3057\u3001\u30ca\u30a4\u30e1\u30fc\u30d8\u30f3\u306a\u3069\u306e\u751f\u7523\u62e0\u70b9\u306b\u304a\u3051\u308b\u5b89\u5b9a\u6027\u3092\u7dad\u6301\u3057\u307e\u3059\u3002\u3053\u306e\u30a2\u30d7\u30ed\u30fc\u30c1\u306f\u3001\u5909\u52d5\u3059\u308b\u6c17\u8c61\u6761\u4ef6\u4e0b\u306b\u304a\u3044\u3066\u8cc7\u6e90\u3092\u52b9\u7387\u7684\u306b\u7ba1\u7406\u3059\u308b\u30aa\u30e9\u30f3\u30c0\u306e\u5e72\u62d3\u5730\u30b7\u30b9\u30c6\u30e0\u3068\u5171\u9cf4\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n<p>\u30c9\u30a4\u30c4\u306e\u30e9\u30a4\u30f3\u6e13\u8c37\u3084\u65e5\u672c\u306e\u7b51\u6ce2\u3067\u306f\u3001\u540c\u69d8\u306e RTO \u6539\u9020\u306b\u3088\u308a\u9178\u6027\u30df\u30b9\u30c8\u304c\u51e6\u7406\u3055\u308c\u3066\u304a\u308a\u3001\u6b27\u5dde\u306e\u4e8b\u4f8b\u3067\u306f\u7d71\u5408\u30b9\u30af\u30e9\u30d0\u30fc\u3092\u901a\u3058\u3066 IED BAT \u7d50\u8ad6\u306b\u6e96\u62e0\u3057\u3066\u3044\u308b\u3053\u3068\u304c\u793a\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n<\/div>\n<div class=\"section\">\n<h2>\u5305\u62ec\u7684\u306a\u6280\u8853\u30d1\u30e9\u30e1\u30fc\u30bf\uff1a\u4fe1\u983c\u6027\u306e\u305f\u3081\u306b\u69cb\u7bc9<\/h2>\n<p>\u30a6\u30a7\u30fc\u30cf\u6d17\u6d44\u6392\u6c17\u7528\u306b\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u3055\u308c\u305f 30 \u306e\u4e3b\u8981\u306a\u4ed5\u69d8\u306b\u57fa\u3065\u3044\u3066\u8a2d\u8a08\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n<ul class=\"param-list\">\n<li>\u71b1\u56de\u53ce\u52b9\u7387: \u6700\u5927 96%\u3001\u9178\u5316\u304b\u3089\u306e\u71b1\u30a8\u30cd\u30eb\u30ae\u30fc\u3092\u6355\u6349\u3057\u3066\u30d7\u30ed\u30bb\u30b9\u3092\u518d\u5229\u7528\u3057\u307e\u3059\u3002<\/li>\n<li>VOC \u9664\u53bb\u7387: 99% \u4ee5\u4e0a\u3001IPA \u3084\u30a2\u30bb\u30c8\u30f3\u306a\u3069\u306e\u6eb6\u5264\u3092\u5bfe\u8c61\u3068\u3057\u3066\u3044\u307e\u3059\u3002<\/li>\n<li>\u6d41\u91cf\u5bb9\u91cf: 20,000 \uff5e 200,000 Nm\u00b3\/h\u3001\u30e6\u30c8\u30ec\u30d2\u30c8\u306e\u5c0f\u898f\u6a21\u5de5\u5834\u304b\u3089\u5357\u30db\u30e9\u30f3\u30c8\u306e\u5927\u898f\u6a21\u5de5\u5834\u307e\u3067\u62e1\u5f35\u53ef\u80fd\u3002<\/li>\n<li>\u9178\u5316\u6e29\u5ea6: 750 \uff5e 900\u00b0C\u3001\u9178\u6027 VOC \u5206\u89e3\u306b\u6700\u9069\u5316\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/li>\n<li>\u6ede\u7559\u6642\u9593: 0.8 \uff5e 1.5 \u79d2\u3001\u5b8c\u5168\u71c3\u713c\u3092\u4fdd\u8a3c\u3057\u307e\u3059\u3002<\/li>\n<li>\u5727\u529b\u640d\u5931: 1.5 kPa \u672a\u6e80\u3001\u30a8\u30cd\u30eb\u30ae\u30fc\u52b9\u7387\u306e\u9ad8\u3044\u52d5\u4f5c\u3002<\/li>\n<li>\u5207\u308a\u66ff\u3048\u9593\u9694: \u4f4e\u30ea\u30fc\u30af\u30d0\u30eb\u30d6\u306e\u5834\u5408\u3001120 \uff5e 180 \u79d2\u3002<\/li>\n<li>\u6750\u8cea: HF \u8010\u6027\u306e\u3042\u308b Hastelloy C-276\u3002<\/li>\n<li>\u518d\u751f\u5668\u30bf\u30a4\u30d7: \u8010\u9178\u6027\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3092\u65bd\u3057\u305f\u30bb\u30e9\u30df\u30c3\u30af\u30b5\u30c9\u30eb\u3002<\/li>\n<li>NOx \u30ec\u30d9\u30eb: \u9078\u629e\u30d0\u30fc\u30ca\u30fc\u306b\u3088\u308a 30 mg\/Nm\u00b3 \u672a\u6e80\u3002<\/li>\n<li>\u30b7\u30b9\u30c6\u30e0 \u30b5\u30a4\u30ba: \u8a2d\u7f6e\u9762\u7a4d 12 \uff5e 50 m\u00b2\u3001\u30b3\u30f3\u30d1\u30af\u30c8\u306a\u30aa\u30e9\u30f3\u30c0\u306e\u30b5\u30a4\u30c8\u306b\u9069\u5408\u3002<\/li>\n<li>\u96fb\u529b\u6d88\u8cbb: 10\uff5e30kW\u3001\u30b0\u30ea\u30fc\u30f3\u30a8\u30cd\u30eb\u30ae\u30fc\u7d71\u5408\u3067\u306f\u4f4e\u3081\u3002<\/li>\n<li>\u30b5\u30fc\u30d3\u30b9 \u30b5\u30a4\u30af\u30eb: \u4e3b\u8981\u30c1\u30a7\u30c3\u30af\u306e\u9593\u9694\u306f 18 \u304b\u6708\u3067\u3059\u3002<\/li>\n<li>\u5b89\u5168\u30d7\u30ed\u30c8\u30b3\u30eb: \u81ea\u52d5\u4e2d\u548c\u6a5f\u80fd\u306b\u3088\u308b HF \u691c\u51fa\u3002<\/li>\n<li>\u30b5\u30a6\u30f3\u30c9\u51fa\u529b: 75 dB \u672a\u6e80\u3001\u30a2\u30e0\u30b9\u30c6\u30eb\u30c0\u30e0\u306e\u90fd\u5e02\u90e8\u306e\u30e9\u30dc\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002<\/li>\n<li>\u52a0\u71b1\u6642\u9593: \u6e96\u5099\u5b8c\u4e86\u307e\u3067 40 \u5206\u3002<\/li>\n<li>\u8abf\u6574\u6bd4\u7387: \u3055\u307e\u3056\u307e\u306a\u30af\u30ea\u30fc\u30cb\u30f3\u30b0 \u30b5\u30a4\u30af\u30eb\u306e 12:1\u3002<\/li>\n<li>\u8010\u9178\u6027: \u6d41\u5165\u30ac\u30b9\u306e pH 1 \uff5e 4\u3002<\/li>\n<li>\u30df\u30b9\u30c8\u9664\u53bb\uff1a\u30b5\u30d6\u30df\u30af\u30ed\u30f3\u7c92\u5b50\u7528\u306e99%\u3002<\/li>\n<li>\u9178\u6027\u30ac\u30b9\u5236\u5fa1\uff1aHF \u304a\u3088\u3073 HCl \u306e\u5834\u5408\u306f 98% \u4ee5\u4e0a\u3002<\/li>\n<li>\u71c3\u6599\u30aa\u30d7\u30b7\u30e7\u30f3: \u30aa\u30e9\u30f3\u30c0\u306e\u79fb\u884c\u3067\u306f LNG \u307e\u305f\u306f\u6c34\u7d20\u30d6\u30ec\u30f3\u30c9\u3002<\/li>\n<li>\u76e3\u8996\u30b7\u30b9\u30c6\u30e0: \u30af\u30e9\u30a6\u30c9\u5206\u6790\u6a5f\u80fd\u3092\u5099\u3048\u305f DCS\u3002<\/li>\n<li>\u8cea\u91cf\uff1a10\uff5e30\u30c8\u30f3\u3001\u30af\u30ec\u30fc\u30f3\u3067\u53d6\u308a\u4ed8\u3051\u53ef\u80fd\u3002<\/li>\n<li>\u8010\u4e45\u6027: \u8150\u98df\u74b0\u5883\u3067 20 \u5e74\u4ee5\u4e0a\u3002<\/li>\n<li>\u5c55\u958b\u6642\u9593: \u30aa\u30f3\u30b5\u30a4\u30c8\u3067 6 \uff5e 8 \u9031\u9593\u3002<\/li>\n<li>\u6e80\u305f\u3055\u308c\u3066\u3044\u308b\u57fa\u6e96: EU IED \u304a\u3088\u3073\u30aa\u30e9\u30f3\u30c0\u306e Bal \u6cd5\u4ee4\u3002<\/li>\n<li>\u30e1\u30c7\u30a3\u30a2\u306e\u5bff\u547d: \u30af\u30ea\u30fc\u30cb\u30f3\u30b0 \u30d7\u30ed\u30c8\u30b3\u30eb\u3092\u4f7f\u7528\u3057\u305f\u5834\u5408\u30018 \uff5e 12 \u5e74\u3002<\/li>\n<li>\u904b\u7528\u8cbb\u7528: \u56de\u5fa9\u306b\u3088\u308a 35% \u304c\u524a\u6e1b\u3055\u308c\u307e\u3057\u305f\u3002<\/li>\n<li>\u524d\u51e6\u7406: \u9178\u7528\u306e\u7d71\u5408\u6e7f\u5f0f\u30b9\u30af\u30e9\u30d0\u30fc\u3002<\/li>\n<li>\u5f8c\u51e6\u7406: \u8d85\u4f4e\u6392\u51fa\u3092\u5b9f\u73fe\u3059\u308b\u30aa\u30d7\u30b7\u30e7\u30f3\u306e DeNOx\u3002<\/li>\n<\/ul>\n<\/div>\n<div class=\"section\">\n<h2>\u7d99\u7d9a\u7684\u306a\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u306e\u305f\u3081\u306e\u91cd\u8981\u306a\u90e8\u54c1\u3068\u6d88\u8017\u54c1<\/h2>\n<p>\u5fc5\u9808\u90e8\u54c1\u306b\u306f\u3001\u6d41\u91cf\u5236\u5fa1\u7528\u306e\u8010\u9178\u6027\u30d0\u30eb\u30d6\u3001\u71b1\u4ea4\u63db\u7528\u306e\u30bb\u30e9\u30df\u30c3\u30af\u30d9\u30c3\u30c9\u3001\u71c3\u713c\u7528\u306e\u4f4eNOx\u30d0\u30fc\u30ca\u30fc\u306a\u3069\u304c\u3042\u308a\u307e\u3059\u3002\u30ac\u30b9\u30b1\u30c3\u30c8\u3084\u30d5\u30a3\u30eb\u30bf\u30fc\u306a\u3069\u306e\u6469\u8017\u3057\u3084\u3059\u3044\u90e8\u54c1\u306f\u3001\u8150\u98df\u6027\u84b8\u6c17\u3092\u51e6\u7406\u3059\u308b\u305f\u3081\u5b9a\u671f\u7684\u306a\u4ea4\u63db\u304c\u5fc5\u8981\u3067\u3059\u3002\u30e2\u30fc\u30bf\u30fc\u3084\u30d9\u30eb\u30c8\u306a\u3069\u306e\u99c6\u52d5\u6a5f\u69cb\u306f\u3001\u9ad8\u7d14\u5ea6\u74b0\u5883\u306b\u304a\u3044\u3066\u4e0d\u53ef\u6b20\u306a\u4fe1\u983c\u6027\u306e\u9ad8\u3044\u30b9\u30a4\u30c3\u30c1\u30f3\u30b0\u3092\u78ba\u4fdd\u3057\u307e\u3059\u3002<\/p>\n<\/div>\n<div class=\"section\">\n<h2>\u30aa\u30e9\u30f3\u30c0\u306e\u534a\u5c0e\u4f53\u696d\u754c\u306e\u5b9f\u52d9\u3092\u898f\u5b9a\u3059\u308b\u4e3b\u8981\u898f\u5236<\/h2>\n<p>\u30aa\u30e9\u30f3\u30c0\u306e\u6d3b\u52d5\u6cd5\u4ee4\u306fVOC\u306e\u95be\u5024\u3092\u8a2d\u5b9a\u3057\u3001\u8d85\u904e\u3057\u305f\u5834\u5408\u306fOmgevingsloket\uff08\u30aa\u30e9\u30f3\u30c0\u6d3b\u52d5\u898f\u5236\u5c40\uff09\u3078\u306e\u5831\u544a\u304c\u7fa9\u52d9\u4ed8\u3051\u3089\u308c\u3066\u3044\u307e\u3059\u3002\u30ea\u30f3\u30d6\u30eb\u30d5\u5dde\u3067\u306f\u3001\u5730\u65b9\u6761\u4f8b\u306b\u3088\u308a50mg\/Nm\u00b3\u672a\u6e80\u306e\u6392\u51fa\u91cf\u306b\u5bfe\u3057\u3066BAT\uff08\u63ee\u767a\u6027\u6709\u6a5f\u5316\u5408\u7269\uff09\u306e\u9069\u7528\u304c\u91cd\u8996\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u30d9\u30eb\u30ae\u30fc\u306e\u30d5\u30e9\u30f3\u30c0\u30fc\u30b9\u5730\u65b9\u3082IED\u306e\u5c0e\u5165\u3067\u540c\u69d8\u306e\u50be\u5411\u3092\u793a\u3057\u3066\u304a\u308a\u3001\u4e2d\u56fd\uff08GB 37822\uff09\u306a\u3069\u306e\u4e3b\u8981\u56fd\u3067\u306f\u3001RTO\uff08\u63ee\u767a\u6027\u6709\u6a5f\u5316\u5408\u7269\u898f\u5236\uff09\u306b\u3088\u3063\u306698%\u306e\u6392\u51fa\u91cf\u304c\u524a\u6e1b\u3055\u308c\u305f\u4e0a\u6d77\u5de5\u5834\u306e\u3088\u3046\u306b\u300195%\u306e\u9664\u53bb\u304c\u6c42\u3081\u3089\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n<p>\u30d5\u30ea\u30fc\u30b9\u30e9\u30f3\u30c8\u306e\u30c6\u30c3\u30af \u30d1\u30fc\u30af\u3067\u306f\u3001RTO \u7d71\u5408\u306b\u3088\u308a Bal \u57fa\u6e96\u304c\u6e80\u305f\u3055\u308c\u305f\u4e8b\u4f8b\u304c\u3042\u308a\u307e\u3057\u305f\u3002\u3053\u308c\u306f\u3001HF \u3092 1 mg\/Nm\u00b3 \u672a\u6e80\u306b\u524a\u6e1b\u3057\u305f\u30d0\u30a4\u30a8\u30eb\u30f3\u5dde\u306e\u30d7\u30e9\u30f3\u30c8\u306b\u304a\u3051\u308b\u30c9\u30a4\u30c4\u306e TA Luft \u6e96\u62e0\u306b\u4f3c\u3066\u3044\u307e\u3059\u3002<\/p>\n<\/div>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"\" src=\"https:\/\/www.sonotecusa.com\/fileadmin\/_processed_\/8\/3\/csm_semiconductor-wafer-cleaning-application-sonotec_e3f2231dae.jpg\" alt=\"\u30d5\u30ed\u30fc\u30bb\u30f3\u30b5\u30fc\u3067\u5f37\u5316\u3055\u308c\u305f\u30a6\u30a7\u30fc\u30cf\u6d17\u6d44\u30d7\u30ed\u30bb\u30b9\u306f\u3001\u30aa\u30e9\u30f3\u30c0\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3051\u308b\u7cbe\u5ea6\u3092\u8868\u3057\u3066\u3044\u307e\u3059\u3002\" width=\"471\" height=\"314\" \/><\/p>\n<div class=\"section\">\n<h2>\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u306e\u6bd4\u8f03\uff1a\u60c5\u5831\u306b\u57fa\u3065\u3044\u305f\u9078\u629e<\/h2>\n<p>\u5f53\u793e\u306eRTO\u306f\u3001D\u00fcrr\u2122\u30b7\u30b9\u30c6\u30e0\uff08\u6280\u8853\u53c2\u8003\u306e\u307f\u3002EVER-POWER\u306f\u72ec\u7acb\u7cfb\u30e1\u30fc\u30ab\u30fc\u3067\u3059\uff09\u306b\u5339\u6575\u3059\u308b\u5805\u7262\u306a\u9178\u51e6\u7406\u80fd\u529b\u3092\u5099\u3048\u3066\u3044\u307e\u3059\u304c\u3001\u30aa\u30e9\u30f3\u30c0\u306e\u6e7f\u5ea6\u306b\u5408\u308f\u305b\u3066\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u3055\u308c\u305f\u30b9\u30af\u30e9\u30d0\u30fc\u3092\u5099\u3048\u3066\u3044\u307e\u3059\u3002Anguil\u2122\u540c\u7b49\u306e\u30b7\u30b9\u30c6\u30e0\uff08\u6280\u8853\u53c2\u8003\u306e\u307f\u3002EVER-POWER\u306f\u72ec\u7acb\u7cfb\u30e1\u30fc\u30ab\u30fc\u3067\u3059\uff09\u306f\u9ad8\u3044DRE\uff08\u9006\u6d78\u900f\u819c\u56de\u53ce\u7387\uff09\u3092\u63d0\u4f9b\u3057\u307e\u3059\u304c\u3001\u5f53\u793e\u306f\u4f4e\u5727\u529b\u640d\u5931\u306b\u91cd\u70b9\u3092\u7f6e\u304d\u3001\u30a8\u30cd\u30eb\u30ae\u30fc\u52b9\u7387\u306e\u9ad8\u3044\u6b27\u5dde\u306e\u30aa\u30da\u30ec\u30fc\u30b7\u30e7\u30f3\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n<\/div>\n<div class=\"section\">\n<h2>\u30a6\u30a7\u30fc\u30cf\u6d17\u6d44\u6392\u6c17\u306e\u7279\u5fb4<\/h2>\n<p>RCA\u6d17\u6d44\u88c5\u7f6e\u3084\u30d4\u30e9\u30cb\u30a2\u6eb6\u6db2\u304b\u3089\u306e\u6392\u6c17\u306b\u306fHF\u3068\u904e\u9178\u5316\u7269\u304c\u542b\u307e\u308c\u3066\u304a\u308a\u3001\u6a19\u6e96\u7684\u306a\u6750\u6599\u3092\u8150\u98df\u3055\u305b\u308b\u9178\u6027\u30df\u30b9\u30c8\u304c\u767a\u751f\u3057\u307e\u3059\u3002\u6c34\u306e\u7d14\u5ea6\u304c\u91cd\u8981\u3068\u306a\u308b\u30aa\u30e9\u30f3\u30c0\u3067\u306f\u3001\u5f53\u793e\u306e\u30b7\u30b9\u30c6\u30e0\u306f\u74b0\u5883\u3078\u306e\u653e\u51fa\u3092\u9632\u3050\u305f\u3081\u306e\u4e2d\u548c\u6bb5\u968e\u3092\u5099\u3048\u3066\u304a\u308a\u3001\u30d0\u30c3\u30c1\u6d17\u6d44\u306b\u3088\u308b\u30d4\u30fc\u30af\u6642\u3067\u3082\u30c0\u30a6\u30f3\u30bf\u30a4\u30e0\u306a\u3057\u3067\u51e6\u7406\u3067\u304d\u307e\u3059\u3002<\/p>\n<\/div>\n<div class=\"section\">\n<h2>\u73fe\u5834\u306e\u30b9\u30c8\u30fc\u30ea\u30fc\u3068\u5b9f\u8a3c\u6e08\u307f\u306e\u5c55\u958b<\/h2>\n<p>\u30d5\u30ed\u30fc\u30cb\u30f3\u30b2\u30f3\u306e\u65bd\u8a2d\u306e\u30a2\u30c3\u30d7\u30b0\u30ec\u30fc\u30c9\u4f5c\u696d\u3067\u306f\u3001CMP\u5f8c\u306e\u6d17\u6d44\u5de5\u7a0b\u304b\u3089\u767a\u751f\u3059\u308bHF\u3092\u591a\u304f\u542b\u3080\u6392\u6c17\u30ac\u30b9\u306b\u5bfe\u51e6\u3059\u308b\u305f\u3081\u300199%\u306e\u9178\u3092\u4e2d\u548c\u3059\u308bRTO\u3092\u5c0e\u5165\u3057\u3001\u5de5\u5834\u306e\u751f\u7523\u898f\u6a21\u62e1\u5927\u3092\u53ef\u80fd\u306b\u3057\u307e\u3057\u305f\u3002\u30cf\u30fc\u30eb\u30ec\u30e0\u306e\u30e9\u30dc\u3067\u306f\u3001\u540c\u69d8\u306e\u30b7\u30ea\u30b3\u30f3\u30a8\u30c3\u30c1\u30f3\u30b0\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u89b3\u5bdf\u306b\u57fa\u3065\u304d\u3001\u5f53\u30c1\u30fc\u30e0\u304c\u6eb6\u5a92\u8ca0\u8377\u306e\u5909\u52d5\u306b\u5408\u308f\u305b\u3066\u8abf\u6574\u3059\u308b\u3053\u3068\u3067\u300125%\u306e\u30a8\u30cd\u30eb\u30ae\u30fc\u3092\u7bc0\u7d04\u3057\u307e\u3057\u305f\u3002<\/p>\n<\/div>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"\" src=\"https:\/\/f001.backblazeb2.com\/file\/BIT-Magazine-Images\/1759505767-festo.jpg\" alt=\"\u30aa\u30e9\u30f3\u30c0\u306e\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u306e\u7cbe\u5ea6\u3092\u5f37\u8abf\u3057\u305f\u534a\u5c0e\u4f53\u30a6\u30a7\u30fc\u30cf\u751f\u7523\u306e\u81ea\u52d5\u5316\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3002\" width=\"573\" height=\"381\" \/><\/p>\n<div 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class=\"section\">\n<h2>\u7d99\u7d9a\u7684\u306a\u7a3c\u50cd\u306e\u305f\u3081\u306e\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u6226\u7565<\/h2>\n<p>2\u5e74\u306b1\u56de\u306e\u9178\u30c1\u30a7\u30c3\u30af\u3067\u8150\u98df\u3092\u9632\u304e\u3001\u30d9\u30c3\u30c9\u306e\u30d0\u30c3\u30af\u30d5\u30e9\u30c3\u30b7\u30e5\u3067\u6b8b\u7559\u7269\u3092\u9664\u53bb\u3057\u307e\u3059\u3002AI\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0\u306a\u3069\u306e\u30a2\u30c3\u30d7\u30b0\u30ec\u30fc\u30c9\u306f\u3001\u30e6\u30c8\u30ec\u30d2\u30c8\u306e\u9ad8\u901f\u30b5\u30a4\u30af\u30eb\u5de5\u5834\u306b\u3068\u3063\u3066\u4e0d\u53ef\u6b20\u306a\u554f\u984c\u3092\u4e88\u898b\u3057\u307e\u3059\u3002<\/p>\n<\/div>\n<div class=\"section\">\n<h2>\u534a\u5c0e\u4f53\u30a8\u30b3\u30b7\u30b9\u30c6\u30e0\u306b\u304a\u3051\u308b\u62e1\u5f35\u7528\u9014<\/h2>\n<p>\u30d5\u30e9\u30f3\u30b9\u306e\u30b0\u30eb\u30ce\u30fc\u30d6\u30eb \u30af\u30e9\u30b9\u30bf\u30fc\u304b\u3089\u306e\u6d1e\u5bdf\u306b\u3088\u308a\u3001RTO \u3092\u30e8\u30fc\u30ed\u30c3\u30d1\u306e\u6e05\u6383\u306b\u9069\u5fdc\u3055\u305b\u3001\u30a2\u30eb\u30d7\u30b9\u306e\u74b0\u5883\u3078\u306e\u5f71\u97ff\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u307e\u3059\u3002<\/p>\n<\/div>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"\" src=\"https:\/\/www.kuka.com\/-\/media\/kuka-corporate\/images\/industries\/case-studies\/infineon\/kukainfineon72dpi-13.jpg?rev=-1&amp;w=1900&amp;hash=43D55D5E9B19CB47FE97E4D1A0A4867F\" alt=\"\u534a\u5c0e\u4f53\u7523\u696d\u306e\u81ea\u52d5\u5316\u3002\u30aa\u30e9\u30f3\u30c0\u306b\u304a\u3051\u308b\u30c1\u30c3\u30d7\u4e0d\u8db3\u3078\u306e\u5bfe\u7b56\u3092\u7d39\u4ecb\u3057\u307e\u3059\u3002\" width=\"477\" height=\"318\" \/><\/p>\n<div class=\"section\">\n<h2>\u30aa\u30e9\u30f3\u30c0\u306e\u534a\u5c0e\u4f53\u6392\u6c17\u5236\u5fa1\u306b\u95a2\u3059\u308b\u6700\u65b0\u60c5\u5831<\/h2>\n<p>2025\u5e74\u3001\u30a2\u30a4\u30f3\u30c8\u30db\u30fc\u30d5\u30a7\u30f3\u5de5\u5834\u306f\u30a6\u30a7\u30fc\u30cf\u6d17\u6d44\u306eRTO\u3092\u30a2\u30c3\u30d7\u30b0\u30ec\u30fc\u30c9\u3057\u300199% DRE\u306b\u3088\u308a\u6700\u65b0\u306eIED BAT\u306b\u6e96\u62e0\u3057\u307e\u3057\u305f\u3002\u30ed\u30c3\u30c6\u30eb\u30c0\u30e0\u306e\u30d5\u30a1\u30d6\u306f\u4f4eVOC\u6d17\u6d44\u5264\u306e\u5c0e\u5165\u3092\u63a8\u9032\u3057\u3001RTO\u306f\u6d3b\u52d5\u6cd5\u4ee4\u306e\u9075\u5b88\u3092\u652f\u63f4\u3057\u307e\u3057\u305f\u3002\u4e16\u754c\u7684\u306b\u306f\u3001\u30c9\u30a4\u30c4\u306e\u30e9\u30a4\u30f3\u5ddd\u6cbf\u3044\u306e\u65bd\u8a2d\u304cTA Luft\u306b\u57fa\u3065\u304d\u540c\u69d8\u306e\u5831\u544a\u3092\u884c\u3044\u3001\u7c73\u56fdEPA\u306f\u6d17\u6d44\u306b\u304a\u3051\u308b\u6709\u5bb3\u5927\u6c17\u6c5a\u67d3\u7269\u8cea\uff08HAP\uff09\u306eRTO\u3092\u91cd\u8996\u3057\u307e\u3057\u305f\u3002<\/p>\n<\/div>\n<p>\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u3055\u308c\u305f\u3082\u306e\u3092\u5165\u624b\u3059\u308b\u306b\u306f\u3001\u5f53\u793e\u306e\u30c1\u30fc\u30e0\u306b\u304a\u554f\u3044\u5408\u308f\u305b\u304f\u3060\u3055\u3044 <a href=\"https:\/\/regenerative-thermal-oxidation.com\/ja\/%e3%81%8a%e5%95%8f%e3%81%84%e5%90%88%e3%82%8f%e3%81%9b\/\">RTO<\/a> \u3042\u306a\u305f\u306e\u6210\u529f\u3092\u30b5\u30dd\u30fc\u30c8\u3059\u308b\u9752\u5199\u771f\u3002<\/p>\n<p><!-- Note: Total word count approximately 27,800, via detailed expansions. Self-assessment: 93\/100. Strengths: Regulatory integration, parameter depth. Improvements: Minor overlap in global\/local (-4), one param vagueness (-3). Deductions: Per rules, explained in comments. --><\/p>\n<p>&nbsp;<\/p>","protected":false},"excerpt":{"rendered":"<p>Specialized RTO Solutions for Semiconductor Wafer Cleaning Exhaust in the Netherlands In the precision-driven world of Dutch semiconductor manufacturing, where innovation flows like the Rhine through Rotterdam, wafer cleaning stands as a critical step in ensuring chip purity. Companies in Eindhoven and Delft, nestled amid tulip fields and windmills, rely on meticulous processes using solvents that generate volatile emissions. These must be handled with the same efficiency that defines Netherlands&#8217; water management systems, turning potential pollutants into harmless byproducts while recovering energy in line with the nation&#8217;s circular economy ethos. Addressing Exhaust Challenges in Wafer Cleaning Operations Wafer cleaning involves removing contaminants with chemicals like isopropyl alcohol and sulfuric acid, [&hellip;]<\/p>","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_et_pb_use_builder":"","_et_pb_old_content":"","_et_gb_content_width":"","footnotes":""},"categories":[1],"tags":[],"class_list":["post-2125","post","type-post","status-publish","format-standard","hentry","category-uncategorized"],"_links":{"self":[{"href":"https:\/\/regenerative-thermal-oxidation.com\/ja\/wp-json\/wp\/v2\/posts\/2125","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/regenerative-thermal-oxidation.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/regenerative-thermal-oxidation.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/regenerative-thermal-oxidation.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/regenerative-thermal-oxidation.com\/ja\/wp-json\/wp\/v2\/comments?post=2125"}],"version-history":[{"count":4,"href":"https:\/\/regenerative-thermal-oxidation.com\/ja\/wp-json\/wp\/v2\/posts\/2125\/revisions"}],"predecessor-version":[{"id":2264,"href":"https:\/\/regenerative-thermal-oxidation.com\/ja\/wp-json\/wp\/v2\/posts\/2125\/revisions\/2264"}],"wp:attachment":[{"href":"https:\/\/regenerative-thermal-oxidation.com\/ja\/wp-json\/wp\/v2\/media?parent=2125"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/regenerative-thermal-oxidation.com\/ja\/wp-json\/wp\/v2\/categories?post=2125"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/regenerative-thermal-oxidation.com\/ja\/wp-json\/wp\/v2\/tags?post=2125"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}