{"id":1989,"date":"2025-12-19T08:58:19","date_gmt":"2025-12-19T08:58:19","guid":{"rendered":"https:\/\/regenerative-thermal-oxidation.com\/?p=1989"},"modified":"2025-12-19T08:58:19","modified_gmt":"2025-12-19T08:58:19","slug":"%eb%b0%98%eb%8f%84%ec%b2%b4-%eb%b6%84%ec%95%bc%ec%97%90%ec%84%9c-%ed%8f%ac%ed%86%a0%eb%a6%ac%ec%86%8c%ea%b7%b8%eb%9e%98%ed%94%bc-%eb%b0%b0%ea%b8%b0%ea%b0%80%ec%8a%a4-%ec%a0%80%ea%b0%90%ec%9d%80","status":"publish","type":"post","link":"https:\/\/regenerative-thermal-oxidation.com\/ko\/%ec%95%a0%ed%94%8c%eb%a6%ac%ec%bc%80%ec%9d%b4%ec%85%98\/%eb%b0%98%eb%8f%84%ec%b2%b4-%eb%b6%84%ec%95%bc%ec%97%90%ec%84%9c-%ed%8f%ac%ed%86%a0%eb%a6%ac%ec%86%8c%ea%b7%b8%eb%9e%98%ed%94%bc-%eb%b0%b0%ea%b8%b0%ea%b0%80%ec%8a%a4-%ec%a0%80%ea%b0%90%ec%9d%80\/","title":{"rendered":"\ubc18\ub3c4\uccb4 \uad11\uc2dd\uac01 \uacf5\uc815\uc5d0\uc11c \ubc30\uae30\uac00\uc2a4 \uc800\uac10: \uaddc\uc815 \uc900\uc218\uc640 \uc6e8\uc774\ud37c \uc218\uc728\uc758 \uade0\ud615"},"content":{"rendered":"<p>\ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc774 3nm \ubc0f 2nm \ub178\ub4dc\uc758 \"\uc639\uc2a4\ud2b8\ub86c \uc2dc\ub300\"\ub85c \uc9c4\uc785\ud568\uc5d0 \ub530\ub77c \ubaa8\ub4e0 \uc124\ube44 \uc9c0\uc6d0 \uc2dc\uc2a4\ud15c\uc740 \uc804\ub840 \uc5c6\ub294 \ub3c4\uc804\uc5d0 \uc9c1\uba74\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ud504\ub7f0\ud2b8\uc5d4\ub4dc \uc624\ube0c \ub77c\uc778(FEOL)\uc758 \ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c \ubc0f \ud604\uc0c1 \ubaa8\ub4c8\uc740 \ubc18\ub3c4\uccb4 \uc81c\uc870 \uc2dc\uc124\uc5d0\uc11c \uac00\uc7a5 \uc790\ubcf8 \uc9d1\uc57d\uc801\uc774\uace0 \ud658\uacbd\uc801\uc73c\ub85c \ubbfc\uac10\ud55c \uc601\uc5ed\uc785\ub2c8\ub2e4.<\/p>\n<p>\uc774\ucc98\ub7fc \uc704\ud5d8 \ubd80\ub2f4\uc774 \ud070 \ud658\uacbd\uc5d0\uc11c \ud718\ubc1c\uc131 \uc720\uae30 \ud654\ud569\ubb3c(VOC)\uc744 \uad00\ub9ac\ud558\ub294 \uac83\uc740 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4. <strong>PGMEA<\/strong> \uadf8\ub9ac\uace0 <strong>HMDS<\/strong> \uc774\ub294 \ub2e8\uc21c\ud55c \ud658\uacbd\uc801 \uc758\ubb34 \uc0ac\ud56d \uadf8 \uc774\uc0c1\uc785\ub2c8\ub2e4. \uc7ac\uc0dd \uc5f4 \uc0b0\ud654\uae30(RTO) \uc2dc\uc2a4\ud15c\uc774 \uc544\uc8fc \ubbf8\ubbf8\ud55c \uc591\uc774\ub77c\ub3c4 \ubc1c\uc0dd\uc2dc\ud0a8\ub2e4\uba74, <strong>\uc555\ub825 \ubcc0\ub3d9<\/strong> \ub610\ub294 <strong>\uc9c4\ub3d9<\/strong>\uc774\ub294 \uc2a4\uce90\ub108\uc758 \ucd08\uc810 \ud750\ub9bc \ud604\uc0c1\uc744 \uc77c\uc73c\ucf1c \uc6e8\uc774\ud37c \ub85c\ud2b8 \uc804\uccb4\uc758 \uc218\uc728\uc5d0 \uce58\uba85\uc801\uc778 \uc190\uc2e4\uc744 \ucd08\ub798\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uae00\ub85c\ubc8c ESG \ud45c\uc900\uc744 \ucda9\uc871\ud558\uba74\uc11c \"\uac04\uc12d \uc81c\ub85c\" \ubc29\ucd9c\uc744 \uc5b4\ub5bb\uac8c \ub2ec\uc131\ud560 \uc218 \uc788\uc744\uae4c\uc694?<\/p>\n<h2><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-1754\" src=\"https:\/\/regenerative-thermal-oxidation.com\/wp-content\/uploads\/2025\/12\/screenshot_2025-12-10_11-12-25.webp\" alt=\"\uc804\uc790\uc81c\ud488 \uc81c\uc870 \uc0b0\uc5c5\" width=\"497\" height=\"327\" srcset=\"https:\/\/regenerative-thermal-oxidation.com\/wp-content\/uploads\/2025\/12\/screenshot_2025-12-10_11-12-25.webp 497w, https:\/\/regenerative-thermal-oxidation.com\/wp-content\/uploads\/2025\/12\/screenshot_2025-12-10_11-12-25-480x316.webp 480w\" sizes=\"(min-width: 0px) and (max-width: 480px) 480px, (min-width: 481px) 497px, 100vw\" \/><\/h2>\n<h2>\ud575\uc2ec \uacfc\uc81c: \uae30\uc874 RTO\ub4e4\uc774 \ub9ac\uc18c\uadf8\ub798\ud53c\uc5d0\uc11c \uc5b4\ub824\uc6c0\uc744 \uacaa\ub294 \uc774\uc720 (\uc9c8\uc758\uc751\ub2f5)<\/h2>\n<h3>1. RTO \uc720\ub3c4 \"\uc555\ub825 \ud384\uc2a4\"\ub780 \ubb34\uc5c7\uc785\ub2c8\uae4c?<\/h3>\n<p>\uae30\uc874\uc758 2\ud0c0\uc6cc \ub610\ub294 3\ud0c0\uc6cc RTO\ub294 \uc804\ud658\uc5d0 \uacf5\uc555\uc2dd \ud3ec\ud3ab \ubc38\ube0c\ub97c \uc0ac\uc6a9\ud569\ub2c8\ub2e4. \uc804\ud658 \uc21c\uac04 \ubc30\uae30 \ub355\ud2b8\uc5d0\uc11c \uc21c\uac04\uc801\uc778 \uc555\ub825 \uae09\uc99d(\uc77c\ubc18\uc801\uc73c\ub85c \u00b150 Pa ~ \u00b1200 Pa)\uc774 \ubc1c\uc0dd\ud569\ub2c8\ub2e4. \uc815\ubc00 \uc2a4\uce90\ub108\uc758 \uacbd\uc6b0, \uc774 \uc555\ub825 \uae09\uc99d\uc740 \ud2b8\ub799(\ucf54\ud130\/\ud604\uc0c1\uae30) \ub0b4\ubd80\uc758 \ubbf8\uc138 \ud658\uacbd \uade0\ud615\uc744 \uae68\ub728\ub824 \uc778\ud130\ub85d \uacbd\ubcf4\ub97c \ubc1c\uc0dd\uc2dc\ud0a4\uace0 \uac00\ub3d9 \uc911\ub2e8\uc744 \ucd08\ub798\ud569\ub2c8\ub2e4.<\/p>\n<h3>2. \uc65c \ub85c\ud130\ub9ac RTO\uac00 \ubc18\ub3c4\uccb4 \uc81c\uc870 \uc5c5\uccb4\uc5d0\uc11c \uc120\ud638\ub418\ub294 \uc120\ud0dd\uc77c\uae4c\uc694?<\/h3>\n<p><strong>\ub85c\ud130\ub9ac RTO<\/strong> \uc655\ubcf5 \uc6b4\ub3d9\ud558\ub294 \ud3ec\ud3ab \ubc38\ube0c \ub300\uc2e0 \uc5f0\uc18d \ud68c\uc804\uc2dd \ubd84\ubc30 \ubc38\ube0c\ub97c \uc0ac\uc6a9\ud569\ub2c8\ub2e4. \uc774\ub97c \ud1b5\ud574 \ub9e4\uc6b0 \ubd80\ub4dc\ub7fd\uace0 \uc9c0\uc18d\uc801\uc778 \uacf5\uae30 \ud750\ub984\uc744 \uc81c\uacf5\ud558\uc5ec \uc555\ub825 \ub9e5\ub3d9\uc744 \uc81c\uac70\ud569\ub2c8\ub2e4. \ub610\ud55c \ubc30\uae30 \uc2dc\uc2a4\ud15c\uc758 \uc815\uc555 \ubcc0\ub3d9\uc774 \ud5c8\uc6a9 \ubc94\uc704 \ub0b4\uc5d0 \uc720\uc9c0\ub418\ub3c4\ub85d \ud569\ub2c8\ub2e4. <strong>\u00b110 Pa<\/strong>\uc9c4\uc815\ud55c \uac83\uc744 \ub2ec\uc131\ud558\ub2e4 <strong>\uc81c\ub85c\ud384\uc2a4\u2122<\/strong> \uc131\ub2a5.<\/p>\n<h3>3. \ubc18\ub3c4\uccb4 \ubc30\uae30\uac00\uc2a4\uc5d0\uc11c \"2\ucc28 \uc624\uc5fc\"\uc744 \ubc29\uc9c0\ud558\ub294 \ubc29\ubc95\uc740 \ubb34\uc5c7\uc77c\uae4c\uc694?<\/h3>\n<p>\ub9ac\uc18c\uadf8\ub798\ud53c \ubc30\uae30\uac00\uc2a4\uc5d0\ub294 \uc885\uc885 \uc2e4\ub85d\uc0b0(HMDS \ubd84\ud574\ub85c \uc0dd\uc131\ub428)\uc774 \ud3ec\ud568\ub418\uc5b4 \uc788\uc73c\uba70, \uc774\ub294 \ub2e8\ub2e8\ud55c \ub9c9\uc744 \ud615\uc131\ud569\ub2c8\ub2e4. <strong>\uc774\uc0b0\ud654\uaddc\uc18c(<\/strong>$SiO_2$<strong>)<\/strong> RTO \ub0b4\ubd80\uc5d0 \uba3c\uc9c0\uac00 \ubc1c\uc0dd\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc801\uc808\ud55c \uc5ec\uacfc \ubc0f \uc720\ub7c9 \uc81c\uc5b4\uac00 \uc5c6\uc73c\uba74 \uc774 \uba3c\uc9c0\uac00 \uc2dc\uc124 \ub0b4\ubd80\ub85c \ub2e4\uc2dc \uc720\uc785\ub418\uac70\ub098 \uad74\ub69d \ubc16\uc73c\ub85c \ubc30\ucd9c\ub418\uc5b4 \ud074\ub9b0\ub8f8 \ub4f1\uae09\uc744 \uc800\ud558\uc2dc\ud0ac \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<h2><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-1749\" src=\"https:\/\/regenerative-thermal-oxidation.com\/wp-content\/uploads\/2025\/12\/screenshot_2025-12-10_10-19-41.webp\" alt=\"RTO\" width=\"717\" height=\"473\" srcset=\"https:\/\/regenerative-thermal-oxidation.com\/wp-content\/uploads\/2025\/12\/screenshot_2025-12-10_10-19-41.webp 717w, https:\/\/regenerative-thermal-oxidation.com\/wp-content\/uploads\/2025\/12\/screenshot_2025-12-10_10-19-41-480x317.webp 480w\" sizes=\"(min-width: 0px) and (max-width: 480px) 480px, (min-width: 481px) 717px, 100vw\" \/><\/h2>\n<h2>\u00a0\uae30\uc220 \uc0ac\uc591: \uc218\uc728 \uc911\uc2ec\uc758 \ubca4\uce58\ub9c8\ud06c<\/h2>\n<p>FEOL \ubc18\ub3c4\uccb4 \uacf5\uc815\uc758 \uacbd\uc6b0, RTO \uc131\ub2a5 \uc9c0\ud45c\uac00 \"\ud30c\uad34 \ud6a8\uc728\"\uc5d0\uc11c \"\uc548\uc815\uc131 \ub9e4\uac1c\ubcc0\uc218\"\ub85c \ubc14\ub00c\uc5c8\uc2b5\ub2c8\ub2e4.<\/p>\n<h3>\uc8fc\uc694 \uae30\uc220 \ub9e4\uac1c\ubcc0\uc218 \ud45c<\/h3>\n<table>\n<tbody>\n<tr>\n<th>\uae30\uc220\uc801 \uc9c0\ud45c<\/th>\n<th>\ub9e4\uac1c\ubcc0\uc218 \ubc94\uc704<\/th>\n<th>\uc6e8\uc774\ud37c \uc218\uc728\uc5d0 \ubbf8\uce58\ub294 \uc601\ud5a5<\/th>\n<th>\uc0b0\uc5c5 \ucc38\uace0 \uc790\ub8cc<\/th>\n<\/tr>\n<tr>\n<td><strong>\uc555\ub825 \ubcc0\ub3d9<\/strong><\/td>\n<td><strong>\u2264 \u00b110 Pa<\/strong><\/td>\n<td>\ud575\uc2ec \uc9c0\ud45c; \uc2a4\uce90\ub108 \ud658\uacbd \ubd88\uc548\uc815\uc131\uc744 \ubc29\uc9c0\ud569\ub2c8\ub2e4.<\/td>\n<td>\uc900\ud45c\uc900 F15<\/td>\n<\/tr>\n<tr>\n<td><strong>\uc9c4\ub3d9 \ub808\ubca8(VC)<\/strong><\/td>\n<td>VC-A \/ VC-B<\/td>\n<td>\uad11\ud559 \ubd80\ud488\uc758 \uae30\uacc4\uc801 \uacf5\uc9c4\uc744 \ubc29\uc9c0\ud569\ub2c8\ub2e4.<\/td>\n<td>IEST \ud074\ub9b0\ub8f8 \ud45c\uc900<\/td>\n<\/tr>\n<tr>\n<td><strong>VOC \ubd84\ud574(DRE)<\/strong><\/td>\n<td><strong>\u2265 99.5%<\/strong><\/td>\n<td>PGMEA\/\uc6a9\ub9e4 \ubc30\ucd9c\ub7c9\uc774 \uad6d\uc81c \uaddc\uc815\uc744 \ucd08\uacfc\ud558\ub3c4\ub85d \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/td>\n<td>\ud658\uacbd\ubc95<\/td>\n<\/tr>\n<tr>\n<td><strong>\uc5f4\ud6a8\uc728(TER)<\/strong><\/td>\n<td>95% &#8211; 97%<\/td>\n<td>\uae30\uac00\ud339\uc758 \uc6b4\uc601\ube44\uc6a9\uc744 \uc808\uac10\ud558\uace0 ESG \ubaa9\ud45c\uc5d0 \ubd80\ud569\ud569\ub2c8\ub2e4.<\/td>\n<td>\uce5c\ud658\uacbd \uacf5\uc7a5 \ud45c\uc900<\/td>\n<\/tr>\n<tr>\n<td><strong>\uc785\uc790\uc0c1 \ubb3c\uc9c8 \ub18d\ub3c4<\/strong><\/td>\n<td>&lt; 1 mg\/m\u00b3<\/td>\n<td>\ud074\ub9b0\ub8f8\uc5d0\uc11c 2\ucc28 \ubd84\uc9c4 \uc624\uc5fc\uc744 \ubc29\uc9c0\ud569\ub2c8\ub2e4.<\/td>\n<td>ISO \ud074\ub798\uc2a4 1-5<\/td>\n<\/tr>\n<tr>\n<td><strong>\ubc38\ube0c \uc804\ud658 \uc2dc\uac04<\/strong><\/td>\n<td>\uc5f0\uc18d \ud68c\uc804<\/td>\n<td>\uacf5\uae30 \ud750\ub984\uc5d0\uc11c \ubc1c\uc0dd\ud558\ub294 \"\uc218\uaca9 \ud604\uc0c1\"\uc744 \uc81c\uac70\ud569\ub2c8\ub2e4.<\/td>\n<td>\uc720\uccb4\uc5ed\ud559 \uacc4\uc0b0<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>\uae30\uc220 \uc2ec\uce35 \ubd84\uc11d:<\/h3>\n<ul>\n<li><strong>\ud68c\uc804 \ubc38\ube0c \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1<\/strong>\ub85c\ud130\ub9ac RTO\ub294 \uc815\ubc00 \uac00\uacf5\ub41c \ub2e8\uc77c \ubd84\ubc30 \ubc38\ube0c\ub97c \uc0ac\uc6a9\ud569\ub2c8\ub2e4. \uc774\ub97c \ud1b5\ud574 \ud3ec\ud3ab \ubc29\uc2dd \uc7a5\uce58\uc5d0\uc11c \ud0c0\uc6cc \uc804\ud658 \uc2dc \ubc1c\uc0dd\ud558\ub294 \"\ub370\ub4dc \ud0c0\uc784\" \uc9c4\uacf5\uc744 \uc81c\uac70\ud558\uc5ec \uc2a4\uce90\ub108\uc758 \uc815\ubc00\ud55c \uc555\ub825 \uc124\uc815\uac12\uc744 \ubcf4\ud638\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uc800\uc9c4\ub3d9 \uc124\uacc4<\/strong>\ubb34\uac70\uc6b4 \ud3ec\ud3ab \ubc38\ube0c\uac00 \uc2dc\ud2b8\uc5d0 \ubd80\ub52a\ud788\ub294 \uc18c\uc74c\uc774 \uc5c6\uae30 \ub54c\ubb38\uc5d0 \uae30\uacc4\uc801 \uc9c4\ub3d9\uc774 \uc0ac\uc2e4\uc0c1 \uc81c\uac70\ub429\ub2c8\ub2e4. \uc774\ub294 \uc9c4\ub3d9\uc5d0 \ubbfc\uac10\ud55c \"\ud074\ub9b0\ub8f8 \ub9ac\uc18c\ubca0\uc774\" \uadfc\ucc98\uc5d0 \uc704\uce58\ud55c \uc7a5\ube44\uc5d0 \ub9e4\uc6b0 \uc911\uc694\ud55c \uc694\uc18c\uc785\ub2c8\ub2e4.<\/li>\n<\/ul>\n<h2>\uc801\uc6a9 \uc2dc\ub098\ub9ac\uc624: \uc7a5\uc810 \ubc0f \ud55c\uacc4\uc810<\/h2>\n<h3>\uc2dc\ub098\ub9ac\uc624 \ubd84\uc11d: \ub9ac\uc18c\uadf8\ub798\ud53c \ubc0f \ud2b8\ub799(\ub300\uc6a9\ub7c9, \uace0\uc548\uc815\uc131)<\/h3>\n<ul>\n<li><strong>\ud615\uc9c8<\/strong>VOC \uad6c\uc131\uc740 \ube44\uad50\uc801 \uc77c\uc815\ud558\uc9c0\ub9cc(\uc8fc\ub85c PGMEA\/\uc6a9\ub9e4), 365\uc77c 24\uc2dc\uac04 \uc911\ub2e8 \uc5c6\uc774 \uac00\ub3d9\ud574\uc57c \ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uc7a5\uc810<\/strong>:\n<ul>\n<li><strong>\uc218\ud655\ub7c9 \ubcf4\ud638<\/strong>\uc81c\ub85c\ud384\uc2a4 \ud2b9\uc131\uc740 \ub9ac\uc18c\uadf8\ub798\ud53c \uacf5\uc815 \uc708\ub3c4\uc6b0\uc758 \uc548\uc815\uc131\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\ub192\uc740 \uc2e0\ub8b0\uc131<\/strong>\ub2e8\uc77c \ubc38\ube0c \uc124\uacc4\ub294 \ubc38\ube0c \uc561\ucd94\uc5d0\uc774\ud130 \ubc0f \uc13c\uc11c\uc640 \uad00\ub828\ub41c \uc218\ubc31 \uac00\uc9c0\uc758 \uc7a0\uc7ac\uc801 \uace0\uc7a5 \uc9c0\uc810\uc744 \uc904\uc785\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\uc81c\ud55c \uc0ac\ud56d<\/strong>:\n<ul>\n<li><strong>\uc2e4\ub9ac\uce74 \uce68\uc804<\/strong>HMDS\ub97c \ucc98\ub9ac\ud558\ub294 \uacbd\uc6b0, \uc138\ub77c\ubbf9 \ub9e4\uccb4\uc5d0 $SiO_2$\uac00 \ucd95\uc801\ub418\ub294 \uac83\uc744 \ubc29\uc9c0\ud558\uae30 \uc704\ud574 \uc815\uae30\uc801\uc778 \"\ubca0\uc774\ud06c\uc544\uc6c3\" \ub610\ub294 \uc720\uc9c0 \uad00\ub9ac \uc8fc\uae30\uac00 \ud544\uc694\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uc790\ubcf8 \ud22c\uc790<\/strong>\uace0\uc131\ub2a5 \ud68c\uc804 \ubc38\ube0c\ub294 \uc815\ubc00 \uac00\uacf5\uc774 \ud544\uc694\ud558\ubbc0\ub85c \uc77c\ubc18\uc801\uc778 \ud68c\uc804\uc2dd \uc790\ub3d9 \ubc38\ube0c(RTO)\uc5d0 \ube44\ud574 \ucd08\uae30 \ube44\uc6a9\uc774 \ub354 \ub192\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<h2>\ud575\uc2ec \uad6c\uc131 \uc694\uc18c \ubc0f \uc2dc\uc2a4\ud15c \uad8c\uc7a5 \uc0ac\ud56d<\/h2>\n<ol>\n<li><strong>\uace0\uc815\ubc00 \ud68c\uc804 \ubc38\ube0c<\/strong>\ud2b9\uc218 \ud569\uae08\uc73c\ub85c \uc81c\uc791\ub418\uc5c8\uc73c\uba70, \uace0\uae09 \ubc00\ubd09 \uae30\uc220\uc744 \uc801\uc6a9\ud558\uc5ec \ub204\ucd9c \ubc29\uc9c0 \ubc0f \uae34 \uc218\uba85\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\ub2e4\ub2e8\uacc4 \uc0ac\uc804 \uc5ec\uacfc(HEPA)<\/strong>FEOL \uacf5\uc815\uc758 \uacbd\uc6b0, \uc138\ub77c\ubbf9 \ub9e4\uccb4\uac00 \uc608\uc0c1\uce58 \ubabb\ud55c \uc2e4\ub85d\uc0b0 \ucf54\ud305\uc5d0 \ub178\ucd9c\ub418\ub294 \uac83\uc744 \ubc29\uc9c0\ud558\uae30 \uc704\ud574 \ubc30\uae30\uac00\uc2a4\ub294 RTO\uc5d0 \ub4e4\uc5b4\uac00\uae30 \uc804\uc5d0 \uc5c4\uaca9\ud558\uac8c \uc5ec\uacfc\ub418\uc5b4\uc57c \ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uc774\uc911 \uc778\ubc84\ud130 \uc774\uc911\ud654(VFD)<\/strong>\ub9c8\uc2a4\ud130\/\uc2ac\ub808\uc774\ube0c VFD \uad6c\uc131\uc740 \ubaa8\ub4c8 \uc624\ub958 \ubc1c\uc0dd \uc2dc \ubc00\ub9ac\ucd08 \ub2e8\uc704\uc758 \uc804\ud658\uc744 \uac00\ub2a5\ud558\uac8c \ud558\uc5ec \ubc30\uae30 \uc2dc\uc2a4\ud15c\uc758 \uac00\ub3d9 \uc911\ub2e8 \uc2dc\uac04\uc744 \ucd5c\uc18c\ud654\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>2\ucc28 \uc5f4 \ud68c\uc218<\/strong>\uc5f0\uc18c\uc5f4\uc744 \ud68c\uc218\ud558\uc5ec \ud074\ub9b0\ub8f8\uc758 \uc81c\uc2b5 \ub610\ub294 \uc7ac\uac00\uc5f4 \uc2dc\uc2a4\ud15c\uc5d0 \ud65c\uc6a9\ud568\uc73c\ub85c\uc368 \uc5d0\ub108\uc9c0 \uc21c\ud658\uc744 \uc644\uc131\ud569\ub2c8\ub2e4.<\/li>\n<\/ol>\n<h2>\u00a0\uc8fc\uc694 RTO \ube0c\ub79c\ub4dc \ube44\uad50 (\ubc18\ub3c4\uccb4 \uad00\uc810)<\/h2>\n<table>\n<tbody>\n<tr>\n<th>\uc0c1\ud45c<\/th>\n<th>\ucf54\uc5b4 \uadfc\ub825<\/th>\n<th>\uc555\ub825 \uc81c\uc5b4<\/th>\n<th>\uacb0\uc815 \ub17c\ub9ac<\/th>\n<\/tr>\n<tr>\n<td><strong>\ub4a4\ub974(\uc5d0\ucf54\ud4e8\uc5b4)<\/strong><\/td>\n<td>\ub85c\ud130\ub9ac RTO \ubd84\uc57c\uc758 \uc120\uad6c\uc790\ub85c\uc11c TSMC, Intel \ub4f1 1\ub4f1\uae09 \ubc18\ub3c4\uccb4 \uc81c\uc870\uc5c5\uccb4\uc5d0 \ub300\uaddc\ubaa8 \uc124\uce58 \uae30\ubc18\uc744 \ubcf4\uc720\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/td>\n<td>\uadf9\ud55c\uac12(\u00b15 Pa)<\/td>\n<td>\uc138\uacc4\uc801\uc778 \"\uace8\ub4dc \uc2a4\ud0e0\ub2e4\ub4dc\"\ub97c \ucd94\uad6c\ud558\ub294 \uace0\uc608\uc0b0 12\uc778\uce58 \uc2a4\ud53c\ucee4 \uc81c\uc791\uc790\uc5d0\uac8c \uac00\uc7a5 \uc801\ud569\ud569\ub2c8\ub2e4.<\/td>\n<\/tr>\n<tr>\n<td><strong>\uc5d0\ubc84\ud30c\uc6cc(\uc720\ub974\uc13c\ud2b8)<\/strong><\/td>\n<td><strong>\uc81c\ub85c\ud384\uc2a4\u2122 \ud2b9\ud5c8 \uae30\uc220<\/strong>PGMEA \uae09\uc99d\uc5d0 \ub300\ud55c \uc2e0\uc18d\ud55c \ub300\uc751.<\/td>\n<td>\uc6b0\uc218\ud568(\u00b110 Pa)<\/td>\n<td>~\uc5d0 \uac00\uc7a5 \uc801\ud569\ud568 <strong>\ube44\uc6a9 \ub300\ube44 \uc131\ub2a5<\/strong> \uadf8\ub9ac\uace0 \ud604\uc9c0\ud654\ub41c \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \uc9c0\uc6d0.<\/td>\n<\/tr>\n<tr>\n<td><strong>\ub2e4\uc774\ud0a4\uc0e4<\/strong><\/td>\n<td>\uacf5\uae30 \ud750\ub984 \uc2dc\ubbac\ub808\uc774\uc158 \uc804\ubb38\uac00; \uc77c\ubcf8 \uc7a5\ube44 \uccb4\uc778\uc5d0\uc11c \uc9c0\ubc30\uc801\uc778 \uc704\uce58\ub97c \ucc28\uc9c0\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/td>\n<td>\ud6cc\ub96d\ud55c<\/td>\n<td>\uc77c\ubcf8\uc0b0 \uc11d\ud310 \uc778\uc1c4 \ub77c\uc778\uacfc\uc758 \uc644\ubcbd\ud55c \ud1b5\ud569\uc5d0 \uc774\uc0c1\uc801\uc785\ub2c8\ub2e4.<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h2>\u00a0\uae00\ub85c\ubc8c \uaddc\uc815 \uc900\uc218\uc640 \uc218\uc775 \uad00\ub9ac\uc758 \ud1b5\ud569<\/h2>\n<p>\uae00\ub85c\ubc8c \uc2dc\uc7a5\uc73c\ub85c \ud655\uc7a5\ud558\ub294 \ubc18\ub3c4\uccb4 \uae30\uc5c5\ub4e4\uc740 \uac00\uc7a5 \uc5c4\uaca9\ud55c \ud658\uacbd \uae30\uc900\uacfc \uac00\uc7a5 \uae4c\ub2e4\ub85c\uc6b4 \uc218\uc728 \ubaa9\ud45c\ub97c \ubaa8\ub450 \ucda9\uc871\ud574\uc57c \ud569\ub2c8\ub2e4.<\/p>\n<ol>\n<li><strong>\uaddc\uc81c \uccb4\uacc4<\/strong>:\n<ul>\n<li><strong>\ub300\ub9cc\/\uc911\uad6d \ubcf8\ud1a0<\/strong>\ubc18\ub3c4\uccb4 \uad00\ub828 \uc5c4\uaca9\ud55c \ud45c\uc900\uc774 \uc801\uc6a9\ub418\uba70, \uc885\uc885 95% \uc774\uc0c1\uc758 DRE(1\ub4f1\uae09 \uc81c\uc870 \uc2dc\uc124\uc740 \uc790\uccb4\uc801\uc73c\ub85c 99.5% \uc774\uc0c1\uc73c\ub85c \uaddc\uc81c\ud568)\ub97c \uc694\uad6c\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\ubbf8\uad6d\/EU<\/strong>NESHAP\uc740 \uc804\uc790 \uc0b0\uc5c5 \ubd84\uc57c\uc758 \ud45c\uc900\uc785\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>ESG \ubc0f \ud68c\ubcf5\ub825<\/strong>\uace0\ud6a8\uc728 \ub85c\ud130\ub9ac RTO\uc5d0 \ud22c\uc790\ud558\ub294 \uac83\uc740 \uae30\uc5c5\uc758 ESG \uc810\uc218 \ud5a5\uc0c1\uc5d0 \uae30\uc5ec\ud558\ub294 \ub3d9\uc2dc\uc5d0 \ube44\uc6a9\uc774 \ub9ce\uc774 \ub4dc\ub294 \uc0dd\uc0b0 \ub77c\uc778 \uc911\ub2e8\uc744 \ubc29\uc9c0\ud558\ub294 \"\uc2dc\uc124 \ubcf5\uc6d0\ub825\" \uc870\uce58 \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4.<\/li>\n<\/ol>\n<h2>\u00a0\ud604\uc7a5 \uacbd\ud5d8 \ubc0f \uc0ac\ub840 \uc5f0\uad6c<\/h2>\n<h3>\uc804\ubb38\uac00 \uc758\uacac: RTO\uac00 \"\uc9c0\uc9c4 \ubc1c\uc0dd\uc6d0\"\uc774 \ub418\uc9c0 \uc54a\ub3c4\ub85d \ud558\uc2ed\uc2dc\uc624<\/h3>\n<p>\ucd5c\uadfc \uc9c4\ud589\ub41c \ucca8\ub2e8 \ub85c\uc9c1 \uce69 \ud504\ub85c\uc81d\ud2b8\uc5d0\uc11c \uace0\uac1d\uc740 \ucc98\uc74c\uc5d0 \ud45c\uc900 \ud3ec\ud3ab \ubc38\ube0c RTO\ub97c \uc0ac\uc6a9\ud558\ub824\uace0 \uc2dc\ub3c4\ud588\uc2b5\ub2c8\ub2e4.<\/p>\n<ul>\n<li><strong>\ubb38\uc81c\uc810<\/strong>RTO\uac00 \ubc38\ube0c\ub97c \uc804\ud658\ud560 \ub54c\ub9c8\ub2e4 \ub9ac\uc18c\ubca0\uc774\uc758 \ub9c8\uc774\ud06c\ub85c \uc555\ub825 \uac8c\uc774\uc9c0\uac00 \uc2ec\ud558\uac8c \uc694\ub3d9\uccd0 \uc2a4\uce90\ub108\uac00 \uc791\ub3d9\uc744 \uba48\ucd94\uace0 \uc548\uc804 \ubaa8\ub4dc\ub85c \uc804\ud658\ub418\uc5c8\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\ud574\uacb0\ucc45<\/strong>: \uc6b0\ub9ac\ub294 \ud574\ub2f9 \uc7a5\uce58\ub97c \ub2e4\ub978 \uc7a5\uce58\ub85c \uad50\uccb4\ud588\uc2b5\ub2c8\ub2e4. <strong>\uc5d0\ubc84\ud30c\uc6cc \ub85c\ud130\ub9ac RTO<\/strong> \ub610\ud55c \ud32c \uc2a4\ud0a4\ub4dc\uc5d0 \ub2a5\ub3d9\ud615 \uc9c4\ub3d9 \uac10\uc1e0 \uc7a5\uce58\ub97c \uad6c\ud604\ud588\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\uacb0\uacfc<\/strong>\uc555\ub825 \ud384\uc2a4\uac00 \uc644\uc804\ud788 \uc81c\uac70\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \"\ucd08\uc810 \ubd88\ub7c9\"\uc73c\ub85c \uc778\ud55c \ubd88\ub7c9\ub960\uc774 1.5% \uac10\uc18c\ud558\uc5ec \uc5f0\uac04 \uc218\ubc31\ub9cc \ub2ec\ub7ec\uc758 \uacbd\uc81c\uc801 \uc190\uc2e4\uc744 \ub9cc\ud68c\ud560 \uc218 \uc788\uc5c8\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<h2>\ubbf8\ub798 \ub3d9\ud5a5: \uc2a4\ub9c8\ud2b8 \ud339\uc5d0\uc11c\uc758 VOC \uad00\ub9ac<\/h2>\n<ul>\n<li><strong>\ub3d9\uc801 \uacf5\uae30 \ud750\ub984 \uade0\ud615 \uc870\uc808<\/strong>\ubbf8\ub798\uc758 RTO\ub294 \uc2a4\uce90\ub108\uc640 \uc9c1\uc811 \ud1b5\uc2e0\ud558\uc5ec \ubc30\uae30 \uc218\uc694\ub97c \uc608\uce21\ud558\uace0 \ud32c \uc18d\ub3c4\ub97c \uc2e4\uc2dc\uac04\uc73c\ub85c \uc870\uc815\ud558\uc5ec \uc77c\uc815\ud55c \uc555\ub825\uc744 \uc720\uc9c0\ud560 \uac83\uc785\ub2c8\ub2e4.<\/li>\n<li><strong>\uc804 \uc0dd\uc560\uc8fc\uae30 \ubc30\ucd9c\ub7c9 \ubaa8\ub2c8\ud130\ub9c1<\/strong>\ud1b5\ud569 \uc628\ub77c\uc778 \uc9c8\ub7c9 \ubd84\uc11d\uae30\ub294 PGMEA \uc0b0\ud654\ub97c \uc2e4\uc2dc\uac04\uc73c\ub85c \ubaa8\ub2c8\ud130\ub9c1\ud558\uc5ec \uc9c4\uc815\ud55c \"\ud0c4\uc18c \uc911\ub9bd\" \uc6b4\uc601 \ud22c\uba85\uc131\uc744 \ud655\ubcf4\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<p><strong>\uacb0\ub860<\/strong>\ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0\uc11c \ud658\uacbd \uc7a5\ube44\ub294 \ub354 \uc774\uc0c1 \"\ubc30\uae30\uac00\uc2a4\uc5d0 \ub367\ubd99\uc774\ub294 \uc7a5\uce58\"\uac00 \uc544\ub2c8\ub77c \uc0dd\uc0b0\ub7c9 \uc99d\ub300 \uc0dd\ud0dc\uacc4\uc5d0\uc11c \ub9e4\uc6b0 \uc911\uc694\ud55c \uc5f0\uacb0 \uace0\ub9ac\uc785\ub2c8\ub2e4. \ub85c\ud130\ub9ac(Rotary) <a href=\"https:\/\/regenerative-thermal-oxidation.com\/ko\/\">RTO<\/a>\"\uc548\uc815\uc131 \uc6b0\uc120\"\uc5d0 \uc911\uc810\uc744 \ub454 \uc774 \uc804\ub7b5\uc740 \uc575\uc2a4\ud2b8\ub86c \uc2dc\ub300\uc5d0 \ud65c\ub3d9\ud558\ub294 \ud339 \uae30\uc5c5\ub4e4\uc5d0\uac8c \uce5c\ud658\uacbd\uc801\uc778 \uae38\uc7a1\uc774\uac00 \ub418\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>","protected":false},"excerpt":{"rendered":"<p>As the semiconductor industry enters the &#8220;Angstrom Era&#8221; of 3nm and 2nm nodes, every facility support system is facing unprecedented challenges. The photolithography and development modules in the Front-End of Line (FEOL) represent the most capital-intensive and environmentally sensitive areas of the fab. In this high-stakes environment, managing Volatile Organic Compounds (VOCs) like PGMEA and [&hellip;]<\/p>","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_et_pb_use_builder":"","_et_pb_old_content":"","_et_gb_content_width":"","footnotes":""},"categories":[1],"tags":[],"class_list":["post-1989","post","type-post","status-publish","format-standard","hentry","category-uncategorized"],"_links":{"self":[{"href":"https:\/\/regenerative-thermal-oxidation.com\/ko\/wp-json\/wp\/v2\/posts\/1989","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/regenerative-thermal-oxidation.com\/ko\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/regenerative-thermal-oxidation.com\/ko\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/regenerative-thermal-oxidation.com\/ko\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/regenerative-thermal-oxidation.com\/ko\/wp-json\/wp\/v2\/comments?post=1989"}],"version-history":[{"count":1,"href":"https:\/\/regenerative-thermal-oxidation.com\/ko\/wp-json\/wp\/v2\/posts\/1989\/revisions"}],"predecessor-version":[{"id":1990,"href":"https:\/\/regenerative-thermal-oxidation.com\/ko\/wp-json\/wp\/v2\/posts\/1989\/revisions\/1990"}],"wp:attachment":[{"href":"https:\/\/regenerative-thermal-oxidation.com\/ko\/wp-json\/wp\/v2\/media?parent=1989"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/regenerative-thermal-oxidation.com\/ko\/wp-json\/wp\/v2\/categories?post=1989"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/regenerative-thermal-oxidation.com\/ko\/wp-json\/wp\/v2\/tags?post=1989"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}