{"id":1989,"date":"2025-12-19T08:58:19","date_gmt":"2025-12-19T08:58:19","guid":{"rendered":"https:\/\/regenerative-thermal-oxidation.com\/?p=1989"},"modified":"2025-12-19T08:58:19","modified_gmt":"2025-12-19T08:58:19","slug":"%e5%8d%8a%e5%af%bc%e4%bd%93%e5%85%89%e5%88%bb%e5%b7%a5%e8%89%ba%e5%ba%9f%e6%b0%94%e5%87%8f%e6%8e%92%ef%bc%9a%e5%a6%82%e4%bd%95%e5%9c%a8%e5%90%88%e8%a7%84%e6%80%a7%e5%92%8c%e6%99%b6%e5%9c%86%e8%89%af","status":"publish","type":"post","link":"https:\/\/regenerative-thermal-oxidation.com\/zh\/%e5%ba%94%e7%94%a8\/%e5%8d%8a%e5%af%bc%e4%bd%93%e5%85%89%e5%88%bb%e5%b7%a5%e8%89%ba%e5%ba%9f%e6%b0%94%e5%87%8f%e6%8e%92%ef%bc%9a%e5%a6%82%e4%bd%95%e5%9c%a8%e5%90%88%e8%a7%84%e6%80%a7%e5%92%8c%e6%99%b6%e5%9c%86%e8%89%af\/","title":{"rendered":"\u534a\u5bfc\u4f53\u5149\u523b\u5e9f\u6c14\u51cf\u6392\uff1a\u5e73\u8861\u5408\u89c4\u6027\u548c\u6676\u5706\u826f\u7387"},"content":{"rendered":"<p>\u968f\u7740\u534a\u5bfc\u4f53\u884c\u4e1a\u8fc8\u51653\u7eb3\u7c73\u548c2\u7eb3\u7c73\u5236\u7a0b\u8282\u70b9\u7684\u201c\u57c3\u7c73\u65f6\u4ee3\u201d\uff0c\u6240\u6709\u5de5\u5382\u914d\u5957\u7cfb\u7edf\u90fd\u9762\u4e34\u7740\u524d\u6240\u672a\u6709\u7684\u6311\u6218\u3002\u524d\u7aef\u5de5\u827a\uff08FEOL\uff09\u4e2d\u7684\u5149\u523b\u548c\u5f00\u53d1\u6a21\u5757\u662f\u6676\u5706\u5382\u4e2d\u8d44\u672c\u5bc6\u96c6\u5ea6\u6700\u9ad8\u3001\u5bf9\u73af\u5883\u6700\u654f\u611f\u7684\u73af\u8282\u3002<\/p>\n<p>\u5728\u8fd9\u79cd\u9ad8\u98ce\u9669\u7684\u73af\u5883\u4e0b\uff0c\u7ba1\u7406\u6325\u53d1\u6027\u6709\u673a\u5316\u5408\u7269\uff08VOCs\uff09\u81f3\u5173\u91cd\u8981\u3002 <strong>PGMEA<\/strong> \u548c <strong>\u516d\u7532\u57fa\u4e8c\u786b\u5316\u7269<\/strong> \u8fd9\u4e0d\u4ec5\u4ec5\u662f\u4e00\u9879\u73af\u4fdd\u8981\u6c42\u3002\u5982\u679c\u84c4\u70ed\u5f0f\u70ed\u6c27\u5316\u5668\uff08RTO\uff09\u7cfb\u7edf\u4ea7\u751f\u54ea\u6015\u662f\u5fae\u91cf\u7684\u5e9f\u6c14\uff0c\u4e5f\u4f1a\u5bf9\u73af\u5883\u9020\u6210\u5f71\u54cd\u3002 <strong>\u538b\u529b\u6ce2\u52a8<\/strong> \u6216\u8005 <strong>\u632f\u52a8<\/strong>\u8fd9\u4f1a\u5bfc\u81f4\u626b\u63cf\u4eea\u5931\u7126\uff0c\u8fdb\u800c\u9020\u6210\u6574\u6279\u6676\u5706\u826f\u7387\u7684\u707e\u96be\u6027\u635f\u5931\u3002\u6211\u4eec\u5982\u4f55\u5728\u6ee1\u8db3\u5168\u7403ESG\u6807\u51c6\u7684\u540c\u65f6\u5b9e\u73b0\u201c\u96f6\u5e72\u6270\u201d\u6392\u653e\uff1f<\/p>\n<h2><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-1754\" src=\"https:\/\/regenerative-thermal-oxidation.com\/wp-content\/uploads\/2025\/12\/screenshot_2025-12-10_11-12-25.webp\" alt=\"\u7535\u5b50\u5236\u9020\u4e1a\" width=\"497\" height=\"327\" srcset=\"https:\/\/regenerative-thermal-oxidation.com\/wp-content\/uploads\/2025\/12\/screenshot_2025-12-10_11-12-25.webp 497w, https:\/\/regenerative-thermal-oxidation.com\/wp-content\/uploads\/2025\/12\/screenshot_2025-12-10_11-12-25-480x316.webp 480w\" sizes=\"(min-width: 0px) and (max-width: 480px) 480px, (min-width: 481px) 497px, 100vw\" \/><\/h2>\n<h2>\u6838\u5fc3\u6311\u6218\uff1a\u4e3a\u4ec0\u4e48\u4f20\u7edfRTO\u5728\u5149\u523b\u65b9\u9762\u4e3e\u6b65\u7ef4\u8270\uff08\u95ee\u7b54\uff09<\/h2>\n<h3>1. \u4ec0\u4e48\u662f RTO \u5f15\u8d77\u7684\u201c\u538b\u529b\u8109\u51b2\u201d\uff1f<\/h3>\n<p>\u4f20\u7edf\u7684\u53cc\u5854\u6216\u4e09\u5854\u5f0fRTO\u91c7\u7528\u6c14\u52a8\u9600\u8fdb\u884c\u5207\u6362\u3002\u5207\u6362\u77ac\u95f4\uff0c\u6392\u6c14\u7ba1\u9053\u5185\u4f1a\u4ea7\u751f\u77ac\u65f6\u538b\u529b\u6ce2\u52a8\uff08\u901a\u5e38\u5728\u00b150 Pa\u81f3\u00b1200 Pa\u4e4b\u95f4\uff09\u3002\u5bf9\u4e8e\u7cbe\u5bc6\u626b\u63cf\u5668\u800c\u8a00\uff0c\u8fd9\u79cd\u8109\u51b2\u4f1a\u7834\u574f\u8f68\u9053\uff08\u6d82\u5e03\u5668\/\u663e\u5f71\u5668\uff09\u5185\u7684\u5fae\u73af\u5883\u5e73\u8861\uff0c\u4ece\u800c\u89e6\u53d1\u8054\u9501\u62a5\u8b66\u5e76\u5bfc\u81f4\u505c\u673a\u3002<\/p>\n<h3>2. \u4e3a\u4ec0\u4e48\u65cb\u8f6c\u5f0f RTO \u662f\u6676\u5706\u5382\u7684\u9996\u9009\uff1f<\/h3>\n<p><strong>\u65cb\u8f6c\u5f0fRTO<\/strong> \u91c7\u7528\u8fde\u7eed\u65cb\u8f6c\u7684\u5206\u914d\u9600\u4ee3\u66ff\u5f80\u590d\u5f0f\u9525\u9600\u3002\u8fd9\u53ef\u63d0\u4f9b\u6781\u5176\u5e73\u7a33\u8fde\u7eed\u7684\u6c14\u6d41\uff0c\u6d88\u9664\u538b\u529b\u8109\u51b2\u3002\u5b83\u786e\u4fdd\u6392\u6c14\u7cfb\u7edf\u4e2d\u7684\u9759\u538b\u6ce2\u52a8\u4fdd\u6301\u5728\u4e00\u5b9a\u8303\u56f4\u5185\u3002 <strong>\u00b110 Pa<\/strong>\u5b9e\u73b0\u771f\u6b63\u7684 <strong>\u96f6\u8109\u51b2\u2122<\/strong> \u8868\u73b0\u3002<\/p>\n<h3>3. \u5982\u4f55\u9632\u6b62\u534a\u5bfc\u4f53\u5e9f\u6c14\u4e2d\u7684\u201c\u4e8c\u6b21\u6c61\u67d3\u201d\uff1f<\/h3>\n<p>\u5149\u523b\u5e9f\u6c14\u4e2d\u901a\u5e38\u542b\u6709\u7845\u6c27\u70f7\uff08\u6765\u81ea\u516d\u7532\u57fa\u4e8c\u7845\u6c27\u70f7\u5206\u89e3\uff09\uff0c\u8fd9\u4e9b\u7845\u6c27\u70f7\u4f1a\u5f62\u6210\u786c\u8d28\u9897\u7c92\u3002 <strong>\u4e8c\u6c27\u5316\u7845\uff08<\/strong>$SiO_2$<strong>)<\/strong> RTO\u5185\u90e8\u79ef\u805a\u7070\u5c18\u3002\u5982\u679c\u6ca1\u6709\u9002\u5f53\u7684\u8fc7\u6ee4\u548c\u6d41\u91cf\u63a7\u5236\uff0c\u8fd9\u4e9b\u7070\u5c18\u4f1a\u8fc1\u79fb\u56de\u8bbe\u65bd\u5185\u6216\u4ece\u70df\u56f1\u6392\u51fa\uff0c\u4ece\u800c\u5f71\u54cd\u6d01\u51c0\u5ba4\u7684\u7b49\u7ea7\u8bc4\u5b9a\u3002<\/p>\n<h2><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-1749\" src=\"https:\/\/regenerative-thermal-oxidation.com\/wp-content\/uploads\/2025\/12\/screenshot_2025-12-10_10-19-41.webp\" alt=\"\u6062\u590d\u8fd0\u8425\" width=\"717\" height=\"473\" srcset=\"https:\/\/regenerative-thermal-oxidation.com\/wp-content\/uploads\/2025\/12\/screenshot_2025-12-10_10-19-41.webp 717w, https:\/\/regenerative-thermal-oxidation.com\/wp-content\/uploads\/2025\/12\/screenshot_2025-12-10_10-19-41-480x317.webp 480w\" sizes=\"(min-width: 0px) and (max-width: 480px) 480px, (min-width: 481px) 717px, 100vw\" \/><\/h2>\n<h2>\u00a0\u6280\u672f\u89c4\u683c\uff1a\u4ee5\u4ea7\u91cf\u4e3a\u5bfc\u5411\u7684\u57fa\u51c6<\/h2>\n<p>\u5bf9\u4e8e\u524d\u7aef\u5de5\u827a\u534a\u5bfc\u4f53\u5de5\u827a\uff0cRTO\u6027\u80fd\u6307\u6807\u5df2\u4ece\u201c\u7834\u574f\u6548\u7387\u201d\u8f6c\u53d8\u4e3a\u201c\u7a33\u5b9a\u6027\u53c2\u6570\u201d\uff1a<\/p>\n<h3>\u4e3b\u8981\u6280\u672f\u53c2\u6570\u8868<\/h3>\n<table>\n<tbody>\n<tr>\n<th>\u6280\u672f\u6307\u6807<\/th>\n<th>\u53c2\u6570\u8303\u56f4<\/th>\n<th>\u5bf9\u6676\u5706\u826f\u7387\u7684\u5f71\u54cd<\/th>\n<th>\u884c\u4e1a\u53c2\u8003<\/th>\n<\/tr>\n<tr>\n<td><strong>\u538b\u529b\u6ce2\u52a8<\/strong><\/td>\n<td><strong>\u2264 \u00b110 Pa<\/strong><\/td>\n<td>\u6838\u5fc3\u6307\u6807\uff1b\u9632\u6b62\u626b\u63cf\u4eea\u73af\u5883\u4e0d\u7a33\u5b9a\u3002<\/td>\n<td>\u534a\u6807\u51c6 F15<\/td>\n<\/tr>\n<tr>\n<td><strong>\u632f\u52a8\u6c34\u5e73 (VC)<\/strong><\/td>\n<td>VC-A \/ VC-B<\/td>\n<td>\u9632\u6b62\u5149\u5b66\u5143\u4ef6\u53d1\u751f\u673a\u68b0\u5171\u632f\u3002<\/td>\n<td>IEST\u6d01\u51c0\u5ba4\u6807\u51c6<\/td>\n<\/tr>\n<tr>\n<td><strong>VOC \u9500\u6bc1 (DRE)<\/strong><\/td>\n<td><strong>\u2265 99.5%<\/strong><\/td>\n<td>\u786e\u4fdd PGMEA\/\u6eb6\u5242\u6392\u653e\u91cf\u8d85\u8fc7\u5168\u7403\u6cd5\u89c4\u89c4\u5b9a\u3002<\/td>\n<td>\u73af\u5883\u6cd5<\/td>\n<\/tr>\n<tr>\n<td><strong>\u70ed\u6548\u7387\uff08TER\uff09<\/strong><\/td>\n<td>95% &#8211; 97%<\/td>\n<td>\u964d\u4f4e\u5343\u5146\u6676\u5706\u5382\u7684\u8fd0\u8425\u6210\u672c\uff1b\u7b26\u5408ESG\u76ee\u6807\u3002<\/td>\n<td>\u7eff\u8272\u5de5\u5382\u6807\u51c6<\/td>\n<\/tr>\n<tr>\n<td><strong>\u9897\u7c92\u7269\u6d53\u5ea6<\/strong><\/td>\n<td>&lt; 1 mg\/m\u00b3<\/td>\n<td>\u9632\u6b62\u6d01\u51c0\u5ba4\u4e8c\u6b21\u7c89\u5c18\u6c61\u67d3\u3002<\/td>\n<td>ISO 1-5\u7ea7<\/td>\n<\/tr>\n<tr>\n<td><strong>\u9600\u95e8\u5f00\u5173\u65f6\u95f4<\/strong><\/td>\n<td>\u8fde\u7eed\u65cb\u8f6c<\/td>\n<td>\u6d88\u9664\u6c14\u6d41\u4e2d\u7684\u201c\u6c34\u9524\u201d\u6548\u5e94\u3002<\/td>\n<td>\u6d41\u4f53\u52a8\u529b\u5b66\u8ba1\u7b97<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>\u6280\u672f\u6df1\u5ea6\u89e3\u6790\uff1a<\/h3>\n<ul>\n<li><strong>\u65cb\u8f6c\u9600\u5de5\u7a0b<\/strong>\u65cb\u8f6c\u5f0fRTO\u91c7\u7528\u5355\u4e2a\u7cbe\u5bc6\u52a0\u5de5\u7684\u5206\u914d\u9600\u3002\u8fd9\u6d88\u9664\u4e86\u9525\u9600\u5f0f\u88c5\u7f6e\u5728\u5854\u5f0f\u5207\u6362\u8fc7\u7a0b\u4e2d\u4ea7\u751f\u7684\u201c\u6b7b\u65f6\u95f4\u201d\u771f\u7a7a\uff0c\u4ece\u800c\u4fdd\u62a4\u4e86\u626b\u63cf\u5668\u7684\u7cbe\u5bc6\u538b\u529b\u8bbe\u5b9a\u70b9\u3002<\/li>\n<li><strong>\u4f4e\u632f\u52a8\u8bbe\u8ba1<\/strong>\u7531\u4e8e\u6ca1\u6709\u6c89\u91cd\u7684\u63d0\u5347\u9600\u649e\u51fb\u9600\u5ea7\uff0c\u673a\u68b0\u632f\u52a8\u51e0\u4e4e\u88ab\u6d88\u9664\u2014\u2014\u8fd9\u5bf9\u4e8e\u4f4d\u4e8e\u5bf9\u632f\u52a8\u654f\u611f\u7684\u201c\u6d01\u51c0\u5ba4\u5149\u523b\u95f4\u201d\u9644\u8fd1\u7684\u8bbe\u5907\u6765\u8bf4\u662f\u4e00\u4e2a\u5173\u952e\u56e0\u7d20\u3002<\/li>\n<\/ul>\n<h2>\u5e94\u7528\u573a\u666f\uff1a\u4f18\u52bf\u4e0e\u5c40\u9650\u6027<\/h2>\n<h3>\u573a\u666f\u5206\u6790\uff1a\u5149\u523b\u4e0e\u8ddf\u8e2a\uff08\u9ad8\u4ea7\u91cf\u3001\u9ad8\u7a33\u5b9a\u6027\uff09<\/h3>\n<ul>\n<li><strong>\u7279\u5f81<\/strong>\uff1aVOC \u6210\u5206\u76f8\u5bf9\u7a33\u5b9a\uff08\u4e3b\u8981\u4e3a PGMEA\/\u6eb6\u5242\uff09\uff0c\u4f46\u9700\u8981 365x24 \u5c0f\u65f6\u4e0d\u95f4\u65ad\u8fd0\u884c\u3002<\/li>\n<li><strong>\u4f18\u52bf<\/strong>:\n<ul>\n<li><strong>\u4ea7\u91cf\u4fdd\u62a4<\/strong>\u96f6\u8109\u51b2\u7279\u6027\u786e\u4fdd\u4e86\u5149\u523b\u5de5\u827a\u7a97\u53e3\u7684\u7a33\u5b9a\u6027\u3002<\/li>\n<li><strong>\u9ad8\u53ef\u9760\u6027<\/strong>\u5355\u9600\u8bbe\u8ba1\u51cf\u5c11\u4e86\u4e0e\u9600\u95e8\u6267\u884c\u5668\u548c\u4f20\u611f\u5668\u76f8\u5173\u7684\u6570\u767e\u4e2a\u6f5c\u5728\u6545\u969c\u70b9\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u5c40\u9650\u6027<\/strong>:\n<ul>\n<li><strong>\u4e8c\u6c27\u5316\u7845\u6c89\u79ef<\/strong>\uff1a\u5982\u679c\u5904\u7406 HMDS\uff0c\u5219\u9700\u8981\u5b9a\u671f\u201c\u70d8\u70e4\u201d\u6216\u7ef4\u62a4\u5468\u671f\uff0c\u4ee5\u9632\u6b62 $SiO_2$ \u5728\u9676\u74f7\u4ecb\u8d28\u200b\u200b\u4e0a\u79ef\u805a\u3002<\/li>\n<li><strong>\u8d44\u672c\u6295\u8d44<\/strong>\u9ad8\u6027\u80fd\u65cb\u8f6c\u9600\u9700\u8981\u7cbe\u5bc6\u52a0\u5de5\uff0c\u56e0\u6b64\u4e0e\u666e\u901a\u65cb\u8f6c\u9600\u76f8\u6bd4\uff0c\u5176\u521d\u59cb\u6210\u672c\u66f4\u9ad8\u3002<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<h2>\u5173\u952e\u7ec4\u4ef6\u548c\u7cfb\u7edf\u5efa\u8bae<\/h2>\n<ol>\n<li><strong>\u9ad8\u7cbe\u5ea6\u65cb\u8f6c\u9600<\/strong>\u91c7\u7528\u7279\u6b8a\u5408\u91d1\u5236\u9020\uff0c\u5e76\u5177\u6709\u5148\u8fdb\u7684\u5bc6\u5c01\u6027\u80fd\uff0c\u786e\u4fdd\u96f6\u6cc4\u6f0f\u548c\u957f\u4e45\u4f7f\u7528\u5bff\u547d\u3002<\/li>\n<li><strong>\u591a\u7ea7\u9884\u8fc7\u6ee4\uff08HEPA\uff09<\/strong>\u5bf9\u4e8e FEOL \u5de5\u827a\uff0c\u5e9f\u6c14\u5728\u8fdb\u5165 RTO \u4e4b\u524d\u5fc5\u987b\u7ecf\u8fc7\u4e25\u683c\u8fc7\u6ee4\uff0c\u4ee5\u4fdd\u62a4\u9676\u74f7\u4ecb\u8d28\u514d\u53d7\u610f\u5916\u7684\u7845\u6c27\u70f7\u91c9\u5316\u3002<\/li>\n<li><strong>\u53cc\u53d8\u9891\u5668\u5197\u4f59\uff08VFD\uff09<\/strong>\uff1a\u4e3b\/\u4ece VFD \u914d\u7f6e\u5141\u8bb8\u5728\u6a21\u5757\u53d1\u751f\u6545\u969c\u65f6\u8fdb\u884c\u6beb\u79d2\u7ea7\u5207\u6362\uff0c\u4ece\u800c\u786e\u4fdd\u6392\u6c14\u7cfb\u7edf\u96f6\u505c\u673a\u65f6\u95f4\u3002<\/li>\n<li><strong>\u4e8c\u6b21\u70ed\u56de\u6536<\/strong>\uff1a\u56de\u6536\u71c3\u70e7\u4ea7\u751f\u7684\u70ed\u91cf\uff0c\u7528\u4e8e\u6d01\u51c0\u5ba4\u7684\u9664\u6e7f\u6216\u518d\u52a0\u70ed\u7cfb\u7edf\uff0c\u4ece\u800c\u5f62\u6210\u95ed\u5408\u7684\u80fd\u91cf\u5faa\u73af\u3002<\/li>\n<\/ol>\n<h2>\u00a0\u4e3b\u6d41RTO\u54c1\u724c\u6bd4\u8f83\uff08\u534a\u5bfc\u4f53\u89c6\u89d2\uff09<\/h2>\n<table>\n<tbody>\n<tr>\n<th>\u54c1\u724c<\/th>\n<th>\u6838\u5fc3\u529b\u91cf<\/th>\n<th>\u538b\u529b\u63a7\u5236<\/th>\n<th>\u51b3\u7b56\u903b\u8f91<\/th>\n<\/tr>\n<tr>\n<td><strong>\u675c\u5c14\uff08Ecopure\uff09<\/strong><\/td>\n<td>\u65cb\u8f6c\u5f0f RTO \u7684\u5148\u9a71\uff1b\u5728 Tier-1 \u6676\u5706\u5382\uff08\u53f0\u79ef\u7535\u3001\u82f1\u7279\u5c14\uff09\u62e5\u6709\u5e9e\u5927\u7684\u88c5\u673a\u91cf\u3002<\/td>\n<td>\u6781\u7aef\u503c\uff08\u00b15 Pa\uff09<\/td>\n<td>\u6700\u9002\u5408\u9884\u7b97\u5145\u8db3\u3001\u8ffd\u6c42\u5168\u7403\u201c\u9ec4\u91d1\u6807\u51c6\u201d\u7684 12 \u82f1\u5bf8\u6676\u5706\u5382\u3002<\/td>\n<\/tr>\n<tr>\n<td><strong>\u6c38\u80fd\uff08Yurcent\uff09<\/strong><\/td>\n<td><strong>Zero-Pulse\u2122\u4e13\u5229\u6280\u672f<\/strong>\u5bf9PGMEA\u6fc0\u589e\u60c5\u51b5\u505a\u51fa\u7075\u6d3b\u5e94\u5bf9\u3002<\/td>\n<td>\u4f18\u826f\uff08\u00b110 Pa\uff09<\/td>\n<td>\u6700\u9002\u5408 <strong>\u6210\u672c\u6548\u76ca<\/strong> \u4ee5\u53ca\u672c\u5730\u5316\u7684\u5de5\u7a0b\u652f\u6301\u3002<\/td>\n<\/tr>\n<tr>\n<td><strong>\u5927\u6c14\u793e<\/strong><\/td>\n<td>\u6c14\u6d41\u6a21\u62df\u9886\u57df\u7684\u4e13\u5bb6\uff1b\u5728\u65e5\u672c\u8bbe\u5907\u4ea7\u4e1a\u94fe\u4e2d\u5360\u636e\u4e3b\u5bfc\u5730\u4f4d\u3002<\/td>\n<td>\u51fa\u8272\u7684<\/td>\n<td>\u975e\u5e38\u9002\u5408\u4e0e\u65e5\u672c\u5236\u9020\u7684\u80f6\u5370\u751f\u4ea7\u7ebf\u6df1\u5ea6\u96c6\u6210\u3002<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h2>\u00a0\u5c06\u5168\u7403\u5408\u89c4\u4e0e\u6536\u76ca\u7ba1\u7406\u76f8\u7ed3\u5408<\/h2>\n<p>\u534a\u5bfc\u4f53\u516c\u53f8\u5728\u5168\u7403\u8303\u56f4\u5185\u6269\u5f20\u65f6\uff0c\u5fc5\u987b\u540c\u65f6\u6ee1\u8db3\u6700\u4e25\u683c\u7684\u73af\u5883\u6807\u51c6\u548c\u6700\u82db\u523b\u7684\u826f\u7387\u76ee\u6807\u3002<\/p>\n<ol>\n<li><strong>\u76d1\u7ba1\u6846\u67b6<\/strong>:\n<ul>\n<li><strong>\u53f0\u6e7e\/\u4e2d\u56fd\u5927\u9646<\/strong>\uff1a\u4e25\u683c\u7684\u534a\u5bfc\u4f53\u7279\u5b9a\u6807\u51c6\uff0c\u901a\u5e38\u8981\u6c42 &gt;95% DRE\uff08\u4e00\u7ea7\u6676\u5706\u5382\u81ea\u6211\u8c03\u8282\u4e3a &gt;99.5%\uff09\u3002<\/li>\n<li><strong>\u7f8e\u56fd\/\u6b27\u76df<\/strong>\uff1aNESHAP \u7535\u5b50\u884c\u4e1a\u6807\u51c6\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u73af\u5883\u3001\u793e\u4f1a\u53ca\u6cbb\u7406\u4e0e\u97e7\u6027<\/strong>\u6295\u8d44\u9ad8\u6548\u65cb\u8f6c\u5f0f RTO \u6709\u52a9\u4e8e\u63d0\u9ad8\u516c\u53f8\u7684 ESG \u8bc4\u5206\uff0c\u540c\u65f6\u8fd8\u80fd\u4f5c\u4e3a\u4e00\u9879\u201c\u8bbe\u65bd\u97e7\u6027\u201d\u63aa\u65bd\uff0c\u9632\u6b62\u4ee3\u4ef7\u9ad8\u6602\u7684\u751f\u4ea7\u7ebf\u505c\u5de5\u3002<\/li>\n<\/ol>\n<h2>\u00a0\u5b9e\u5730\u7ecf\u9a8c\u4e0e\u6848\u4f8b\u7814\u7a76<\/h2>\n<h3>\u4e13\u5bb6\u89c1\u89e3\uff1a\u4e0d\u8981\u8ba9\u533a\u57df\u8f93\u7535\u7ec4\u7ec7\u6210\u4e3a\u201c\u9707\u6e90\u201d<\/h3>\n<p>\u5728\u6700\u8fd1\u7684\u4e00\u4e2a\u9ad8\u7ea7\u903b\u8f91\u82af\u7247\u9879\u76ee\u4e2d\uff0c\u5ba2\u6237\u6700\u521d\u5c1d\u8bd5\u4f7f\u7528\u6807\u51c6\u7684\u9600\u82af\u5f0f RTO\u3002<\/p>\n<ul>\n<li><strong>\u75db\u70b9<\/strong>\u6bcf\u6b21 RTO \u5207\u6362\u9600\u95e8\u65f6\uff0c\u5149\u523b\u8231\u5185\u7684\u5fae\u538b\u8868\u90fd\u4f1a\u5267\u70c8\u6ce2\u52a8\uff0c\u5bfc\u81f4\u626b\u63cf\u4eea\u8df3\u95f8\u5e76\u8fdb\u5165\u5b89\u5168\u6a21\u5f0f\u3002<\/li>\n<li><strong>\u89e3\u51b3\u65b9\u6848<\/strong>\u6211\u4eec\u7528\u4e00\u53f0\u8bbe\u5907\u66ff\u6362\u4e86\u539f\u6709\u7684\u8bbe\u5907\u3002 <strong>Ever-Power\u65cb\u8f6c\u5f0fRTO<\/strong> \u5e76\u5bf9\u98ce\u6247\u6ed1\u6a47\u5b9e\u65bd\u4e86\u4e3b\u52a8\u51cf\u632f\u3002<\/li>\n<li><strong>\u7ed3\u679c<\/strong>\u538b\u529b\u8109\u51b2\u88ab\u5b8c\u5168\u6d88\u9664\u3002\u7531\u4e8e\u201c\u5931\u7126\u7f3a\u9677\u201d\u5bfc\u81f4\u7684\u5e9f\u54c1\u7387\u4e0b\u964d\u4e86 1.5%\uff0c\u6bcf\u5e74\u53ef\u5e26\u6765\u6570\u767e\u4e07\u7f8e\u5143\u7684\u7ecf\u6d4e\u6548\u76ca\u3002<\/li>\n<\/ul>\n<h2>\u672a\u6765\u8d8b\u52bf\uff1a\u667a\u80fd\u5de5\u5382\u4e2d\u7684VOC\u7ba1\u7406<\/h2>\n<ul>\n<li><strong>\u52a8\u6001\u6c14\u6d41\u5e73\u8861<\/strong>\u672a\u6765\u7684 RTO \u5c06\u76f4\u63a5\u4e0e\u626b\u63cf\u4eea\u901a\u4fe1\uff0c\u9884\u6d4b\u6392\u6c14\u9700\u6c42\u5e76\u5b9e\u65f6\u8c03\u6574\u98ce\u6247\u901f\u5ea6\u4ee5\u4fdd\u6301\u6052\u5b9a\u7684\u538b\u529b\u3002<\/li>\n<li><strong>\u5168\u751f\u547d\u5468\u671f\u6392\u653e\u76d1\u6d4b<\/strong>\uff1a\u96c6\u6210\u5728\u7ebf\u8d28\u8c31\u4eea\u5c06\u5b9e\u65f6\u76d1\u6d4bPGMEA\u6c27\u5316\uff0c\u5b9e\u73b0\u771f\u6b63\u7684\u201c\u51c0\u96f6\u201d\u8fd0\u8425\u900f\u660e\u5ea6\u3002<\/li>\n<\/ul>\n<p><strong>\u7ed3\u8bba<\/strong>\u5728\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\uff0c\u73af\u4fdd\u8bbe\u5907\u4e0d\u518d\u662f\u201c\u6392\u6c14\u7ba1\u7684\u9644\u52a0\u7ec4\u4ef6\u201d\uff0c\u800c\u662f\u826f\u7387\u751f\u6001\u7cfb\u7edf\u4e2d\u7684\u5173\u952e\u73af\u8282\u3002\u65cb\u8f6c\u5f0f <a href=\"https:\/\/regenerative-thermal-oxidation.com\/zh\/\">\u6062\u590d\u8fd0\u8425<\/a>\u4ee5\u201c\u7a33\u5b9a\u6027\u7b2c\u4e00\u201d\u4e3a\u6838\u5fc3\uff0c\u5b83\u6b63\u6210\u4e3aFabs\u5728Angstrom\u65f6\u4ee3\u822a\u884c\u7684\u7eff\u8272\u901a\u884c\u8bc1\u3002<\/p>","protected":false},"excerpt":{"rendered":"<p>As the semiconductor industry enters the &#8220;Angstrom Era&#8221; of 3nm and 2nm nodes, every facility support system is facing unprecedented challenges. The photolithography and development modules in the Front-End of Line (FEOL) represent the most capital-intensive and environmentally sensitive areas of the fab. In this high-stakes environment, managing Volatile Organic Compounds (VOCs) like PGMEA and [&hellip;]<\/p>","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_et_pb_use_builder":"","_et_pb_old_content":"","_et_gb_content_width":"","footnotes":""},"categories":[1],"tags":[],"class_list":["post-1989","post","type-post","status-publish","format-standard","hentry","category-uncategorized"],"_links":{"self":[{"href":"https:\/\/regenerative-thermal-oxidation.com\/zh\/wp-json\/wp\/v2\/posts\/1989","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/regenerative-thermal-oxidation.com\/zh\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/regenerative-thermal-oxidation.com\/zh\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/regenerative-thermal-oxidation.com\/zh\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/regenerative-thermal-oxidation.com\/zh\/wp-json\/wp\/v2\/comments?post=1989"}],"version-history":[{"count":1,"href":"https:\/\/regenerative-thermal-oxidation.com\/zh\/wp-json\/wp\/v2\/posts\/1989\/revisions"}],"predecessor-version":[{"id":1990,"href":"https:\/\/regenerative-thermal-oxidation.com\/zh\/wp-json\/wp\/v2\/posts\/1989\/revisions\/1990"}],"wp:attachment":[{"href":"https:\/\/regenerative-thermal-oxidation.com\/zh\/wp-json\/wp\/v2\/media?parent=1989"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/regenerative-thermal-oxidation.com\/zh\/wp-json\/wp\/v2\/categories?post=1989"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/regenerative-thermal-oxidation.com\/zh\/wp-json\/wp\/v2\/tags?post=1989"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}