{"id":2011,"date":"2025-12-22T08:58:14","date_gmt":"2025-12-22T08:58:14","guid":{"rendered":"https:\/\/regenerative-thermal-oxidation.com\/?p=2011"},"modified":"2025-12-23T03:24:00","modified_gmt":"2025-12-23T03:24:00","slug":"%ec%b5%9c%ec%b2%a8%eb%8b%a8-rto-%ea%b8%b0%ec%88%a0%ec%9d%84-%ed%99%9c%ec%9a%a9%ed%95%9c-%eb%84%a4%eb%8d%9c%eb%9e%80%eb%93%9c-%eb%b0%98%eb%8f%84%ec%b2%b4-%eb%a6%ac%ec%86%8c%ea%b7%b8%eb%9e%98%ed%94%bc","status":"publish","type":"post","link":"https:\/\/regenerative-thermal-oxidation.com\/ko\/%ec%95%a0%ed%94%8c%eb%a6%ac%ec%bc%80%ec%9d%b4%ec%85%98\/%ec%b5%9c%ec%b2%a8%eb%8b%a8-rto-%ea%b8%b0%ec%88%a0%ec%9d%84-%ed%99%9c%ec%9a%a9%ed%95%9c-%eb%84%a4%eb%8d%9c%eb%9e%80%eb%93%9c-%eb%b0%98%eb%8f%84%ec%b2%b4-%eb%a6%ac%ec%86%8c%ea%b7%b8%eb%9e%98%ed%94%bc\/","title":{"rendered":"\ucd5c\ucca8\ub2e8 RTO \uae30\uc220\uc744 \ud65c\uc6a9\ud558\uc5ec \ub124\ub35c\ub780\ub4dc \ubc18\ub3c4\uccb4 \ub9ac\uc18c\uadf8\ub798\ud53c \uacf5\uc815\uc758 \ud3d0\uac00\uc2a4 \ucc98\ub9ac \ucd5c\uc801\ud654"},"content":{"rendered":"

\uc720\ub7fd \u200b\u200b\ud601\uc2e0\uc758 \uc911\uc2ec\uc9c0\uc778 \ub124\ub35c\ub780\ub4dc\ub294 \uadf9\uc790\uc678\uc120 \ub9ac\uc18c\uadf8\ub798\ud53c \uc2dc\uc2a4\ud15c\uc744 \uac1c\ucc99\ud558\ub294 ASML\uacfc \uac19\uc740 \uae30\uc5c5\ub4e4\uc744 \uc911\uc2ec\uc73c\ub85c \ubc18\ub3c4\uccb4 \uae30\uc220 \ubd84\uc57c\uc5d0\uc11c \uc138\uacc4\uc801\uc778 \uc120\ub450 \uc8fc\uc790\ub85c \uc790\ub9ac\ub9e4\uae40\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc6e8\uc774\ud37c \ud328\ud130\ub2dd\uacfc \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8 \ub3c4\ud3ec\uc5d0 \uc911\uc810\uc744 \ub454 \uc774 \uc815\ubc00 \uc0b0\uc5c5\uc740 \ud074\ub9b0\ub8f8\uc758 \uccad\uacb0 \uc720\uc9c0\uc640 \ud658\uacbd\uc801 \ucc45\uc784 \uc774\ud589\uc744 \uc704\ud574 \uc2e0\ub8b0\ud560 \uc218 \uc788\ub294 \uc800\uac10 \uc7a5\uce58\uac00 \ud544\uc694\ud55c \ud2b9\uc815 \ud3d0\uac00\uc2a4\ub97c \ubc1c\uc0dd\uc2dc\ud0b5\ub2c8\ub2e4. \uc7ac\uc0dd \uc5f4\uc0b0\ud654\uae30(RTO)\ub294 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8 \ucf54\ud305\uc5d0 \uc0ac\uc6a9\ub418\ub294 \ud504\ub85c\ud544\ub80c \uae00\ub9ac\ucf5c \ubaa8\ub178\uba54\ud2f8 \uc5d0\ud14c\ub974 \uc544\uc138\ud14c\uc774\ud2b8\uc640 \uac19\uc740 \uc6a9\ub9e4\uc5d0\uc11c \ubc1c\uc0dd\ud558\ub294 \ud718\ubc1c\uc131 \uc720\uae30 \ud654\ud569\ubb3c\uc744 \ucc98\ub9ac\ud558\ub294 \ub370 \ud544\uc218\uc801\uc778 \uc7a5\ube44\uc785\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc2dc\uc2a4\ud15c\uc740 \uc624\uc5fc \ubb3c\uc9c8\uc744 \ud6a8\uacfc\uc801\uc73c\ub85c \uc81c\uac70\ud560 \ubfd0\ub9cc \uc544\ub2c8\ub77c \uc5f4\uc744 \ud68c\uc218\ud558\uc5ec ASML \uc2dc\uc124\uc774 \ubc00\uc9d1\ud574 \uc788\ub294 \ub178\ub974\ud2b8 \ube0c\ub77c\ubc18\ud2b8\uc640 \uac19\uc740 \uc5d0\ub108\uc9c0 \ud6a8\uc728\uc774 \ub192\uc740 \uc9c0\uc5ed\uc5d0\uc11c \uc6b4\uc601 \ube44\uc6a9\uc744 \ucd5c\uc18c\ud654\ud569\ub2c8\ub2e4.<\/p>\n

\ub9ac\uc18c\uadf8\ub798\ud53c \uacf5\uc815\uc740 \uc6e8\uc774\ud37c\uc5d0 \uac10\uad11\uc131 \ubb3c\uc9c8\uc744 \ucf54\ud305\ud558\uace0, \ud328\ud134\ud654\ub41c \ube5b\uc5d0 \ub178\ucd9c\uc2dc\ud0a8 \ud6c4, \uc774\ubbf8\uc9c0\ub97c \ud604\uc0c1\ud558\ub294 \uacfc\uc815\uc744 \ud3ec\ud568\ud569\ub2c8\ub2e4. \uc774 \uacfc\uc815\uc5d0\uc11c \uc720\uae30 \uc6a9\ub9e4\uc758 \uc99d\uae30\uac00 \uc99d\ubc1c\ud558\uba74\uc11c \ub18d\ub3c4\ub294 \ub0ae\uc9c0\ub9cc \ubc30\ucd9c\ub7c9\uc740 \ub9ce\uc740 \ubc30\uae30\uac00\uc2a4\uac00 \ubc1c\uc0dd\ud569\ub2c8\ub2e4. \uc9c0\uc18d\uac00\ub2a5\uc131\uc774 \uae30\uc5c5 \ubb38\ud654\uc5d0 \uae4a\uc774 \ubfcc\ub9ac\ub0b4\ub9b0 \ub124\ub35c\ub780\ub4dc \ubc18\ub3c4\uccb4 \uc81c\uc870 \uc2dc\uc124(fab)\uc5d0\uc11c\ub294 \uc5f0\uad6c \uac1c\ubc1c \uae30\uad00(RTO)\uc774 \uc6d0\ud65c\ud558\uac8c \ud1b5\ud569\ub418\uc5b4 \uc720\ub7fd \uadf8\ub9b0\ub51c\uacfc \uac19\uc740 \ud504\ub808\uc784\uc6cc\ud06c\uc5d0 \ub530\ub77c \uc0b0\uc5c5 \ubc30\ucd9c\ub7c9\uc744 \uc904\uc774\ub824\ub294 \uad6d\uac00\uc758 \ub178\ub825\uc744 \uc9c0\uc6d0\ud569\ub2c8\ub2e4. \uc778\uadfc \ubca8\uae30\uc5d0 \ud50c\ub791\ub4dc\ub974 \uc9c0\uc5ed\uc5d0\uc11c\ub3c4 \uc720\uc0ac\ud55c \uc2dc\uc2a4\ud15c\uc774 imec\uc758 \uc5f0\uad6c \uc13c\ud130\ub97c \uc9c0\uc6d0\ud558\uace0 \uc788\uc73c\uba70, \ub3c5\uc77c \uc791\uc13c \uc9c0\uc5ed\uc758 \ubc18\ub3c4\uccb4 \uc81c\uc870 \uc2dc\uc124\ub4e4\uc740 \uad6d\uacbd\uc744 \ucd08\uc6d4\ud55c \ubc30\ucd9c \uc800\uac10 \uae30\uc220 \uc804\ubb38 \uc9c0\uc2dd\uc758 \ud61c\ud0dd\uc744 \ubc1b\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\"\ud074\ub9b0\ub8f8<\/p>\n

\uc601\uc5ed\ubcc4 \ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c\uc758 \ud2b9\uc131<\/h2>\n

\uc720\ub7fd \u200b\u200b\uc678\uc5d0\ub3c4 TSMC\uc758 \ub300\uaddc\ubaa8 \uc0dd\uc0b0 \ub77c\uc778\uc744 \ubcf4\uc720\ud55c \ub300\ub9cc\uacfc \uac19\uc740 \uc8fc\uc694 \ubc18\ub3c4\uccb4 \uad6d\uac00\ub4e4\uc740 \uc5c4\uaca9\ud55c \ub300\uae30\uc9c8 \uaddc\uc815(VOC \ub18d\ub3c4 20mg\/m\u00b3 \ubbf8\ub9cc)\uc744 \uc900\uc218\ud558\uae30 \uc704\ud574 \ub9ac\uc18c\uadf8\ub798\ud53c \ubc30\uae30\uac00\uc2a4 \uad00\ub9ac\uc5d0 RTO(Return to Overhaul)\ub97c \ud65c\uc6a9\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ud55c\uad6d\uc758 \uc0bc\uc131 \ud654\uc131 \uacf5\uc7a5\uc740 \uc720\uc0ac\ud55c \uac00\uc2a4\ub97c \ucc98\ub9ac\ud558\uae30 \uc704\ud574 \ucca8\ub2e8 RTO \uc124\uacc4\ub97c \ub3c4\uc785\ud558\uc5ec \ub192\uc740 \uc5d0\ub108\uc9c0 \uc18c\ube44\ub97c \uc0c1\uc1c4\ud558\uae30 \uc704\ud574 95% \uc774\uc0c1\uc758 \uc5f4 \ud68c\uc218\uc728\uc744 \uac15\uc870\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ubbf8\uad6d\uc5d0\uc11c\ub294 \uc778\ud154\uc758 \uc624\ub9ac\uac74 \uacf5\uc7a5\uc774 \ub9ac\uc18c\uadf8\ub798\ud53c\uc5d0 \ud2b9\ud654\ub41c RTO\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc720\uae30 HAP(\uc720\uae30 \uc720\ud574 \ub300\uae30 \uc624\uc5fc \ubb3c\uc9c8)\uc5d0 \ub300\ud574 98%\uc758 \uc81c\uac70 \ud6a8\uc728\uc744 \uc694\uad6c\ud558\ub294 EPA(\ubbf8\uad6d \ud658\uacbd\ubcf4\ud638\uccad)\uc758 \uad6d\uac00 \uc720\ud574 \ub300\uae30 \uc624\uc5fc \ubb3c\uc9c8 \ubc30\ucd9c \uae30\uc900\uc744 \ucda9\uc871\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\uc77c\ubcf8 \ub3c4\ucfc4 \uc77c\ub809\ud2b8\ub860\uacfc \uce90\ub17c\uc758 \uad6c\ub9c8\ubaa8\ud1a0\ud604 \uc0ac\uc5c5\uc7a5\uc740 \uc544\uc2dc\uc544 \uc81c\uc870 \ud5c8\ube0c\uc5d0\uc11c \ud754\ud788 \ubcfc \uc218 \uc788\ub294 \uc2b5\ud55c \ud658\uacbd\uc744 \uacac\ub38c\uc57c \ud558\ub294 \ub9ac\uc18c\uadf8\ub798\ud53c \ubd84\uc57c\uc5d0\uc11c RTO(\uace0\uc18d \uc5f4\uc804\ub3c4) \uae30\uc220\uc758 \ud65c\uc6a9\uc744 \ubcf4\uc5ec\uc8fc\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc911\uad6d \uc0c1\ud558\uc774\uc758 SMIC\ub294 \uc6e8\uc774\ud37c \uacf5\uc815 \uac00\uc2a4 \ucc98\ub9ac\ub97c \uc704\ud574 RTO\ub97c \ub3c4\uc785\ud558\uc5ec NMHC \ubc30\ucd9c\ub7c9\uc744 40mg\/m\u00b3\ub85c \uc81c\ud55c\ud558\ub294 GB 37822-2019 \ud45c\uc900\uc744 \uc900\uc218\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc774\uc2a4\ub77c\uc5d8\uc758 \ud0c0\uc6cc \uc138\ubbf8\ucee8\ub355\ud130\ub294 \ubbf8\uadf8\ub2ec \ud558\uc5d0\uba55 \uacf5\uc7a5\uc5d0 RTO\ub97c \ud1b5\ud569\ud558\uc5ec \uac74\uc870\ud55c \uae30\ud6c4\uc5d0 \uc801\ud569\ud55c \uc800\uc720\uc9c0\ubcf4\uc218 \uc124\uacc4\uc5d0 \uc8fc\ub825\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\uc2f1\uac00\ud3ec\ub974\uc758 \uae00\ub85c\ubc8c\ud30c\uc6b4\ub4dc\ub9ac(GlobalFoundries) \uacf5\uc7a5\uc740 \uacf5\uac04\uc774 \uc81c\ud55c\ub41c \ub3c4\uc2ec\ud615 \uacf5\uc7a5\uc5d0 \uc801\ud569\ud55c \uc18c\ud615 RTO(Return to Operate) \uc7a5\uce58\uc5d0 \uc911\uc810\uc744 \ub450\uace0 \uc788\uc73c\uba70, \ub9d0\ub808\uc774\uc2dc\uc544 \ucfe8\ub9bc\uc5d0 \uc704\uce58\ud55c \uc2e4\ud14c\ub77c(Silterra)\ub294 \uad6d\uac00\uc758 \ub179\uc0c9 \uae30\uc220 \uae08\uc735 \uacc4\ud68d(Green Technology Financing Scheme)\uc5d0 \ub530\ub978 \uc778\uc13c\ud2f0\ube0c\ub97c \ubc1b\uc544 \ub9ac\uc18c\uadf8\ub798\ud53c \ud3d0\uae30\ubb3c \ucc98\ub9ac\uc5d0 RTO \uc7a5\uce58\ub97c \ud65c\uc6a9\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc544\uc77c\ub79c\ub4dc\uc758 \uc778\ud154 \ub809\uc2ac\ub9bd \ucea0\ud37c\uc2a4\ub294 EU IED(Infrastructure and Device Evaluation) \uc9c0\uce68\uc744 \uc900\uc218\ud558\ub294 RTO \uae30\uc220\uc758 \ud61c\ud0dd\uc744 \ubc1b\uace0 \uc788\uc73c\uba70, \uc2a4\ucf54\ud2c0\ub79c\ub4dc \uc2e4\ub9ac\ucf58 \uae00\ub80c\uc5d0 \uc788\ub294 \uc2dc\uc124\uacfc \uac19\uc740 \uc778\uadfc \uc601\uad6d \uc2dc\uc124\uacfc \uae30\uc220\uc744 \uacf5\uc720\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\ud540\ub780\ub4dc\uc758 \uc624\uc6b8\ub8e8\uc5d0 \uc788\ub294 \uc2e0\ud765 \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc740 \ubd81\uc720\ub7fd\uc758 \ud658\uacbd \uc815\ucc45\uc744 \ucc38\uace0\ud558\uc5ec \ub9ac\uc18c\uadf8\ub798\ud53c \uacf5\uc815\uc5d0 RTO(\uc6d0\uaca9 \ub370\uc774\ud130 \ucc98\ub9ac) \uc2dc\uc2a4\ud15c\uc744 \ud1b5\ud569\ud558\ub294 \ubc29\uc548\uc744 \ubaa8\uc0c9\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc624\uc2a4\ud2b8\ub9ac\uc544 \ud504\ub818\uc288\ud14c\ud150\uc5d0 \uc704\uce58\ud55c ams-OSRAM\uc740 \uc13c\uc11c \uc6e8\uc774\ud37c \uc0dd\uc0b0\uc5d0 RTO\ub97c \ud65c\uc6a9\ud558\uace0 \uc788\uc73c\uba70, \uc2a4\ud398\uc778 \uce74\ud0c8\ub8e8\ub0d0\uc758 \uc2e0\ud765 \uc0b0\uc5c5 \ud5c8\ube0c\ub294 \uc9c0\uc18d \uac00\ub2a5\ud55c \ub9ac\uc18c\uadf8\ub798\ud53c \uacf5\uc815 \uac1c\uc120\uc744 \uc704\ud574 \ub124\ub35c\ub780\ub4dc\uc758 \ubaa8\ub378\uc744 \ucc38\uace0\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ud3f4\ub780\ub4dc \ubc14\ub974\uc0e4\ubc14\uc758 \uc131\uc7a5\ud558\ub294 \uc804\uc790 \uc0b0\uc5c5 \ubd80\ubb38 \ub610\ud55c EU\uc758 \uce5c\ud658\uacbd \uae30\uc220 \uae30\uae08\uc758 \uc601\ud5a5\uc744 \ubc1b\uc544 RTO\ub97c \ub3c4\uc785\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\uccb4\ucf54 \ub85c\uc988\ub178\ud504 \ud3ec\ub4dc \ub77c\ub4dc\ud638\uc288\ud15c\uc5d0 \uc704\uce58\ud55c ON Semiconductor\ub294 \uc6e8\uc774\ud37c \uc81c\uc870 \uacf5\uc815\uc758 \ubc30\uae30\uac00\uc2a4 \ucc98\ub9ac\uc5d0 RTO\ub97c \uc0ac\uc6a9\ud558\uace0 \uc788\uc73c\uba70, \ud3ec\ub974\ud22c\uac08 \ube4c\ub77c \ub450 \ucf58\ub370\uc5d0 \uc704\uce58\ud55c Nanium\uc740 \ud328\ud0a4\uc9d5\uc5d0 \uc8fc\ub825\ud558\uc9c0\ub9cc \ub9ac\uc18c\uadf8\ub798\ud53c \uac00\uc2a4 \ucc98\ub9ac \uc694\uad6c \uc0ac\ud56d\uc740 \uc720\uc0ac\ud569\ub2c8\ub2e4. \uc2a4\uc704\uc2a4 \uc81c\ub124\ubc14\uc5d0 \uc788\ub294 STMicroelectronics\ub294 \uc815\ubc00\ud55c RTO \uc81c\uc5b4\uc5d0 \uc758\uc874\ud558\uace0 \uc788\uc73c\uba70, \uc2a4\uc6e8\ub374 \ud0a4\uc2a4\ud0c0\uc5d0 \uc788\ub294 Ericsson\uc740 \ud1b5\uc2e0 \uce69 \uc0dd\uc0b0\uc744 \uc704\ud574 RTO\ub97c \uc5f0\uad6c\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\ub374\ub9c8\ud06c \ucf54\ud39c\ud558\uac90\uc758 \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc740 \ub3c5\uc77c\uacfc \ub124\ub35c\ub780\ub4dc\uc758 \uc804\ubb38 \uae30\uc220\uc5d0 \uc778\uc811\ud574 \uc788\ub2e4\ub294 \uc774\uc810\uc744 \ub204\ub9ac\uace0 \uc788\uc73c\uba70, RTO(Rapid Transistor)\ub294 \ub9ac\uc18c\uadf8\ub798\ud53c \uae30\uc220 \ud655\uc7a5\uc5d0 \ub3c4\uc6c0\uc744 \uc8fc\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ub178\ub974\uc6e8\uc774 \ud06c\ub9ac\uc2a4\ud2f0\uc548\uc0b0\ub4dc\uc5d0 \uc704\uce58\ud55c REC Silicon\uc740 \ud3f4\ub9ac\uc2e4\ub9ac\ucf58 \uc804\uad6c\uccb4\ub97c \ucde8\uae09\ud558\uba70, \uad00\ub828 \uac00\uc2a4 \uc0dd\uc0b0\uc5d0 RTO\ub97c \ud65c\uc6a9\ud569\ub2c8\ub2e4. \ub8e9\uc148\ubd80\ub974\ud06c \uc5d0\uc288\uc26c\ub974\uc54c\uc81c\ud2b8\uc5d0 \uc788\ub294 \uc18c\uaddc\ubaa8 \uc5f0\uad6c \uac1c\ubc1c \uc2dc\uc124\uc740 \ubca8\uae30\uc5d0\uc640 \ud504\ub791\uc2a4\uc758 \uaddc\uc81c \ud611\uc57d\uc744 \ud1b5\ud574 RTO\ub97c \ub3c4\uc785\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\ud504\ub791\uc2a4 \ud06c\ub864\uc5d0 \uc704\uce58\ud55c STMicroelectronics\ub294 \uad6d\uac00 VOC \ubc30\ucd9c\ub7c9 \uaddc\uc81c \uae30\uc900\uc778 110mg\/m\u00b3 \ubbf8\ub9cc\uc744 \uc900\uc218\ud558\uba70 \ub9ac\uc18c\uadf8\ub798\ud53c\uc6a9 RTO\ub97c \ud1b5\ud569\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc601\uad6d \uce74\ub514\ud504\uc5d0 \uc788\ub294 Compound Semiconductor Applications Catapult\ub294 \ud658\uacbd\uccad\uc758 \ud5c8\uac00\ub97c \ubc1b\uc544 \ucca8\ub2e8 \uc6e8\uc774\ud37c \uacf5\uc815\uc5d0 RTO\ub97c \uc0ac\uc6a9\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\"\ub124\ub35c\ub780\ub4dc<\/h2>\n

RTO \uae30\uc220 \ub9e4\uac1c\ubcc0\uc218<\/h2>\n

\uc774\ub7ec\ud55c \ub9e5\ub77d\uc5d0\uc11c, \ub2f9\uc0ac\uc758 RTO \uc2dc\uc2a4\ud15c\uc740 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8 \uc2a4\ud540 \ucf54\ud305 \ubc0f \ud604\uc0c1 \ub2e8\uacc4\uc5d0\uc11c \ubc1c\uc0dd\ud558\ub294 \ubc30\uae30\uac00\uc2a4\uc5d0 \ubbf8\ub7c9\uc758 \uc6a9\ub9e4\uac00 \ud3ec\ud568\ub418\uc5b4 \uc788\uace0, \uc774\ub97c \uacf5\uc7a5 \uacf5\uae30 \uc9c8\uc744 \uc800\ud558\uc2dc\ud0a4\uc9c0 \uc54a\uace0 \uc0b0\ud654\uc2dc\ucf1c\uc57c \ud558\ub294 \ud504\ub7f0\ud2b8\uc5d4\ub4dc \ub9ac\uc18c\uadf8\ub798\ud53c\uc758 \uace0\uc720\ud55c \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud558\ub3c4\ub85d \uc124\uacc4\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \uc77c\ubc18\uc801\uc778 \uc2dc\uc2a4\ud15c\uc740 \uc2dc\uac04\ub2f9 10,000~50,000m\u00b3\uc758 \uacf5\uae30\ub97c \ucc98\ub9ac\ud558\uc5ec \uc5d0\ud2f8 \ub77d\ud14c\uc774\ud2b8 \ub610\ub294 \uc2dc\ud074\ub85c\ud39c\ud0c0\ub17c\uacfc \uac19\uc740 VOC\ub97c 99% \uc774\uc0c1 \uc81c\uac70\ud569\ub2c8\ub2e4.<\/p>\n

\uc6e8\uc774\ud37c \ub9ac\uc18c\uadf8\ub798\ud53c \uc2dc\ub098\ub9ac\uc624\uc5d0\uc11c RTO\uc5d0 \ub300\ud55c \uc8fc\uc694 \uae30\uc220 \ub9e4\uac1c\ubcc0\uc218\ub294 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
\ub9e4\uac1c\ubcc0\uc218<\/th>\n\uac12\/\ubc94\uc704<\/th>\n<\/tr>\n
\uc5f4\ud6a8\uc728(TER)<\/td>\n95-98%<\/td>\n<\/tr>\n
VOC \ud30c\uad34 \uc81c\uac70 \ud6a8\uc728(DRE)<\/td>\n>99%<\/td>\n<\/tr>\n
\uc791\ub3d9 \uc628\ub3c4<\/td>\n760-850\u00b0C<\/td>\n<\/tr>\n
\uccb4\ub958 \uc2dc\uac04<\/td>\n0.5~1.0\ucd08<\/td>\n<\/tr>\n
\uacf5\uae30 \ud750\ub984 \uc6a9\ub7c9<\/td>\n5,000-100,000 m\u00b3\/h<\/td>\n<\/tr>\n
\uc555\ub825 \uac15\ud558<\/td>\n100-300 Pa<\/td>\n<\/tr>\n
\uc5f4\ud68c\uc218 \ub9e4\uccb4<\/td>\n\uad6c\uc870\ud654\ub41c \uc138\ub77c\ubbf9 \ubc8c\uc9d1<\/td>\n<\/tr>\n
\ubc38\ube0c \uc804\ud658 \uc8fc\uae30<\/td>\n60-120\ucd08<\/td>\n<\/tr>\n
\ub204\ucd9c\ub960<\/td>\n<0.5%<\/td>\n<\/tr>\n
\ubcf4\uc870 \uc5f0\ub8cc \uc18c\ube44\ub7c9<\/td>\n0-50 Nm\u00b3\/h \ucc9c\uc5f0\uac00\uc2a4 (VOC 2 g\/m\u00b3 \uc774\uc0c1\uc5d0\uc11c \uc790\ub9bd \uac00\ub2a5)<\/td>\n<\/tr>\n
\uc804\ub825 \uc18c\ube44\ub7c9<\/td>\n\ud06c\uae30\uc5d0 \ub530\ub77c 50~200kW<\/td>\n<\/tr>\n
\uac74\ucd95 \uc790\uc7ac<\/td>\n\ubd80\uc2dd \ubc29\uc9c0 \ucf54\ud305 \ucc98\ub9ac\ub41c 304\/316 \uc2a4\ud14c\uc778\ub9ac\uc2a4\uac15<\/td>\n<\/tr>\n
NOx \ubc30\ucd9c\ub7c9<\/td>\n\uc800NOx \ubc84\ub108 \uc0ac\uc6a9 \uc2dc <50 mg\/Nm\u00b3<\/td>\n<\/tr>\n
CO \ubc30\ucd9c\ub7c9<\/td>\n<100 mg\/Nm\u00b3<\/td>\n<\/tr>\n
\ubbf8\uc138\uba3c\uc9c0 \uc81c\uc5b4<\/td>\n\ucd08\ubbf8\uc138 \uc785\uc790\uc6a9 \ud1b5\ud569 \ud504\ub9ac\ud544\ud130<\/td>\n<\/tr>\n
\uc2b5\ub3c4 \ub0b4\uc131<\/td>\n\uc81c\uc2b5 \uae30\ub2a5 \ud3ec\ud568 \ucd5c\ub300 80% RH<\/td>\n<\/tr>\n
\ud134\ub2e4\uc6b4 \ube44\uc728<\/td>\n5:1<\/td>\n<\/tr>\n
\ubc1c\uc790\uad6d<\/td>\n\uc218\uc6a9 \ub2a5\ub825\uc5d0 \ub530\ub77c 10~50m\u00b2<\/td>\n<\/tr>\n
\ubb34\uac8c<\/td>\n5~20\ud1a4<\/td>\n<\/tr>\n
\uc124\uce58 \uc2dc\uac04<\/td>\n4-6\uc8fc<\/td>\n<\/tr>\n
\uc720\uc9c0 \ubcf4\uc218 \uac04\uaca9<\/td>\n\uc5f0\uac04 \uc810\uac80, \ubbf8\ub514\uc5b4 \uad50\uccb4\ub294 5~7\ub144\ub9c8\ub2e4 \uc2e4\uc2dc<\/td>\n<\/tr>\n
\uc548\uc804 \uc778\ud130\ub85d<\/td>\nLEL \ubaa8\ub2c8\ud130\ub9c1, \ud654\uc5fc \ubc29\uc9c0 \uc7a5\uce58, \ube44\uc0c1 \ubc14\uc774\ud328\uc2a4<\/td>\n<\/tr>\n
\uc81c\uc5b4 \uc2dc\uc2a4\ud15c<\/td>\nSCADA \ud1b5\ud569 \uae30\ub2a5\uc774 \uc788\ub294 PLC<\/td>\n<\/tr>\n
\uc18c\uc74c \uc218\uc900<\/td>\n<85 dB(A)<\/td>\n<\/tr>\n
\uc5d0\ub108\uc9c0 \ud68c\uc218 \uc635\uc158<\/td>\n\ub728\uac70\uc6b4 \uacf5\uae30 \ub610\ub294 \uc99d\uae30 \ubc1c\uc0dd<\/td>\n<\/tr>\n
\uaddc\uc815 \uc900\uc218 \uc778\uc99d<\/td>\nCE, ATEX, UL<\/td>\n<\/tr>\n
\ube44\uc6a9 \ubc94\uc704<\/td>\n\uaddc\ubaa8\uc5d0 \ub530\ub77c 50\ub9cc \uc720\ub85c ~ 200\ub9cc \uc720\ub85c<\/td>\n<\/tr>\n
\uc0dd\uba85\uc8fc\uae30<\/td>\n15~20\ub144<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\uc774\ub7ec\ud55c \ub9e4\uac1c\ubcc0\uc218\ub294 RTO\uac00 \uac00\ub3d9 \uc911\uc9c0 \uc2dc\uac04\uc774 \ud070 \uc190\uc2e4\ub85c \uc774\uc5b4\uc9c0\ub294 \ub9ac\uc18c\uadf8\ub798\ud53c \uc6cc\ud06c\ud50c\ub85c\uc6b0\uc5d0 \uc6d0\ud65c\ud558\uac8c \ud1b5\ud569\ub418\ub3c4\ub85d \ubcf4\uc7a5\ud569\ub2c8\ub2e4. \uc608\ub97c \ub4e4\uc5b4, 300mm \uc6e8\uc774\ud37c\ub97c \ucc98\ub9ac\ud558\ub294 \ub124\ub35c\ub780\ub4dc\uc758 \ud55c \uacf5\uc7a5\uc5d0\uc11c\ub294 RTO\uac00 \ubc30\uae30 \uac00\uc2a4\uc5d0\uc11c VOC \uc218\uc900\uc744 1ppm \ubbf8\ub9cc\uc73c\ub85c \uc720\uc9c0\ud558\uc5ec \ucd08\uccad\uc815 \ud658\uacbd\uc5d0\uc11c\uc758 \uc624\uc5fc\uc744 \ubc29\uc9c0\ud569\ub2c8\ub2e4.<\/p>\n

\ud504\ub7f0\ud2b8\uc5d4\ub4dc \ub9ac\uc18c\uadf8\ub798\ud53c \uacf5\uc815\uc740 \ud074\ub9b0\ub8f8 \ubc30\uae30\uac00\uc2a4\uc5d0\uc11c \ubc1c\uc0dd\ud558\ub294 \uadf9\uc800\ub18d\ub3c4 VOC(\uc77c\ubc18\uc801\uc73c\ub85c 0.1~1g\/m\u00b3)\ub97c \ud2b9\uc9d5\uc73c\ub85c \ud558\uba70, NOx\uc640 \uac19\uc740 2\ucc28 \uc624\uc5fc\ubb3c\uc9c8\uc744 \uc0dd\uc131\ud558\uc9c0 \uc54a\uace0 \uace0\ud6a8\uc728 \uc0b0\ud654 \uacf5\uc815\uc744 \uc218\ud589\ud574\uc57c \ud569\ub2c8\ub2e4. \ud5f9\uad7c \ub2e8\uacc4\uc5d0\uc11c \ubc1c\uc0dd\ud558\ub294 \ub192\uc740 \uc2b5\ub3c4\ub85c \uc778\ud574 RTO \ubca0\ub4dc \ub0b4 \uacb0\ub85c \ud604\uc0c1\uc744 \ubc29\uc9c0\ud558\uae30 \uc704\ud574 \uac15\ub825\ud55c \uc81c\uc2b5 \uc2dc\uc2a4\ud15c\uc774 \ud544\uc218\uc801\uc785\ub2c8\ub2e4. \uc6e8\uc774\ud37c \uc815\ub82c\uc744 \ubc29\ud574\ud560 \uc218 \uc788\ub294 \uc555\ub825 \ubcc0\ub3d9\uc744 \ubc29\uc9c0\ud558\uae30 \uc704\ud574\uc11c\ub294 \uc815\ubc00\ud55c \uc555\ub825 \uc81c\uc5b4\uac00 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/p>\n

\"\uc5d4\uc9c0\ub2c8\uc5b4\ub4e4\uc774<\/p>\n

\uae00\ub85c\ubc8c RTO \uc560\ud50c\ub9ac\ucf00\uc774\uc158 \ubc0f \ud2b8\ub80c\ub4dc<\/h2>\n

\ud55c \uc5d4\uc9c0\ub2c8\uc5b4\ub294 \uc790\uccb4\uc801\uc778 \uacf5\uc7a5 \uc124\ube44 \uacbd\ud5d8\uc744 \ubc14\ud0d5\uc73c\ub85c \uc544\uc778\ud2b8\ud638\ubca4\uc758 \ud55c \ud504\ub85c\uc81d\ud2b8\ub97c \ud68c\uc0c1\ud558\uba70, RTO(\uc5f4 \ud68c\uc218 \uc7a5\uce58)\ub97c \ud1b5\ud569\ud558\uc5ec \uc5f0\uac04 VOC \ubc30\ucd9c\ub7c9\uc744 95%\uae4c\uc9c0 \uc904\uc5ec \uc0c8\ub85c\uc6b4 \ud5c8\uac00 \uc5c6\uc774 \uacf5\uc7a5\uc744 \ud655\uc7a5\ud560 \uc218 \uc788\uc5c8\ub2e4\uace0 \ub9d0\ud588\uc2b5\ub2c8\ub2e4. \ub610 \ub2e4\ub978 \uc0ac\ub840\ub85c \ubca8\uae30\uc5d0 \ub8e8\ubca4\uc5d0\uc11c\ub294 \uc2dc\uc2a4\ud15c\uc744 \ud1b5\ud574 \ucda9\ubd84\ud55c \uc5f4\uc744 \ud68c\uc218\ud558\uc5ec \ub09c\ubc29\ube44 30%\ub97c \uc0c1\uc1c4\ud568\uc73c\ub85c\uc368 \ucd94\uc6b4 \uae30\ud6c4\uc5d0\uc11c \uc2e4\uc9c8\uc801\uc778 \uc774\uc810\uc744 \uc785\uc99d\ud588\uc2b5\ub2c8\ub2e4.<\/p>\n

\uc0ac\ub840\ub294 \ub9ce\uc2b5\ub2c8\ub2e4. \ub300\ub9cc\uc758 \uc2e0\ucd94 \uacfc\ud559\ub2e8\uc9c0\uc5d0\uc11c\ub294 RTO(Residual Technology Organization)\uac00 5nm \ub178\ub4dc\uc6a9 \ub9ac\uc18c\uadf8\ub798\ud53c \uac00\uc2a4\ub97c \ucc98\ub9ac\ud558\uc5ec \ubc30\ucd9c\ub7c9\uc744 10mg\/m\u00b3 \ubbf8\ub9cc\uc73c\ub85c \uc904\uc600\uc2b5\ub2c8\ub2e4. \ud55c\uad6d\uc758 \ud3c9\ud0dd\uc5d0 \uc788\ub294 \ud55c \ubc18\ub3c4\uccb4 \uacf5\uc7a5\uc740 \ub9de\ucda4\ud615 \uc800NOx \ubc84\ub108\ub97c \uc0ac\uc6a9\ud558\uc5ec EUV \ub9ac\uc18c\uadf8\ub798\ud53c\uc5d0 RTO\ub97c \ud65c\uc6a9\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ubbf8\uad6d \uc560\ub9ac\uc870\ub098\uc758 \uc5ec\ub7ec \uc0ac\uc5c5\uc7a5\uc5d0\uc11c\ub294 \uc9c0\uc5ed \ub300\uae30\uc9c8 \uaddc\uc815\uc744 \uc900\uc218\ud558\uba70 ArF \uce68\uc218 \ub9ac\uc18c\uadf8\ub798\ud53c\uc5d0 RTO\ub97c \uc0ac\uc6a9\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\uc77c\ubcf8 \ud788\ub85c\uc2dc\ub9c8\uc5d0 \uc788\ub294 \uc2dc\uc124\uc5d0\uc11c\ub294 \ud604\uc0c1 \uacfc\uc815\uc5d0\uc11c \ubc1c\uc0dd\ud558\ub294 \uc0b0\uc131 \uac00\uc2a4\ub97c \uc81c\uac70\ud558\uae30 \uc704\ud574 RTO\uc640 \uc2a4\ud06c\ub7ec\ubc84\ub97c \ud1b5\ud569\ud558\uc5ec \uc0ac\uc6a9\ud569\ub2c8\ub2e4. \uc911\uad6d \ubca0\uc774\uc9d5\uc758 \uacf5\uc7a5\uc5d0\uc11c\ub294 DUV \ub9ac\uc18c\uadf8\ub798\ud53c\uc5d0 RTO\ub97c \uc0ac\uc6a9\ud558\uc5ec \uad6d\uac00 \ud45c\uc900\uc744 \ucda9\uc871\ud569\ub2c8\ub2e4. \uc774\uc2a4\ub77c\uc5d8 \ud0a4\ub974\uc58f\uac13\uc758 \uacf5\uc7a5\uc5d0\uc11c\ub294 \ud2b9\uc218 \uc6e8\uc774\ud37c \uc0dd\uc0b0\uc5d0 RTO\ub97c \uc801\uc6a9\ud569\ub2c8\ub2e4.<\/p>\n

\uc2f1\uac00\ud3ec\ub974 \uc8fc\ub871\uc5d0 \uc788\ub294 \ud074\ub9b0\ub8f8\uc5d0\ub294 \uc18c\ud615 RTO\uac00 \uc124\uce58\ub418\uc5b4 \uc788\uc2b5\ub2c8\ub2e4. \ub9d0\ub808\uc774\uc2dc\uc544 \ubc14\uc580\ub808\ud30c\uc2a4\uc5d0 \uc788\ub294 \uc2dc\uc124\uc5d0\uc11c\ub294 \ub9ac\uc18c\uadf8\ub798\ud53c \ubc30\uae30\uac00\uc2a4\ub97c \ud6a8\uc728\uc801\uc73c\ub85c \ucc98\ub9ac\ud569\ub2c8\ub2e4. \uc544\uc77c\ub79c\ub4dc \ub354\ube14\ub9b0\uc758 \ubc18\ub3c4\uccb4 \uacf5\uc7a5\uc5d0\uc11c\ub294 \uc5d0\ub108\uc9c0 \uc7ac\ud65c\uc6a9 RTO\ub97c \uc0ac\uc6a9\ud569\ub2c8\ub2e4.<\/p>\n

\ud540\ub780\ub4dc \uc5d0\uc2a4\ud3ec\uc758 \uc5f0\uad6c \uac1c\ubc1c \uc13c\ud130\ub294 \ucc28\uc138\ub300 \ub9ac\uc18c\uadf8\ub798\ud53c\ub97c \uc704\ud55c RTO(Remote Tracking Object)\ub97c \uc5f0\uad6c\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc624\uc2a4\ud2b8\ub9ac\uc544 \ube4c\ub77c\ud750\uc758 \uacf5\uc7a5\ub4e4\uc740 \uc804\ub825 \ubc18\ub3c4\uccb4\uc5d0 RTO\ub97c \uc801\uc6a9\ud558\uace0 \uc788\uc73c\uba70, \uc2a4\ud398\uc778 \ubc14\ub974\uc140\ub85c\ub098\uc758 \uc2dc\uc124\ub4e4\uc740 \ube44\uc6a9 \ud6a8\uc728\uc801\uc778 \uc624\uc5fc \uc800\uac10\uc5d0 \uc9d1\uc911\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\ud3f4\ub780\ub4dc \ube0c\ub85c\uce20\uc640\ud504\uc758 \uc2e0\ud765 \ud5c8\ube0c\ub4e4\uc740 RTO(\uc5ed\ud559\uae30\uc220\uc13c\ud130)\ub97c \ub3c4\uc785\ud588\uc2b5\ub2c8\ub2e4. \uccb4\ucf54 \ube0c\ub974\ub178\uc758 \uc2dc\uc124\ub4e4\uc740 \uc13c\uc11c\uc5d0 RTO\ub97c \ud65c\uc6a9\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ud3ec\ub974\ud22c\uac08 \ud3ec\ub974\ud22c\uc758 \uacf5\uc7a5\ub4e4\uc740 \uc804\uc790 \uc7a5\uce58 \ud1b5\ud569\uc5d0 RTO\ub97c \uc0ac\uc6a9\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\uc2a4\uc704\uc2a4 \ub1cc\uc0e4\ud154\uc758 \uc81c\uc870 \uc2dc\uc124\uc740 \uc815\ubc00\ud55c RTO(\ubc18\uc1a1\ud30c) \uc81c\uc5b4\uc5d0 \uc911\uc810\uc744 \ub450\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc2a4\uc6e8\ub374 \uc2a4\ud1a1\ud640\ub984\uc758 \uc2dc\uc124\uc740 \ud1b5\uc2e0 \uce69 \uc0dd\uc0b0\uc5d0 \uc8fc\ub825\ud558\uace0 \uc788\uc73c\uba70, \ub178\ub974\uc6e8\uc774 \uc624\uc2ac\ub85c\uc758 \uc2dc\uc124\uc740 \ud0c4\ud654\uaddc\uc18c \uc0dd\uc0b0\uc5d0 \uc8fc\ub825\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\ub374\ub9c8\ud06c \uc62c\ubcf4\ub974\uc758 \uc5f0\uad6c \uac1c\ubc1c \uc13c\ud130\ub294 \ub124\ub35c\ub780\ub4dc\uc758 \uc804\ubb38\uc131\uc744 \ud65c\uc6a9\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc0ac\ub840\ub4e4\uc740 \uc804 \uc138\uacc4 \ub9ac\uc18c\uadf8\ub798\ud53c \ubd84\uc57c\uc5d0\uc11c RTO(\uc5f0\uad6c \uac1c\ubc1c \uc13c\ud130)\uc758 \ub2e4\uc7ac\ub2e4\ub2a5\ud568\uc744 \ubcf4\uc5ec\uc90d\ub2c8\ub2e4.<\/p>\n

\ud544\uc218 \uad6c\uc131 \uc694\uc18c\ub85c\ub294 \uac00\uc2a4 \uc804\ud658\uc6a9 \ud3ec\ud3ab \ubc38\ube0c\uac00 \uc788\uc73c\uba70, \uc801\uc808\ud55c \ubc00\ubd09 \uc0c1\ud0dc\ub97c \uc720\uc9c0\ud560 \uacbd\uc6b0 10\ub144 \uc774\uc0c1 \uc0ac\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ucf54\ub514\uc5b4\ub77c\uc774\ud2b8 \ub610\ub294 \uba40\ub77c\uc774\ud2b8\ub85c \ub9cc\ub4e4\uc5b4\uc9c4 \uc138\ub77c\ubbf9 \ub9e4\uccb4 \ubca0\ub4dc\ub294 \ub192\uc740 \uc5f4\uc6a9\ub7c9\uacfc \ub0ae\uc740 \uc555\ub825 \uac15\ud558\ub97c \uc81c\uacf5\ud558\uba70, 5\ub144\ub9c8\ub2e4 \uad50\uccb4\ub429\ub2c8\ub2e4. \ubc84\ub108\ub294 \ub300\uac1c \uc800\uc9c8\uc18c\uc0b0\ud654\ubb3c(NOx) \uc720\ud615\uc73c\ub85c \uc548\uc815\uc801\uc778 \uc5f0\uc18c\ub97c \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/p>\n

\uac00\uc2a4\ucf13\uacfc \uc13c\uc11c\ucc98\ub7fc \ub9c8\ubaa8\uac00 \uc26c\uc6b4 \ubd80\ud488\uc740 \ubd84\uae30\ubcc4\ub85c \uc810\uac80\ud574\uc57c \ud569\ub2c8\ub2e4. \ubc38\ube0c \uad6c\ub3d9 \ubaa8\ud130\ub294 \ub0b4\uad6c\uc131\uc774 \ub6f0\uc5b4\ub098\uace0 \uc774\uc911\ud654 \uc2dc\uc2a4\ud15c\uc744 \uac16\ucd94\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc5f4\uad50\ud658\uae30\ub294 \uc5d0\ub108\uc9c0 \ud68c\uc218\uc6a9\uc73c\ub85c \uc124\uacc4\ub418\uc5c8\uc73c\uba70, \ub0b4\uc2dd\uc131\uc774 \ub6f0\uc5b4\ub09c \uc2a4\ud14c\uc778\ub9ac\uc2a4\uac15\uc73c\ub85c \uc81c\uc791\ub418\uc5c8\uc2b5\ub2c8\ub2e4.<\/p>\n

\"RTO<\/p>\n

RTO\uc758 \ubbf8\ub798\uc640 \ub9ac\uc18c\uadf8\ub798\ud53c \ud601\uc2e0<\/h2>\n

\ube0c\ub79c\ub4dc\ub97c \ube44\uad50\ud574 \ubcf4\uba74, D\u00fcrr\uc640 \uac19\uc740 \ud68c\uc0ac\ub294 \ud1b5\ud569\ud615 \uc2a4\ud06c\ub7ec\ubc84\ub97c \uac16\ucd98 \uacac\uace0\ud55c \ub9ac\uc18c\uadf8\ub798\ud53c \uc124\uacc4\ub97c \uc81c\uacf5\ud569\ub2c8\ub2e4. Anguil\uc740 \ub2e4\uc591\ud55c \uac00\uc2a4 \ubd80\ud558\uc5d0 \ub9de\ucdb0 \uc720\uc5f0\ud55c \uad6c\uc131\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. (\ucc38\uace0: \ubaa8\ub4e0 \uc81c\uc870\uc5c5\uccb4 \uc774\ub984\uacfc \ubd80\ud488 \ubc88\ud638\ub294 \ucc38\uc870\uc6a9\uc77c \ubfd0\uc774\uba70, EVER-POWER\ub294 \ub3c5\ub9bd\uc801\uc778 \uc81c\uc870\uc5c5\uccb4\uc785\ub2c8\ub2e4.) \ub2f9\uc0ac\uc758 \uc81c\ud488\uc740 \ud6a8\uc728\uc131 \uba74\uc5d0\uc11c \uc774\ub7ec\ud55c \uc81c\ud488\ub4e4\uacfc \ub3d9\ub4f1\ud558\uc9c0\ub9cc, <50 mg\/m\u00b3 \uc81c\ud55c\uc744 \ucda9\uc871\ud558\uae30 \uc704\ud55c \uac15\ud654\ub41c NOx \uc81c\uc5b4\uc640 \uac19\uc740 \ub124\ub35c\ub780\ub4dc \uaddc\uc815\uc5d0 \ub9de\ucd98 \ub9de\ucda4\ud615 \uae30\ub2a5\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n

\ud601\uc2e0\uc801\uc778 \uc544\uc774\ub514\uc5b4\ub97c \ub354\ud574 AI\ub97c \ud1b5\ud569\ud55c \uc608\uce21 \uc720\uc9c0\ubcf4\uc218 \uc2dc\uc2a4\ud15c\uc740 \ub9ac\uc18c\uadf8\ub798\ud53c \uc794\ub958\ubb3c\ub85c \uc778\ud55c \ubca0\ub4dc \ud30c\uc6b8\ub9c1\uc744 \uc608\uce21\ud558\uc5ec \uc218\uba85\uc744 20%\uae4c\uc9c0 \uc5f0\uc7a5\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ud558\uc774\ube0c\ub9ac\ub4dc RTO-RCO \uc2dc\uc2a4\ud15c\uc740 \uc628\ud654\ud55c \ub124\ub35c\ub780\ub4dc \uaca8\uc6b8\uc5d0 \uc5d0\ub108\uc9c0 \uc808\uc57d\uc744 \uc704\ud574 \uc628\ub3c4\ub97c \ub0ae\ucd9c \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ube14\ub85d\uccb4\uc778\uc744 \ud65c\uc6a9\ud55c \ubc30\ucd9c\ub7c9 \ucd94\uc801\uc740 \ud22c\uba85\ud55c \uaddc\uc815 \uc900\uc218 \ubcf4\uace0\ub97c \ubcf4\uc7a5\ud558\uc5ec \uc554\uc2a4\ud14c\ub974\ub2f4 \uae30\uc220 \uc5c5\uacc4\uc758 \uc9c0\uc18d \uac00\ub2a5\ud55c \ud22c\uc790\uc790\ub4e4\uc5d0\uac8c \ub9e4\ub825\uc801\uc778 \uc694\uc18c\uac00 \ub420 \uac83\uc785\ub2c8\ub2e4.<\/p>\n

\ub354 \uc790\uc138\ud788 \uc0b4\ud3b4\ubcf4\uba74, \ub9ac\uc18c\uadf8\ub798\ud53c \ubd84\uc57c\uc5d0\uc11c RTO\ub294 \uc5d0\uce6d \ub2e8\uacc4\uc5d0\uc11c \ubc1c\uc0dd\ud558\ub294 \ubbf8\ub7c9\uc758 \ud560\ub85c\uac90\uc744 \uc81c\uac70\ud558\uae30 \uc704\ud574 \ud50c\ub77c\uc988\ub9c8 \uc2a4\ud06c\ub7ec\ubc84\uc640 \uacb0\ud569\ub420 \uc218 \uc788\uc9c0\ub9cc, \ud504\ub7f0\ud2b8\uc5d4\ub4dc \uacf5\uc815\uc740 \uc8fc\ub85c \uc720\uae30\ubb3c \ucc98\ub9ac\uc5d0 \ucd08\uc810\uc744 \ub9de\ucd94\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ub9de\ucda4\ud615 \ub2e8\uc5f4\uc7ac\ub294 \ubc14\ub78c\uc774 \ub9ce\uc774 \ubd80\ub294 \ub124\ub35c\ub780\ub4dc \ud574\uc548 \uc9c0\uc5ed \uc2dc\uc124\uc758 \uc5f4 \uc190\uc2e4\uc744 \uc904\uc5ec\uc90d\ub2c8\ub2e4. \ubaa8\ub4c8\uc2dd \uc124\uacc4\ub294 ASML\uc758 \ud655\uc7a5\uacfc \uac19\uc774 \uc131\uc7a5\ud558\ub294 \uacf5\uc7a5\uc5d0 \ub9de\ucdb0 \ud655\uc7a5\uc131\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n

\uc6b4\uc601\uc801\uc778 \uad00\uc810\uc5d0\uc11c \ubcfc \ub54c, \ub124\ub35c\ub780\ub4dc \uc5d4\uc9c0\ub2c8\uc5b4\ub4e4\uc744 \uc704\ud55c \uad50\uc721 \ud504\ub85c\uadf8\ub7a8\uc740 \ubd81\ud574 \uc720\uc804 \uc548\uc804 \ud504\ub85c\ud1a0\ucf5c\uc744 \ucc38\uace0\ud558\uc5ec \uac00\uc5f0\uc131 \uc6a9\uc81c\uc758 \uc548\uc804\ud55c \ucde8\uae09\uc744 \uac15\uc870\ud569\ub2c8\ub2e4. \ube44\uc6a9 \ud3b8\uc775 \ubd84\uc11d \uacb0\uacfc, RTO(\uc9c0\uc5ed \uc218\uc1a1 \uae30\uc5c5)\ub294 \uc5d0\ub108\uc9c0 \uc808\uac10\uacfc \ubc8c\uae08 \ud68c\ud53c\ub97c \ud1b5\ud574 3~5\ub144 \ub0b4\uc5d0 \ud22c\uc790\uae08\uc744 \ud68c\uc218\ud560 \uc218 \uc788\ub294 \uac83\uc73c\ub85c \ub098\ud0c0\ub0ac\uc2b5\ub2c8\ub2e4.<\/p>\n

\ub9de\ucda4\ud615 \ud658\uae30 \uc2dc\uc2a4\ud15c\uc774 \ud544\uc694\ud558\uc2dc\uba74 \ub85c\ud14c\ub974\ub2f4 \ud300\uc5d0 \ubb38\uc758\ud558\uc138\uc694. RTO<\/a> \uac80\uc99d\ub41c \uc2e0\ub8b0\uc131\uc73c\ub85c \uc6b4\uc601\uc744 \ubcf4\ud638\ud558\ub294 \uacc4\ud68d\uc785\ub2c8\ub2e4.<\/p>\n

 <\/p>","protected":false},"excerpt":{"rendered":"

In the heart of Europe’s innovation hub, the Netherlands stands as a global leader in semiconductor technology, driven by companies like ASML that pioneer extreme ultraviolet lithography systems. This precision-driven industry, focused on wafer patterning and photoresist application, generates specific waste gases that demand reliable abatement to maintain cleanroom integrity and environmental responsibility. Regenerative Thermal […]<\/p>","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_et_pb_use_builder":"","_et_pb_old_content":"","_et_gb_content_width":"","footnotes":""},"categories":[1],"tags":[],"class_list":["post-2011","post","type-post","status-publish","format-standard","hentry","category-uncategorized"],"_links":{"self":[{"href":"https:\/\/regenerative-thermal-oxidation.com\/ko\/wp-json\/wp\/v2\/posts\/2011","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/regenerative-thermal-oxidation.com\/ko\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/regenerative-thermal-oxidation.com\/ko\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/regenerative-thermal-oxidation.com\/ko\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/regenerative-thermal-oxidation.com\/ko\/wp-json\/wp\/v2\/comments?post=2011"}],"version-history":[{"count":4,"href":"https:\/\/regenerative-thermal-oxidation.com\/ko\/wp-json\/wp\/v2\/posts\/2011\/revisions"}],"predecessor-version":[{"id":2099,"href":"https:\/\/regenerative-thermal-oxidation.com\/ko\/wp-json\/wp\/v2\/posts\/2011\/revisions\/2099"}],"wp:attachment":[{"href":"https:\/\/regenerative-thermal-oxidation.com\/ko\/wp-json\/wp\/v2\/media?parent=2011"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/regenerative-thermal-oxidation.com\/ko\/wp-json\/wp\/v2\/categories?post=2011"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/regenerative-thermal-oxidation.com\/ko\/wp-json\/wp\/v2\/tags?post=2011"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}